Edwards STP-XF813 Series Manuals

Manuals and User Guides for Edwards STP-XF813 Series. We have 3 Edwards STP-XF813 Series manuals available for free PDF download: Instruction Manual

Edwards STP-XF813 Series Instruction Manual (63 pages)

Brand: Edwards | Category: Water Pump | Size: 1.57 MB

Table of Contents
3
Title Page

4
1 Introduction

7
- Scope and Definitions
  7
- Electromagnetic Compatibility
  8
- Limited Warranty
  8
- Item Warranted
  8
- Disclaimer
  9
- Spare Parts
  9
- Precautions for Safe Operation of the STP Pump
  10
- Usable Gases
  10
- Maintenance and Inspection Precautions
  11
- Labels
  11
- Operation Principle of the STP Pump
  15
  - Cross Sectional View of the STP Pump
    15
- Temperature Management System
  16
- Name of the STP Pump
  17
  - Configuration of the STP Pump (Typical Pump Model)
    17
2 Installation of the Stp Pump

19
3 Installation of the Stp Control Unit

35
- STP Control Unit
  35
- SCU-350 Series
  35
- Scu-800/801
  36
  - Scu-800
    36
  - Scu-801
    36
- Scu-1600/1601
  37
  - Scu-1600
    37
  - Scu-1601
    37
- Cable Connection
  38
- STP Connection Cable
  38
- Power Cable
  39
- How to Connect the Cables
  40
  - Storage and Disposal
    59
  - Storage of the STP Pump
    59
  - Disposal
    60
  - Service, Spares and Accessories
    61
  - Introduction
    61
  - Service
    61
  - Spares
    61
  - Accessories
    62

Edwards STP-XF813 Series Instruction Manual (45 pages)

Turbomolecular pump

Brand: Edwards | Category: Water Pump | Size: 1.39 MB

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
8
Safety Instruction Label
9
Use Designated Cable" Caution Label
9
Labels
9
Connection Caution Label
10
High Voltage Device Caution Label
10
Use Designated Control Unit" Caution Label
10
Applicable Pump Model Label
10
Label Affixing Positions
11
Stc-U
12
General Description
12
System Configuration
13
Cable Sets
13
Dimensions (MM)
15
Technical Data
15
STC-U Specifications
15
STC-U Front Panel
19
Installation
19
Unpacking
19
Front Panel
19
STC-U Front Panel Functions
19
STC-U Rear Panel
20
Rear Panel
20
STC-U Rear Panel Connection
20
Precautions before Installation
21
Operating Environment
21
Insulation Test
21
Installation of STC-U
22
Installation Area
22
Example of Securing the STC-U
23
Attaching the STC-U to a Rack
23
Cable Connection
24
TMS Heater Cable
25
TMS Sensor Cable
25
TMS Valve Cable
26
STC-U Remote Cable
26
Power Cable (Without Plug)
27
Power Cable
27
Power Cable (with Plug)
28
Power Cable
28
Connecting Method of the Power Cable Without Plug
29
Power Extension Cable (for STP Control Unit)
30
Power Extension Cable
30
Example of Cable Installation in Metallic Duct
31
Cable Installation
31
Connecting to Semiconductor Equipment
32
Connecting to Power
32
Emergency off Circuit (EMO Circuit)
32
Communication Parameters
33
Operation
33
Before Starting
33
Confirmation before Starting
33
Confirmation of Communication Parameters
33
Power on
34
Power off
34
"POWER" LED and Error Messages
35
Abnormality/Error in the STC-U
35
Troubleshooting Immediately after Power Failure Occurs
36
Error Messages Related to STC-U
37
Error Messages Related to STC-U (Continued)
38
Maintenabce and Inspection
39
Inspection of Connection Cable
39
Cleaning
39
Maintenance
39
Storage, Transportation and Disposal
41
Storage of the STC-U
41
Transporting for Repair or Overhaul
41
Disposal
42
Service, Spares and Accessories
43
Introduction
43
Service
43
Spares
43
Accessories
44

Edwards STP-XF813 Series Instruction Manual (37 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1.04 MB

Table of Contents
7
Section Title

9
- Applicable Pump Specifications
  9
- STP Pump Specifications
  9
- Technical Data
  9
- Stp-Xf803Bv135
  10
- Stp-Xf803Bv135/Xf1303Bv135
  10
Applicable Control Unit

11
- Scu-800/801
  11
- Stp-Xf803Bv155 [A]/Xf1303Bv155 [A]
  12
- Stp-Xf803Bv155 [A]
  12
- Scu-800/801
  13
- Stp-Xf803Bv155 [B]/Xf1303Bv155 [B]
  14
- Stp-Xf813Y1Bv155/Xf1313Y1Bv155
  16
- Stp-Xf813Y1Bv155
  16
- Stp-Xf813Y2Cv155/Xf1313Y2Cv155
  18
- Stp-Xf813Y2Cv155
  18
- Condition for the Water-Cooling Unit
  20
Specification

20
- Safety Function of Blade Temperature Sensor
  21
STP Pump Specifications

21
TMS Heater

23
Table Title

27
- How to Secure the Stp Pump
  27
- Tightening Torque of Bolt
  27
- Destructive Torque and Recommended Securing Bolt for Inlet Port Flange
  28
- Stp-Xf1303Bv135
  28
- Temperature Management System (Tms)
  31
- Configuration of the STP Pump with the TMS
  31
- Configuration of the TMS
  31
- TMS Heater
  32
- TMS Valve
  32
- Outlet Port Heater
  32
- Installation of the TMS Unit
  32
- Connecting Cables to the TMS Unit
  32
- Connecting the Pump and TMS Valve
  33
- Specification of TMS Unit
  34
- Condition for the TMS Unit
  35
- Accessories
  36

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More Edwards Manuals

Edwards STP-XF813 Series Manuals

Edwards STP-XF813 Series Instruction Manual (63 pages)

Table of Contents

Title Page

1 Introduction

2 Installation of the Stp Pump

3 Installation of the Stp Control Unit

Edwards STP-XF813 Series Instruction Manual (45 pages)

Table of Contents

Edwards STP-XF813 Series Instruction Manual (37 pages)

Table of Contents

Section Title

Applicable Control Unit

Specification

STP Pump Specifications

Figure Title

TMS Heater

Table Title

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