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Lcd Indication - EBARA ESA25-D Instruction Manual

Multi-stage dry vacuum pump

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P.32

6.2 LCD Indication

The operating status of the pump is displayed on the LCD display of the
controller. For details of display, see Tables 6.1.
No
Motor current
1
Control mode
2
Pump running mode
Alarm history
3
(Indication of history)
Pump unit No.
4
Pump type
5
Total operation time
6
Back pressure (option)
7
Pump N
8
Cooling water flow
9
Pump casing temperature
10
WARNING/ALARM
11
1.
Three control modes are available : "LOCAL" (local operation) , "REMOTE"
(remote operation) and "COM" (Communication operation).
2.
" % " shows present number of WARNING/ALARM.
3.
Upper row "$$$$$$" distinguishes between WARNING/ALARM and
indicates the position where WARNING/ALARM has occurred.
Lower row "$$$$$$" displays details of WARNING/ALARM.
PM10U
Table 6.1 LCD controller indication
ITEM
gas flow
2
INDICATION
M P :
# # .
C O N T R O L :
M O D E :
N O R M A L
A L A R M /
W A R N I
H I
S T O R Y ?
U N I
T
N O .
* * * * * *
P U M P
T Y P E
& & & & & & & &
O P E .
T I
M E
# # # # #
B A C K
P R E S S U R E
# # .
P U M P
N 2
# # .
W A T E R
F L O W
# # .
C A S I
N G
# # #
$ $ $ $ $ :
$ $ $ $ $ $ $
$ $ $ $ $ $ $ $ $ $ $ $ $ $
#
A
L O C A L
N G
h
#
k P a
F L O W
3
#
P a m
/
#
L /
m i
n
T E M P .
° C
EBARA
CORPORATION
s
%

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