Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(3) Safety Notice ................................................................................................... 6
(5) Safety Interlocks ........................................................................................... 11
Contents .................................................................................................................. 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check........................................................................................ 15
2. Product Description ........................................................................................ 17
2.1 Outline............................................................................................................ 17
2.1.1
2.1.2
2.1.3
2.2 Control System ............................................................................................. 17
2.2.1
2.3.1
2.3.2
2.4.1
2.4.2
2.5.1
2.5.2
2.5.3
2.5.4
2.5.5
3. Installation ........................................................................................................ 26
3.1.1
3.1.2
3.1.3
3.2 Piping ............................................................................................................. 30
PM10U
Pump Module......................................................................................... 17
Cooling Fan............................................................................................ 17
Exhaust................................................................................................... 17
Preparation ............................................................................................ 18
Moving Method...................................................................................... 18
Returning to Service ............................................................................. 19
Model Description ................................................................................. 20
Specifications ........................................................................................ 21
Outline Drawing..................................................................................... 22
Performance Curve ............................................................................... 24
System Flow .......................................................................................... 25
Location.................................................................................................. 26
Contents
P.13
EBARA
CORPORATION