Disconnection And Transportation - EBARA ESA25-D Instruction Manual

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9. Disconnection and Transportation

WARNING When the pump has been used for exhausting highly toxic
CAUTION In the interest of safety during the transportation, disassembly
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal
for maintenance. Gain relevant information about the process gases from your
tool suppliers, and be sure that the gas concentrations in the work areas are at
quarter or under the acceptable values specified using appropriate measurement
equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards.
personnel protective equipment must include at least gloves, safety goggles, and
a gas mask.
To disconnect and transport the pump, proceed as follows.
(1) Stop the pump and replace all gases inside the pump by purging them with
N gas.
2
(2) Turn off the power supply to the pump and unplug the power and signal
cables.
(3) After you have fully closed the N
the N
2
(4) Remove the cooling water pipes.
(5) Remove the vacuum and exhaust pipes and completely seal off the inlet
and exhaust ports of the pump with a blind flange or similar seal. Seal off
all process gas discharge points such as the differential port by using a
blind flange.
(6) Attach the LCD controller on the front panel of the control board. Fix it
with the tape.
PM10U
gases such as arsenic and mercury compounds, be sure to
contact EBARA Corporation before you return the pump.
Refer to Appendix 4 or 5 for the format required when
customer returns their pump to Ebara service center for
overhaul or rebuild.
and cleaning of the pump, be sure to take note of the gases that
have been handled.
purge port with a sealing flange.
regulator, remove the N
2
The
pipe, seal off
2
EBARA
CORPORATION