Edwards iXL120N Instruction Manual

Dry pump system

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A541-11-880

Issue A Original

Instruction Manual

iXL120 Dry Pump System

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Summary of Contents for Edwards iXL120N

Page 1 A541-11-880 Issue A Original Instruction Manual iXL120 Dry Pump System...
Page 2 iXL Dry Pump Numbering A541 Speed 120 m Water Fittings Application None Clean 3/8 Quick Connect N2 purge (N) 1/4 Quick Connect Clean End User 9/16 JIC N2 purge (N) End User 1/4 NPT Male 90° Tool Interface Other Accessories None MicroTIM C3 None...
Page 3 - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
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Page 5: Table Of Contents
Draining the cooling water ....................31 General maintenance ....................32 Inspect the connections, pipelines, cables and fittings ............32 Transportation, storage and disposal ............33 Transportation ......................33 © Edwards Limited 2010. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 6 Centre of gravity and levelling foot loads ................6 Connect the electrical supply ..................21 Electrical connector locking mechanism ................21 Accessories ....................... 39 Page ii © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7 Display menu units ......................46 Warnings ......................... 47 Alarms ........................49 Hexadecimal to digital conversion ................... 50 Inverter alarm codes ....................50 Inverter warnings codes ....................51 © Edwards Limited 2010. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 8 Harting Electric GmbH ® EtherCon is a registered trademark of Neutrik® AG ® Fomblin is a registered trademark of Solvay Solexis SpA Page iv © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 9: Introduction
Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards iXL120(N) Pump. You must use your pump as specified in this manual otherwise the protection provided by the equipment may be impaired. Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING and CAUTION instructions;...
Page 10: Applications
Users must complete their own risk assessment and implement any necessary controls for pumping potentially flammable gases. Edwards can offer advice and assistance in matching your pump to your application. If you use the iXL120(N) system on an application for which it is not intended it may invalidate your warranty.
Page 11: The Ixl120 System
17. Pump inlet Electrical connector locking mechanism 17a. Pump inlet (NW50 connection) Accessory interface 17b. Pump inlet (ISO63 connection) 10. System control/PDT connection © Edwards Limited 2010. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12: Priority Of Control
‘in control’. The PDT accessory can identify which source is ‘in control’ and also has an LED to indicate if the PDT itself is ‘in control’. Page 4 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 13: Technical Data
Stainless steel, aluminium, PTFE and fluoroelastomer Degree of protection Enclosure protection IP31D (EN60529: Degrees of protection provided by provided by enclosure when installed enclosures) © Edwards Limited 2010. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 14: Loading
Table 3 - Levelling foot loads (refer to Figure 4) Levelling foot identifier Levelling foot load (kg) Figure 4 - Centre of gravity and levelling foot loads Page 6 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 15: Electrical Data
Contact Edwards for more information about configuration requirements for Earth leakage reduction. Table 5 - Electrical ratings: ultimate vacuum and extracted (700 torr) exhaust load condition Electrical sub-system: ultimate vacuum (0.01 mbar) load rating...
Page 16 7, does NOT include the power consumption of the pump’s internal auxiliary power-supply. This auxiliary power-supply is used to power the pump’s motor-controller, pump-controller and customer accessories. Page 8 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17: Electrical Connections And Cables
Pin 4 – Gate valve drive transistor (open collector) Gate valve position sense: Pin 7 – ‘Closed’; Pin 8 – ‘Open’ © Edwards Limited 2010. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 18 (380 – 460 V a.c., rms / 50 – 60 Hz) Conductor wire type Stranded wires ° Conductor insulation min temperature rating Page 10 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19: Cooling Water Data
The table specifies minimum water flow rate that is required at 30 °C cooling water. The water flow rate can be reduced if colder water is supplied. Contact Edwards for additional information. Maximum flow of 5 l min to prevent condensation at 10 °C cooling water.
