Lcd Indication - EBARA ESA70W Instruction Manual

6.2 LCD Indication

The operating status of the pump is displayed on the LCD display of the controller.
For details of display, see Tables 6.1.
No ITEM
Current
1
Control mode
2
Pump running mode
Alarm history
3
(Indication of history)
Pump unit No.
4
Pump model
5
Voltage
Total operation time
6
Back pressure (option)
7
Pump N2 gas flow
8
Cooling water flow
9
Motor speed
10
WARNING/ALARM
11
Table 6.1 LCD controller indication
B
M
C
M
A
H
U
&
P
@ @ @ @ @ @
O
B
P
W A T E R
B
$
$
INDICATION
P : # # . # #
P : # # . # #
O N T R O L :
O D E : N O R M A L
L A R M / W A R N I
I S T O R Y ?
N I T N O .
& & & & & & &
U M P. T Y P E
P E . T I M E
# # # # #
A C K P R E S S U R E
# # . #
U M P N 2
# # . #
F L O W
# # . #
P S P E E D
# . # k
$ $ $ $ : $ $ $ $ $ $ $
$ $ $ $ $ $ $ $ $ $ $ $ $
(25)
A
A
L O C A L
N G
@ @ @ @
h
k P a
F L O W
3
P a m / s
L / m i n
m i n - 1
EBARA
Corporation
%