Connect To The Emergency Stop Circuit; Connect The Cooling Water Supply - Edwards iXM Series Instruction Manual

4.6.8 Connect to the emergency stop circuit

The EMS (controlled stop) button on the front panel of the system is used to stop the
pump in an emergency.
Note:
The EMS button
isolate the electrical supply to the system and does not give an EMO (Emergency Off)
function.
Note:
All references in this manual to the EMS button and/or to the EMS abbreviation, do not
describe a rated controlled stop circuit. The EMS button is used as a controlled stop
button in all our products. The same reason applies to the EMS link plug.
The system has an external emergency stop circuit that can be connected into the
control equipment.Refer to
Table: Electrical
compliant with IEC 60947-5-5, a red self-latching push button on a yellow background.
If you operate the pumping system without connection to the control equipment, install
the external EMS link plug (supplied) to the EMS connection on the rear of the pumping
system
installed the system will not operate.
Emergency off (EMO) functionality
If EMO functionality is necessary (for example, for the requirements of SEMI S2), install
the pumping system in combination with an our disconnect box.
The disconnect box is available as an accessory. Refer to
the disconnect box manual for installation instructions and information about how the
pumping system can be shut down in an emergency. The photohelic switch/gauge
(available as an accessory) monitors the loss of extraction from the enclosure, which
agrees with SEMI S2 requirements.
For pumps that are installed into an integrated system and receive their power from that
system, an emergency off can be achieved by the connection of the controlled stop
circuit on the pump into the integrated system's emergency off circuit.
Refer to
controlled stop.

4.6.9 Connect the cooling water supply

WARNING: ELECTRICAL HAZARD
Risk of injury and damage to the equipment. Do not turn on the cooling water supply
until the electrical installation of the pump is complete. Failure to do so can cause
condensation in the enclosure and a risk of electric shock.
M56635880_D
M56635880_D - Installation
(Figure: Front panel
Figure: Controls/connectors on the rear of the system
connections. In this case, the controlled stop control should be
(Figure: Controls/connectors on the rear of the
Controlled stop on page 63 for more information about pump behaviour after a
controls, item 1) when used on its own does not
system). If the EMS link plug is not
Page 45
Accessories on page 93. Refer to
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and