Page 21: Installation
Edwards publication ‘Vacuum Pump and Vacuum System Safety’ (publication number P400-40-100). Only Edwards trained engineers may install the dry pumping system. Users can be trained by Edwards to  conduct the tasks described in this manual, contact your local service centre or Edwards for more information.
Page 22: Removing The Ixl120 System From The Packaging
3.4. 9. The iXL120 system is ready to be located; please refer Section 3.3 of the manual. Page 14 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23: Locate The Ixl120
If vibration transmission to the floor is a concern, suitable vibration isolators (not supplied) should be fitted  between the brackets and the bolt or stud. © Edwards Limited 2010. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25: Connect The Ixl120 System To Your Vacuum/Exhaust System And Interstage Connection (If Fitted)
Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent  loading of coupling-joints. We recommend that you use Edwards braided flexible pipelines for exhaust connection. Adequately support vacuum/exhaust pipelines to prevent the transmission of stress to pipeline ...
Page 26: Leak Test The Ixl120 System
You must obey the instructions and take note of any precautions given below to ensure that pumped gases do not enter their flammable ranges. The iXL120 and iXL120N are not suitable for use with potentially flammable or pyrophoric materials. ...
Page 27: Gas Purges
Gas purges WARNING The iXL120 and iXL120N pumps are not suitable for use with hazardous production materials. Any hazardous production materials must be diluted to a safe level before entering the pump. Gas purge is provided for the sole purpose of enabling the pumping of inert light gases such as helium.
Page 28 8. Align Housing (6) with hood (3), ensure gasket (4) is in position. 9. Secure Housing (6) to hood (3) using the four screws supplied (7). Page 20 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29: Electrical Connector Locking Mechanism
Figure 6 - Electrical connector locking mechanism 1a. Locking mechanism - Locked position 2. Locking screw 1b. Locking mechanism - Unlocked position 3. Lever © Edwards Limited 2010. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 30: Connect To Your Emergency Stop Circuit
(not supplied with the pump). Refer to Table 14 for a definition of the input signals to the pump system. Page 22 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 31: Inputs
1. Connect your supply and return hoses to the pump. 2. Turn on the cooling-water supply. 3. Energise the system to ensure water flows through the pump. © Edwards Limited 2010. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 32: Commission The Ixl120 System
If you want to continue to operate the iXL120 system, refer to Section 4.1, Step  Otherwise, shut-down the system: refer to Section 4.3.  Page 24 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 33: Operation
Press and hold the Start button (Figure 3, item 1) until pumps starts and the Running LED (Figure 3, item 1) is  illuminated. © Edwards Limited 2010. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 34: Status Indicators
Use your control equipment to reset the pump start/stop signal to the interface connector. The Running LED (Figure 3, item 1) will then go off, and the pump running status output signal will open. Page 26 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Automatic Shut-Down
(see Appendix A2) to assist with identifying the root cause of the shut down or alarm. If you are in any doubt, please call an Edwards Service Engineer. Table 15 - Pump protection sensors Sensor...
Page 36: Emergency Stop (Ems)
If a PDT is being used then record any alarm codes generated before restarting the pump (refer to Appendix A2). Restart the iXL120 system as described in Section 4.1. Page 28 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 37: Maintenance
260 °C. Refer to Edwards Material Safety Data Sheets for detailed information. Ensure that the maintenance technician is familiar with the safety procedures which relate to the process ...
Page 38: Relocate The System For Maintenance
Fluorinated materials in the iXL120 system may include oils, greases and seals. The iXL120 system may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request: contact your supplier or Edwards.
Page 39: Draining The Cooling Water
4. Disconnect the inlet and outlet from the vacuum and exhaust systems and fit blanking caps. 5. Adjust the levelling feet so that the iXL120 system rests on the castors. 6. Move the iXL120 system to a location where it can be safely stored until an Edwards service engineer can be in attendance.
Page 40: General Maintenance
