Accessories; Disconnect Box; Accessory Modules; Pump Display Terminal (Pdt) - Edwards iXM Series Instruction Manual

13. Accessories

The accessories available for use with the iXM dry pump system are:

13.1 Disconnect box

The disconnect box ensures full compliance with SEMI S2 by providing true EMO
functionality and also provides interlock with photohelic switch.
Table 39 Disconnect box
Item
Photohelic switch and gauge kit
Power disconnect box Low iXM200
Power disconnect box Low iXM600 / 1200
Power disconnect box High iXM200
Power disconnect box High iXM600 / 1200
Power disconnect box Low iXM3000
Power disconnect box High iXM3000

13.2 Accessory modules

Two accessory modules are available for the iXM dry pump system. The Active Accessory
Module (AAM) gives connectivity for up to three directly connected accessories
including a gate valve, abatement and water flow sensor. It also gives connectivity for up
to two supported active accessories, two thermocouples and the pump status output.
The Passive Accessory Module (PAM) allows up to 3 accessories to be connected to the
accessory module interface.
An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m
away from the dry pump system.
Table 40 Accessories modules
Accessory module
AAM
PAM
Accessory module extension cable (5.0 m)

13.3 Pump Display Terminal (PDT)

The PDT allows control and monitoring of the pump.
Table 41 PDT
Item
PDT
M56635880_D
M56635880_D - Accessories
Page 93
Item number
A50803000
EL0103003
EL0103004
EL0103005
EL0103006
A50802000
Contact supplier
Item number
D37480500
D37480550
D37491502
Item number
D37280700
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