Ventilation Duct（Model Ev-S***N / Model Ev-S***P - EBARA EV-S20 Instruction Manual

CAUTION For safety, be sure to use N
4.2.4 Ventilation Duct（MODEL EV-S***N / MODEL EV-S***P）
To exhaust hot air, suck off the air inside the cover from the ventilating duct port.
Without proper ventilation, the temperature inside the cover will continue to rise
until an ALARM is generated. This will result in serious problems.
The pump does not provide gas leak detector. So it is recommended that gas leak
detector should be installed in duct piping to take exhaust flow interlock.
A substance which does not corrode with used gas shall be used as the material
of the exhaust duct.
In case of detecting gas leakage, stop the gas flow into the equipment
CAUTION For safety, be sure to ventilate through the ventilation duct
CAUTION Even when the pump is used for exhausting process gases
CAUTION Never operate the pump without pump cover for safety.
PM10U
Front Back
Body
Ferrule Ferrule
Fig. 4.2 Tube Fitting Assembly
Impurities of N gas may cause an accident when the pump is used for
2
exhausting toxic and/or inflamable gases.
when the pump is used to exhaust toxic and/or inflammable
gases. Do not combine the ventilation duct with the pump
exhaust piping .
that are not toxic and/or inflammable, do not combine the
ventilation duct with the pump exhaust piping. The exhaust
noise of the pump will give rise to acoustic resonance inside the
pump unit and result in an abnormal noise being generated.
1 + 1/4
Nut
Rotation
gas which purity is more than 99.999%.
2
P.44
EBARA
CORPORATION