The system is given a charge of oil before it leaves the factory. There is no requirement to adjust the oil level. You can conduct the following maintenance on the system when necessary or if you have a problem, contact Edwards...
Page 41: Transportation, Storage And Disposal
Perchlorate Material - special handling may apply, refer to www.dtsc.ca.gov/hazardouswaste/perchlorate/ Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including disposal. Refer to Section 7.2...
Page 43: Service, Spares And Accessories
Edwards products, spares and accessories are available from Edwards companies and distributors world-wide. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: 1.
Page 44: Ems Button
D37480500 D37480550 Accessory module extension cable (5 m) D37491502 The AAM and PAM cannot be mounted directly on the iXL120(N). Contact Edwards for details. 7.3.4 Pump Display Terminal (PDT) The PDT allows control and monitoring of the iXL120(N). Table 19 - PDT...
Page 45: Pdt Extension Cable
Main power connector A replacement 3-phase supply and PE connector. Table 26 - Main power connector Item Item number Main power connector D37491735 © Edwards Limited 2010. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 46: Ems Terminator Plug
Emergency stop D37370310 MCM EMS Module Emergency stop D37370320 LAM Alliance EMS Module Emergency stop D37370350 C3 EMS Module Emergency stop D37370360 Page 38 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 47: Accessories
5. PDT adaptor cable 2. EMS button 6. PDT extension cable 3. Accessory module Note: Some cables omitted for clarity 4. PDT © Edwards Limited 2010. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 49: Appendix A1 Pump Display Terminal (Pdt)
Red illuminates to indicate that a pump alarm is present. It flashes when a new alarm occurs until it is acknowledged by pressing ENTER when it goes continuous until the alarm clears. © Edwards Limited 2010. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 50: A1.1.2 Pump Start / Stop And Control
Once all warning/alarm conditions have gone away, then the corresponding LED is extinguished. To avoid a build up of out of date Warnings they are automatically acknowledged after 36 hours. Page 42 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 51: A1.1.4 Menus
Run Hours RUN HOURS 1000 Number of Pump Starts PUMP STARTS Time to Stop (seconds) TIME TO STOP Active Alarms and Warnings © Edwards Limited 2010. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 52 Under the Setup menu. Scroll through the software version loaded in the processors by pressing up/down keys. Press CANCEL to exit back to the SETUP menu. Page 44 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 53 Edit IP menu. Pressing CANCEL at the start of the line will cancel and exit back to the IP Configuration menu. Display only items press CANCEL to exit back to the IP Configuration menu. © Edwards Limited 2010. All rights reserved. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 54 In each option scroll through the units available by pressing up/down keys. Press ENTER to select the displayed units or CANCEL to exit back to the UNITS menu. Page 46 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 55: Appendix A2 Troubleshooting
Valve Not Shut supply to the Gate valve. Note: This warning will only clear when the valve has successfully been opened and closed. © Edwards Limited 2010. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 56: A2.2 Alarms
Table A14 lists the alarm messages that might be displayed on the PDT with possible causes and actions you should take. Page 48 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 57: A2.3 Inverter Warnings And Alarms
To decode inverter warning and alarm codes, refer to Table A15 to convert the hexadecimal digits into alert combinations and then refer to Table A16 and A17). © Edwards Limited 2010. All rights reserved. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 58 Check EMS button and EMS plug in the back of pump. DESAT_FAULT Internal fault contact Edwards UNDERT Inverter is too cold. See warning register to determine source of problem. Page 50 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 59 Internal power supply fault - contact Edwards LOWTC Low controller temperature - contact Edwards LOWTS Low heatsink temperature - contact Edwards CAN LOSS Reserved © Edwards Limited 2010. All rights reserved. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 60: A2.4 Other
Gate valve will close. The pump will stop immediately without any gas purges. Any requests to start the pump will be rejected until the fault has been rectified. Page 52 © Edwards Limited 2010. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

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