Table Of Contents; Contents - EBARA EV-PA 250 Instruction Manual

14
P.

(6) Contents

PM10U
Environmental Basic Policies ......................................................................................... 3
Foreword .................................................................................................................................. 4
(1) Limited Warranty .......................................................................................................... 5
(2) Repair and Servicing ................................................................................................... 5
(3) Safty Notice ................................................................................................................... 6
(4) Safty Warning Labels ............................................................................................... 10
(5) Environmental Concerns ........................................................................................ 13
(6) Contents ....................................................................................................................... 14
1. Acceptance Check ...................................................................................................... 16
2. Product Description .................................................................................................... 17
2.1 Outline ........................................................................................................................... 17
2.1.1 Pump Module .................................................................................................... 17
2.1.2 Cooling Fan........................................................................................................ 17
2.1.3 Exhaust ............................................................................................................... 17
2.1.4 Gas ballast ......................................................................................................... 17
2.2 Control System .......................................................................................................... 17
2.2.1 Warning and Alarm .......................................................................................... 17
2.3 Detailed Specifications ........................................................................................ 18
2.3.1 Specifications ................................................................................................... 18
2.3.2 Outline Drawing ............................................................................................... 20
2.3.3 Performance Curve ........................................................................................ 22
2.3.4 System Flow ..................................................................................................... 23
3. Installation ....................................................................................................................... 24
3.1 Location ........................................................................................................................ 24
3.2 Piping ............................................................................................................................. 26
3.2.1 Vacuum and Exhaust Piping ....................................................................... 26
3.2.2 Gas ballast Piping ........................................................................................... 26
3.3 Electrical Wiring ......................................................................................................... 27
3.3.1 Power Supply Wiring ...................................................................................... 27
3.3.2 Control Signal Wiring ..................................................................................... 29
4. Control Panel ................................................................................................................. 31
4.1 Control panel Outline .............................................................................................. 31
4.2 LCD Indication ........................................................................................................... 32
5. Operation ......................................................................................................................... 36
5.1 Before Starting .......................................................................................................... 36
5.2 START/STOP ............................................................................................................ 37
5.3 Operation when momentarily power failure happens .................................. 37
EBARA
CORPORATION