Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(3) Safety Notice ................................................................................................... 6
(5) Safety Interlocks ........................................................................................... 11
Contents ................................................................................................................ 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check ........................................................................................ 15
2. Product Description ........................................................................................ 17
2.1 Outline ............................................................................................................ 17
2.1.1
2.1.2
2.1.3
2.2 Control System ............................................................................................. 17
2.2.1
2.3 Movement ...................................................................................................... 18
2.3.1
2.3.2
2.4.1
2.4.2
2.5.1
2.5.2
2.5.3
2.5.4
2.5.5
3. Installation ........................................................................................................ 25
3.1.1
3.1.2
3.1.3
3.2 Piping ............................................................................................................. 28
PM10U
Pump Module ......................................................................................... 17
Cooling Fan ............................................................................................ 17
Exhaust ................................................................................................... 17
Preparation ............................................................................................ 18
Moving Method ...................................................................................... 18
Returning to Service ............................................................................. 19
Model Description ................................................................................. 20
Specifications ........................................................................................ 21
Outline Drawing ..................................................................................... 22
Performance Curve ............................................................................... 23
System Flow .......................................................................................... 24
Location .................................................................................................. 25
Contents
P.13
EBARA
CORPORATION