Table Of Contents; Contents - EBARA EV-SA20 Instruction Manual

Multi-stage dry vacuum pump
Table of Contents

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Environmental Basic Policies ................................................................................. 3
Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(2) Repair and Servicing ...................................................................................... 5
(3) Safety Notice ................................................................................................... 6
(4) Safety Warning Labels ................................................................................... 9
(5) Safety Interlocks ........................................................................................... 11
EC DECLARATION OF CONFORMITY ............................................................... 12
Contents ................................................................................................................ 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check ........................................................................................ 15
1.2 Environmental Concerns ............................................................................. 16
2. Product Description ........................................................................................ 17
2.1 Outline ............................................................................................................ 17
2.1.1
2.1.2
2.1.3
2.2 Control System ............................................................................................. 17
2.2.1
2.3 Movement ...................................................................................................... 18
2.3.1
2.3.2
2.4 Release and shut off residual internal energy .......................................... 19
2.4.1
2.4.2
2.5 Detailed Specification .................................................................................. 20
2.5.1
2.5.2
2.5.3
2.5.4
2.5.5
3. Installation ........................................................................................................ 25
3.1 Movement and Fixation................................................................................ 25
3.1.1
3.1.2
3.1.3
3.2 Piping ............................................................................................................. 28
PM10U
Pump Module ......................................................................................... 17
Cooling Fan ............................................................................................ 17
Exhaust ................................................................................................... 17
Alarm Control System ........................................................................... 17
Preparation ............................................................................................ 18
Moving Method ...................................................................................... 18
Electrical Power - Lockout and Tagout ............................................. 19
Returning to Service ............................................................................. 19
Model Description ................................................................................. 20
Specifications ........................................................................................ 21
Outline Drawing ..................................................................................... 22
Performance Curve ............................................................................... 23
System Flow .......................................................................................... 24
Location .................................................................................................. 25
Caster and adjustment foot ................................................................. 25
Pump Anchoring (Option) .................................................................... 26

Contents

P.13
EBARA
CORPORATION

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