Connect The Nitrogen Supply - Edwards iXM Series Instruction Manual

4.6.5 Connect the nitrogen supply

WARNING: DANGEROUS SUBSTANCES
Risk of asphyxiation. A release of nitrogen can cause asphyxiation. The nitrogen
supply must enable isolation in accordance with SEMI S2 Lockout and tagout
requirements.
CAUTION: NITROGEN SUPPLY
Risk of damage to the equipment. Make sure that the nitrogen supply agrees with
requirements. If it does not, the gas pipelines can become blocked or the dry
pumping system can be damaged.
Refer to
nitrogen purge port. The gas module in the system can be adjusted to suit process
demands. Refer to
Refer to
Flammable/pyrophoric materials
WARNING: FLAMMABLE GASES
Risk of injury and damage to the equipment. Obey the instructions and make note of
precautions to make sure that the pumped gases do not enter their flammable
ranges.
When flammable or pyrophoric materials are in the pump there can be additional risks.
The user must assess and manage these risks as part of the process tool installation.
The severity of the risks and the necessary control measures will depend on if:
▪ the tool exhaust is in the flammable region
▪ this is part of normal process tool operation
▪ it can only occur in rare conditions.
The additional risks occur because all dry pumps must be considered a possible source
of ignition caused by the heat of compression, or friction. If ignition occurs:
▪ High pressures can occur in the pump and possibly not be contained.
▪ A flame front can travel back up the foreline.
▪ A flame front can travel downstream from the exhaust of the pump.
Industry best practice suggests that the following measures will decrease the risks of
pumping flammable mixtures and pyrophoric materials. The user must do a risk
assessment and take appropriate measures:
▪ Do not let air enter the equipment.
▪ Make sure that the system is leak tight.
▪ Prevent the entry of the pump gases in the flammable range. To achieve this,
supply sufficient inert gas purge to dilute the pump gases. For example, dilution
with nitrogen to below one quarter LEL (Lower Explosive Limit) or, if that is not
practical, to below 60% LOC (Limiting Oxidant Concentration).
M56635880_D
M56635880_D - Installation
Figure: Controls/connectors on the rear of the system
Gas module configuration
Table: Nitrogen purge data
on page 64.
for nitrogen supply requirements.
Page 35
for location of the
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