Start/Stop - EBARA EV-S20 Instruction Manual

6.2 START/STOP

The DIP switches can be set at any time to select the REMOTE/LOCAL/
COMMUNICATION modes and BUZZER Enabled function. Set in accordance
with the operating conditions. (See 5.3. Setting the operational mode.)
WARNING The pump and exhaust piping will remain at a high temperature
CAUTION When the production process leads to react by-products in the
CAUTION Process gases will remain in the vacuum pipes and the pump
CAUTION The pump will remain at a very high temperature event after it
[ NOTE ] Do not exhaust the process gases until at least 30 minutes after the
[ NOTE ] Do no suddenly make a pump inlet port the pressure that is higher
PM10U
during operation and for a short time after the pump has
stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
pump or when the process handles corrosive gases, be sure not
to stop the pump until after at least 30 minutes of stopping the
process gases.
even after the pump has been stopped.
Be sure therefore to purge for at least 1 hour after the pumps
has been stopped.
Do not discontinue the N
for a short time.
has been stopped. Be sure therefore to leave the cooling water
on for about 1 hour after the pump has been stopped.
pump has been started. The pump casing temperature will stabilize
after about 2 hours and it is recommended not to start exhausting the
process gases earlier than this.
than atmospheric pressure.
purge when the pump is stopped only
2
P.75
EBARA
CORPORATION