Start/Stop - EBARA ESA300W Instruction Manual

7.2 START/STOP

The DIP switches can be set at any time to select the REMOTE/LOCAL modes
and BUZZER Enabled function. Set in accordance with the operating conditions.
(See 5. Operation Mode.)
The pump will remain at a very high temperature even after it has been stopped.
WARNING
Be sure therefore to leave the cooling water on for about one (1) hour after the
pump has been stopped.
When the cooling water is stopped at once after the pump stops, pressure in the
cooling water piping rises. And there is a possibility to cause the water leak.
The pump and exhaust piping will remain at a high temperature during operation
WARNING
and for a short time after the pump has stopped.
Be sure to avoid contact and keep inflammable substances out of reach.
Do not remove the outer cover during operation.
When the production process leads to react by-products in the pump or when the
CAUTION
process handles corrosive gases, be sure not to stop the pump until after at least
30 minutes of stopping the process gases.
Process gases will remain in the vacuum pipes and the pump even after the
CAUTION
pump has been stopped.
Be sure therefore to purge for at least 1 hour after the pumps has been stopped.
Do not discontinue the N2 purge when the pump is stopped only for a short time.
[NOTE] It will take approx. 30 min. to reach the prescribed ultimate pressure when pump starts
under the state of cold start.
[NOTE] Do not exhaust the process gases until at least 1 hour after the pump has been started.
The pump casing temperature will stabilize after about 4 hours and it is recommended
not to start exhausting the process gases earlier than this.
[NOTE] Do not restart the pump until 30 seconds past , after the pump was stopped. The alarm
(OVERLOAD2, STEP OUT, DRIVER ALARM) may generate if the pump is restarted
during the times.
(52)
EBARA
CORPORATION