Safety Information............................................................................................... 2
Contents ............................................................................................................. 9
1. Foreword....................................................................................................... 11
2. Introduction ................................................................................................... 11
2.1 Introduction............................................................................................. 11
3. Product Description....................................................................................... 13
3.1 Outline .................................................................................................... 13
3.1.1 Pump Module....................................................................................... 13
3.1.2 N2 Gas ............................................................................................ 13
3.1.3 Cooling Water.................................................................................. 14
3.1.4 Exhaust ........................................................................................... 14
3.2 Control System ....................................................................................... 14
3.2.1 Warning ........................................................................................... 14
3.3.1 Preparation...................................................................................... 15
3.3.2 Moving method ................................................................................ 16
4. Installation..................................................................................................... 22
4.1.1 Location........................................................................................... 22
4.2 Piping...................................................................................................... 24
4.2.3 N2 Gas Piping ................................................................................. 26
4.3 Electrical Wiring ...................................................................................... 28
4.3.1 Grounding........................................................................................ 28
Contents
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EBARA
CORPORATION