General Description; Overview; Figure 1 Front View Of System - Edwards iXM Series Instruction Manual

2. General description

2.1 Overview

The iXM series of dry pumps are low energy systems. The range sets new standards for
medium duty process, capability and reliability, with pumps designed to give low cost of
ownership. The variants are designed for Etch and Plasma-Enhanced Chemical Vapor
Deposition (PECVD) processes. The pumps are available in four capacity classes:
▪ 200 m
▪ 600 m
▪ 1200 m
▪ 3000 m
The pumps are compatible for 200 ‑ 230 V or 380 ‑ 460 V supply.

Figure 1 Front view of system

1. Front panel control 1. Front panel control
3. Castors (4 off) 3. Castors (4 off)
5. Extraction port 5. Extraction port
7. Pumped gas inlet connection 7. Pumped gas inlet connection
M56635880_D
M56635880_D - General description
3
/hr
3
/hr
3
/hr
3
/hr
Page 10
2. Levelling feet (4 off) 2. Levelling feet (4 off)
4. Seismic bracket (4 off if installed) 4. Seismic bracket (4 off if installed)
6. RF Earth (ground) cable 6. RF Earth (ground) cable
8. Lifting eyebolt 8. Lifting eyebolt
10/2020 - ©Edwards Limited