Edwards iXM Series Instruction Manual page 4

Dry pump system
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A
DDITIONAL
EU EMC D
: C
IRECTIVE
LASS
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.
EU R
HS D
: M
O
IRECTIVE
ATERIAL
This product is compliant with the following Annex III Exemptions:
6(a) Lead as an alloying element in steel for machining purposes and in galvanised steel containing up to 0.35 %
lead by weight
6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
6(c) Copper alloy containing up to 4% lead by weight
7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)
7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
7(c) II Lead in dielectric ceramic in capacitors for a rated voltage of 125 V AC or 250 V DC or higher
8(b) Cadmium and its compounds in electrical contacts
15 Lead in solders to complete a viable electrical connection between semiconductor die and carrier within
integrated circuit flip chip packages
34 Lead in cermet-based trimmer potentiometer elements
EU REACH R
C
EGULATION
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
A
33 D
:
RTICLE
ECLARATION
This product does contain Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
1,2-dimethoxyethane (EDGME)
This substance is sealed within the case of the compact lithium coin cell battery and is essential to the long life and
reliable performance of the battery.
Cadmium (Cd)
As indicated by the applied RoHS exemption above, this substance is present in electronic componentry
Lead (Pb)
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium/brass/steel/electrical
or electronic components
A
I
DDITIONAL
NFORMATION
The products listed are also in scope for and comply with the requirements of the following:
UL61010-1
3
Edition
rd
SEMI S2-0715a
SEMI S2-1016*
SEMI S8-0915
SEMI F47-0706
*iXM3000
This product has been manufactured under a quality management system certified to ISO 9001:2015
L
EGISLATION AND
A
EQUIPMENT
E
I
XEMPTION
NFORMATION
OMPLIANCE
added to the Candidate List in June 2012
added to the Candidate List June 2013
added to the Candidate List June 2018
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Environmental health and safety guideline for semiconductor manufacturing
equipment
Environmental health and safety guideline for semiconductor manufacturing
equipment
Safety Guidelines for ergonomics engineering of semiconductor Manufacturing
Equipment
Specification for semiconductor processing equipment voltage sag immunity
C
I
OMPLIANCE
NFORMATION

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