Tracer Gas Analysis - Edwards iXM Series Instruction Manual

3.9 Tracer gas analysis

Tracer gas fugitive emission testing has been carried out in accordance with the SEMI S6
Standard.
Table 13 Tracer gas test parameters
Test parameters
Tracer gas
Tracer gas concentration
Tracer gas release rate
Tracer gas release points
Process gas
Table 14 Tracer gas test system parameters
System parameters
Extraction flow rate:
From port on top of enclosure
From port on exhaust extraction kit
Volume of enclosure
Free air volume of enclosure
Air changes per minute
Hardware configuration:
▪ 100 mm duct connected to port on
top of enclosure
▪ Exhaust extraction cover kit
installed
Note:
The recommended extraction flow rate for iXM200, iXM600, iXM1200 is 180 m
Table 15 Worst case test results
Chemical
Process gas
name
Difluoromethane CH
Methane CH
Carbon Monox- CO
ide
Hydrogen H
2
Nitrous Oxide N
2
M56635880_D
M56635880_D - Technical data
Maximum
process TLV/LEL
gas flow (ppm)*
(slm)
F 0.2 1000
2 2
1 1000
4
0.5 25
40 4000
O 15 50
N O (Nitrous Oxide)
2
100%
5 slpm (standard litres per minute)
Exhaust flange on the iXM200/iXM600/iXM1200 pump
Nitrogen
Units
3
m /h
3
m
3
m
N O re-
2
25%
lease
TLV/LEL
rate
(ppm)
(slm)
250 5
250 5
6.25 5
1000 5
12.5 5
Page 23
iXM1200
iXM3000
iXM600
396.4 107.7
0.423 0.122
0.265 0.072
24.9 27.9
Yes Yes
Yes Yes
Maximum
N O de-
2
ERC
tected
(ppm)
outside
enclosure
(ppm)
3 0.12
3 0.60
3 0.30
3 24.00
3 9.00
10/2020 - ©Edwards Limited
iXM200
121.2
0.077
0.040
50.0
Yes
Yes
3
/h.
Pass/Fail†
Pass
Pass
Pass
Pass
Pass