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(62) Install the six ground wire terminals from the
NOTE
(63) Install the base side plate.
(64) Install the two air tubes as shown on the
(65) Connect the M/C cable.
N6 Rev.2
connector X11, X12 to the box-shaped plate.
Cross recessed binding head machine screws:
6-M4×8
Tightening torque: 0.9 ± 0.1 N·m
For cleanroom model, install the yellow air tube as shown in the following pictures.
Pass the air tube through the rear side of the board fixing plate, and then connect to
the fittings.
Be careful not to bend or collapse the air tubes
Pass through the rear side of
the board fixing plate
Hexagon socket head cap bolts: 4-M4×8
Tightening torque: 4.0 ± 0.2 N·m
As shown on the right, make sure that the
cable of Ether1 passes through the rear side
of the board fixing plate.
right, and connect them to fittings.
Air1: White
Air2: Blue
For details, refer to Maintenance 4.6. M/C Cable.
Maintenance 4. Cable
227
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