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STP-XA2703BV155
Edwards STP-XA2703BV155 Manuals
Manuals and User Guides for Edwards STP-XA2703BV155. We have
3
Edwards STP-XA2703BV155 manuals available for free PDF download: Instruction Manual
Edwards STP-XA2703BV155 Instruction Manual (63 pages)
Turbomolecular pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.54 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Prohibition of Gripping and Pulling Label
13
Water Cooling Line Notice Label
14
Operation Principle of the STP Pump
15
Temperature Management System
16
Name of the STP Pump
17
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36
Scu-800
36
Scu-801
36
Scu-1600/1601
37
Scu-1600
37
Scu-1601
37
Cable Connection
38
STP Connection Cable
38
Power Cable
39
How to Connect the Cables
40
Operation
43
Before Starting the STP Pump
43
Tuning
43
Operation of Vacuum System
44
Pump Operation
44
LED Indication During Operation
44
Starting the STP Pump after a Safety Function Operates
45
Gas Pumping, Cooling and Baking the STP Pump
45
Gas Pumping
45
How to Introduce a Purge Gas
46
Cooling the STP Pump
46
Water-Cooling Method
46
Air-Cooling Method
47
Baking the STP Pump
47
How to Use the TMS Unit
48
Parameter Set Mode
48
Starting/Stopping the TMS Unit
48
Temperature Control
48
Safety Functions
49
Power Failure
49
Operation after a Power Recovery
49
Abnormal State of Magnetic Bearing
50
Excessive Vibration
50
Motor Driver Overload
50
Overheating Inside the STP Pump
50
Overheating Inside the STP Control Unit
51
Overspeed
51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)
51
Maintenance and Inspection
53
Cleaning
54
Inspecting the Deposit
54
Maintenance
55
Recommended Overhaul Intervals
55
Standard Replacement Parts
55
Recommended Maintenance Intervals for Main Parts
56
Transporting for Repair or Overhaul
57
Storage and Disposal
59
Storage of the STP Pump
59
Disposal
60
Service, Spares and Accessories
61
Introduction
61
Service
61
Spares
61
Accessories
62
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Edwards STP-XA2703BV155 Instruction Manual (47 pages)
STC-U eTMS unit for Turbomolecular Pump
Brand:
Edwards
| Category:
Water Pump
| Size: 0.79 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
8
Labels
9
Safety Instruction Label
9
Use Designated Cable" Caution Label
9
Connection Caution Label
10
High Voltage Device Caution Label
10
Use Designated Control Unit" Caution Label
10
Applicable Pump Model Label
10
Label Affixing Positions
11
General Description
12
Stc-U
12
Cable Set
13
System Configuration
13
Technical Data
15
STC-U Specifications
15
Dimensions (MM)
15
Installation
19
Unpacking
19
Front Panel
19
STC-U Front Panel
19
STC-U Front Panel Functions
19
Rear Panel
20
STC-U Rear Panel
20
STC-U Rear Panel Connection
20
Precautions before Installation
21
Operating Environment
21
Installation Test
21
Installation Area
22
Installation of STC-U
22
Attaching the STC-U to a Rack
23
Example of Securing the STC-U
23
Cable Connection
24
TMS Heater Cable
25
TMS Sensor Cable
25
Sensor Cable
25
TMS Valve Extension Cable
26
TMS Valve Cable
26
STC-U Remote Branch Cable
27
STC-U Remote Branch Cable (for STP Control Unit)
27
Power Cable
28
Power Cable (Without Plug)
28
Power Cable (with Plug)
29
Power Cable
29
Connecting Method of the Power Cable Without Plug
30
Power Extension Cable
31
Power Extension Cable (for STP Control Unit)
31
Cable Installation
32
Example of Cable Installation in Metallic Duct
32
Connecting to Semiconductor Equipment
33
Connecting to Power
33
Emergency off Circuit (EMO Circuit)
33
Operation
35
Before Starting
35
Confirmation before Starting
35
Confirmation of Communication Parameters of STP Control Unit
35
Table 4
35
Communication Parameters
35
Power on
36
Power off
36
Abnormality/Error in the STC-U
37
"POWER" LED and Error Messages
37
Troubleshooting Immediately after Power Failure Occurs
38
Error Messages Related to STC-U
39
Error Messages Related to STC-U (Continued)
40
Maintenabce and Inspection
41
Inspection of Connection Cable
41
Cleaning
41
Maintenance
41
Storage, Transportation and Disposal
43
Storage of the STC-U
43
Transporting for Repair or Overhaul
43
Disposal
44
Service, Spares and Accessories
45
Introduction
45
Service
45
Spares
45
Accessories
46
Edwards STP-XA2703BV155 Instruction Manual (27 pages)
Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 0.91 MB
Table of Contents
Table of Contents
7
Technical Data
9
Applicable Pump Specifications
9
STP Pump Specifications
10
Condition for the Water-Cooling Unit
11
External Appearance of the STP Pump
12
Stp-Xa2703Bv155: Vg250/Iso250F/Icf305 (Dn250Cf)
12
Stp-Xa3203Bv155: Vg300/Iso320F/Icf356 (Dn320Cf)
13
Label Affixing Positions
14
Label Affixing Positions for the STP Pump
14
Accessories
15
How to Secure the Stp Pump
17
How to Install the STP Pump
17
Connecting the Water Cooling Pipe
22
Temperature Management System (Tms)
23
Configuration of the STP Pump with the TMS
23
Configuration of the TMS
23
TMS Heater
24
TMS Valve
24
Installation of the TMS Unit
24
Connecting Cables to the TMS Unit
24
Connecting the Pump and TMS Valve
24
STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
24
Pag Page
24
Specification of TMS Unit
25
Condition for the TMS Unit
25
Accessories
26
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