Disconnection And Transportation - EBARA EV-SA20 Instruction Manual

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8. Disconnection and Transportation

When the pump has been used for exhausting highly toxic gases such as arsenic and
mercury compounds, be sure to contact EBARA Corporation before you return the
pump.
In the interest of safety during the transportation, disassembly and cleaning of the pump,
be sure to take note of the gases that have been handled.
Toxic gases may be generated from by-products in the piping or pump in pump disconnection from
the tool piping for repair and replacement or flange removal for maintenance. Gain relevant
information about the process gases from your tool suppliers, and be sure that the gas
concentrations in the work areas are at quarter or under the acceptable values specified using
appropriate measurement equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel protective equipment
if necessary to protect them from gas hazards. The personnel protective equipment must include at
least gloves, safety goggles, and a gas mask.
To disconnect and transport the pump, proceed as follows.
(1) Stop the pump and replace all gases inside the pump by purging them with dry clean air.
When the pump has been used for toxic or flammable gases, replace all gases inside the
pump by purging them with N
(2) Switch off the power supply to the pump and remove the power and signal wires.
(3) Remove the vacuum and exhaust pipes and completely seal off the suction and exhaust
ports of the pump with a blind flange or similar seal. Seal off all process gas discharge points
such as the differential port by using a blind flange.
(4) Wrap the pump in a vinyl sheet.
(5) Use the lifting eye bolts provided on the pump for slinging the pump to load and unload.
Fasten eye bolts completely and push in until flush with the seating surface. For sling, use a
wire with a length so that the slinging angle (that is, the angled subtended by the two wires) is
within 60 degrees. (see Fig. 8.1)
Do not enter the zone underneath the suspended ump.
PM10U
WARNING
CAUTION
DANGER
gas.
2
EBARA
CORPORATION