Ventilation Duct - EBARA ESA25-D Instruction Manual

4.2.4 Ventilation Duct

Proper ventilation is necessary not only to prevent the hazardous gases to leak
but also release heat generated and accumulated in the pump module through
the pump operation. Without proper ventilation, the temperature inside the cover
will continue to rise until an ALARM is generated. This will result in serious
problems.
Connect the ventilation duct, locating on the top of the pump, to a duct that the
user provides. The user side duct shall have exhaust capability listed in Table
3.1 and shall be independent from the duct connected to the pump exhaust
outlet.
A substance, which is not corroded with used gas, shall be used as the material
of the exhaust duct.
The pump does not have gas leak detector. So it is recommended to attach gas
leak detector on detector port of duct piping to take exhaust flow interlock. Leak
detector shall be NRTL approved or equivalent.
In case of find gas leakage, stop the gas introduced into the equipment and
pump. It is strongly recommended to wire the control circuit such that the pump
immediately stops its operation upon leak detection by connecting the leak
detector output to the EMO external signal input of the pump. Refer to Section
4.3.4 in this manual for connecting the leak detector output.
CAUTION For safety, be sure to ventilate through the ventilation duct
CAUTION Even when the pump is used for exhausting process gases
CAUTION Never operate the pump without pump cover for safety.
PM10U
when the pump is used to exhaust toxic, inflammable, and/or
other hazardous gases. Do not combine the ventilation duct
with the pump exhaust piping.
that are not toxic and/or inflammable, do not combine the
ventilation duct with the pump exhaust piping. The exhaust
noise of the pump will give rise to acoustic resonance inside the
pump unit and result in an abnormal noise being generated.
P.19
EBARA
CORPORATION