Edwards STP-XF803 Series Manuals

Manuals and User Guides for Edwards STP-XF803 Series. We have 3 Edwards STP-XF803 Series manuals available for free PDF download: Instruction Manual

Edwards STP-XF803 Series Instruction Manual

Edwards STP-XF803 Series Instruction Manual (63 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 1.55 MB

Table of Contents

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Prohibition of Gripping and Pulling Label
13
Water Cooling Pipe Connection Caution Label
14
Operation Principle of the STP Pump
15
Temperature Management System
16
Name of the STP Pump
17
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800
36
Scu-801
36
Scu-800/801
36
Scu-1600
37
Scu-1601
37
Scu-1600/1601
37
Cable Connection
38
STP Connection Cable
38
Power Cable
39
How to Connect the Cables
40
Operation
43
Before Starting the STP Pump
43
Tuning
43
Operation of Vacuum System
44
Pump Operation
44
LED Indication During Operation
44
Starting the STP Pump after a Safety Function Operates
45
Gas Pumping, Cooling and Baking the STP Pump
45
Gas Pumping
45
How to Introduce a Purge Gas
46
Cooling the STP Pump
46
Water-Cooling Method
46
Air-Cooling Method
47
Baking the STP Pump
47
How to Use the TMS Unit
48
Parameter Set Mode
48
Starting/Stopping the TMS Unit
48
Temperature Control
48
Safety Functions
49
Power Failure
49
Operation after a Power Recovery
49
Abnormal State of Magnetic Bearing
50
Excessive Vibration
50
Motor Driver Overload
50
Overheating Inside the STP Pump
50
Overheating Inside the STP Control Unit
51
Overspeed
51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)
51
Maintenance and Inspection
53
Cleaning
54
Inspecting the Deposit
54
Maintenance
55
Recommended Overhaul Intervals
55
Standard Replacement Parts
55
Recommended Maintenance Intervals for Main Parts
56
Transporting for Repair or Overhaul
57
Storage and Disposal
59
Storage of the STP Pump
59
Disposal
60
Service, Spares and Accessories
61
Introduction
61
Service
61
Spares
61
Accessories
62

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Edwards STP-XF803 Series Instruction Manual

Edwards STP-XF803 Series Instruction Manual (45 pages)

Turbomolecular pump

Brand: Edwards | Category: Water Pump | Size: 0.85 MB

Table of Contents

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
8
Safety Instruction Label
10
Use Designated Cable" Caution Label
10
Connection Caution Label
10
Labels
10
High Voltage Device Caution Label
11
Use Designated Control Unit" Caution Label
11
Applicable Pump Model Label
11
Label Affixing Positions
12
Stc-U
13
General Description
13
System Configuration
14
Cable Sets
14
Dimensions (MM)
15
Technical Data
15
STC-U Specifications
15
STC-U Front Panel
19
- STC-U Front Panel Functions
  19
Installation
19
Unpacking
19
Front Panel
19
STC-U Rear Panel
20
- STC-U Rear Panel Connection
  20
Rear Panel
20
Precautions before Installation
21
Operating Environment
21
Insulation Test
21
Installation of STC-U
22
Installation Area
22
Example of Securing the STC-U
23
Attaching the STC-U to a Rack
23
Cable Connection
24
TMS Heater Cable
25
TMS Sensor Cable
25
TMS Valve Cable
26
STC-U Remote Cable
26
Power Cable (Without Plug)
27
Power Cable
27
Power Cable (with Plug)
28
- Power Cable
  28
Connecting Method of the Power Cable Without Plug
29
Power Extension Cable (for STP Control Unit)
30
Power Extension Cable
30
Example of Cable Installation in Metallic Duct
31
Cable Installation
31
Connecting to Semiconductor Equipment
32
Connecting to Power
32
Emergency off Circuit (EMO Circuit)
32
- Communication Parameters
  33
- Table 4
  33
Operation
33
Before Starting
33
Confirmation before Starting
33
Confirmation of Communication Parameters of STP Control Unit
33
Power on
34
Power off
34
Abnormality/Error in the STC-U
35
- "POWER" LED and Error Messages
  35
Troubleshooting Immediately after Power Failure Occurs
36
- Error Messages Related to STC-U
  37
- Error Messages Related to STC-U (Continued)
  38
Maintenabce and Inspection
39
Inspection of Connection Cable
39
Cleaning
39
Maintenance
39
Storage, Transportation and Disposal
41
Storage of the STC-U
41
Transporting for Repair or Overhaul
41
Disposal
42
Service, Spares and Accessories
43
Introduction
43
Service
43
Spares
43
Accessories
44

Edwards STP-XF803 Series Instruction Manual

Edwards STP-XF803 Series Instruction Manual (37 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1.04 MB

Table of Contents

Table of Contents
7
Section Title

9
- Applicable Pump Specifications
  9
- STP Pump Specifications
  9
- Technical Data
  9
- Stp-Xf803Bv135
  10
- Stp-Xf803Bv135/Xf1303Bv135
  10
Applicable Control Unit

11
- Scu-800/801
  11
- Stp-Xf803Bv155 [A]/Xf1303Bv155 [A]
  12
- Stp-Xf803Bv155 [A]
  12
- Scu-800/801
  13
- Stp-Xf803Bv155 [B]/Xf1303Bv155 [B]
  14
- Stp-Xf813Y1Bv155/Xf1313Y1Bv155
  16
- Stp-Xf813Y1Bv155
  16
- Stp-Xf813Y2Cv155/Xf1313Y2Cv155
  18
- Stp-Xf813Y2Cv155
  18
- Condition for the Water-Cooling Unit
  20
Specification

20
- Safety Function of Blade Temperature Sensor
  21
STP Pump Specifications

21
TMS Heater

23
Table Title

27
- How to Secure the Stp Pump
  27
- Tightening Torque of Bolt
  27
- Destructive Torque and Recommended Securing Bolt for Inlet Port Flange
  28
- Stp-Xf1303Bv135
  28
- Temperature Management System (Tms)
  31
- Configuration of the STP Pump with the TMS
  31
- Configuration of the TMS
  31
- TMS Heater
  32
- TMS Valve
  32
- Outlet Port Heater
  32
- Installation of the TMS Unit
  32
- Connecting Cables to the TMS Unit
  32
- Connecting the Pump and TMS Valve
  33
- Specification of TMS Unit
  34
- Condition for the TMS Unit
  35
- Accessories
  36

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