Operation; Start-Up - Edwards iXM Series Instruction Manual

Dry pump system
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6. Operation

6.1 Start-up

WARNING: HOT OBJECT
Risk of burn injury. Do not operate the system with the lifting eyebolts still installed
or with any enclosure panels removed or damaged. Do not touch any parts of the
pump(s) when the system is on. Surfaces of the pump(s) are very hot and can cause
injury to people. In accordance with SEMI S2, hot surface warning labels are applied
to the side panels of some dry pumping system models. Testing has shown that
accessible temperatures can exceed 65 °C in small areas in worst case pressure
conditions at an ambient temperature of 40 °C. Under normal process operating
conditions and an ambient temperature below 25 °C, accessible enclosure
temperatures are unlikely to reach this level.
WARNING: OPERATIONAL SAFETY
Risk of injury or damage to equipment. Make sure it is safe to start the system and
there is no maintenance activity on components downstream of the system.
WARNING: ELECTRICAL HAZARD
Risk of electric shock. After the power is applied, all mains circuits will be energised.
WARNING: ELECTRICAL HAZARD
Risk of electric shock. Do not operate the pump with the enclosures removed or
damaged.
WARNING: HOT SURFACES
Risk of burn injury. The exhaust of TX variant system will heat up to its maximum
temperature as soon as the electrical supply is switched on.
WARNING: AUTOMATIC RESTART
Risk of injury or damage to equipment. The system is designed to ride through
transient term power interruption and to automatically restart when the power is
restored.
CAUTION: BLOCKED PIPELINE
Damage to equipment. Do not operate the pump if the pipeline is restricted or
blocked as the pump will not operate correctly and can be damaged.
The system can be controlled by a number of modules:
M56635880_D
M56635880_D - Operation
Page 59
10/2020 - ©Edwards Limited

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