Edwards iXM Series Instruction Manual
  1. Manuals
  2. Brands
  3. Edwards Manuals
  4. Water Pump
  5. iXM Series
  6. Instruction manual

Edwards iXM Series Instruction Manual

Dry pump system
Hide thumbs
Table of Contents

Advertisement

Quick Links

edwardsvacuum.com
Dry Pump System
iXM
INSTRUCTION MANUAL
M56635880_D
Original instructions

Advertisement

Table of Contents
loading

Related Manuals for Edwards iXM Series

Summary of Contents for Edwards iXM Series

  • Page 1 edwardsvacuum.com Dry Pump System INSTRUCTION MANUAL M56635880_D Original instructions...
  • Page 2 Semiconductor pumping application guide P41100090 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Han® is a registered trademark of Harting Electric GmbH. EtherCon® is a registered trademark of Neutrik® AG.
  • Page 3 CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW, UK The following product Low Volt Systems High Volt Systems (200-230 V) (380-460 V) iXM1200 Standard A56146958 A56146959 iXM1200 Customer special A A56346958 iXM600 Standard A56126958...
  • Page 4 DDITIONAL EGISLATION AND OMPLIANCE NFORMATION EU EMC D IRECTIVE LASS EQUIPMENT Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. EU R HS D IRECTIVE ATERIAL XEMPTION NFORMATION This product is compliant with the following Annex III Exemptions:...
  • Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 机壳 Enclosure 电机（泵和机械增压泵） Motors (pump and mechanical booster) 泵和增压泵...
  • Page 6 Numbering matrix Dry pump and booster combination 0 = XM200 SG pump only 1 = XM200 Xcede pump only 2 = XM200 SG/MB600 3 = XM200 Xcede/MB600 4 = XM200 SG/MB1200 5 = XM200 Xcede/MB1200 Voltage variant 8 = XM200 SG/MB3000 9 = XM200 Xcede/MB3000 8 = 200 - 230 V C = XM200 Xcede+/MB1200...

  • Page 7: Table Of Contents

    4.7 Install additional safety equipment....... . . 48 M56635880_D Page 4 10/2020 - ©Edwards Limited...
  • Page 8 9.4 Transportation..........88 M56635880_D Page 5 10/2020 - ©Edwards Limited...
  • Page 9 13.12 Water flow monitor assembly........97 M56635880_D Page 6 10/2020 - ©Edwards Limited...
  • Page 10 Figure 20: Front panel controls..........61 M56635880_D Page 7 10/2020 - ©Edwards Limited...

  • Page 11: Safety And Compliance

    Information about properties or instructions for an action which, if ignored, will cause damage to the pump or the system. We reserve the right to change the design and the stated data. The illustrations are not binding. Keep the instructions for future use. M56635880_D Page 8 10/2020 - ©Edwards Limited...

  • Page 12: Safety Symbols

    Warning - Pressurised The equipment contains pressurised gases/liquids. Warning - Risk of explosion There is a risk of explosion when you do the task. Warning - RF earth Earth point for radio equipment or antenna. M56635880_D Page 9 10/2020 - ©Edwards Limited...

  • Page 13: General Description

    2. General description 2.1 Overview The iXM series of dry pumps are low energy systems. The range sets new standards for medium duty process, capability and reliability, with pumps designed to give low cost of ownership. The variants are designed for Etch and Plasma-Enhanced Chemical Vapor Deposition (PECVD) processes.

  • Page 14: Applications

    The pump warranty will be invalid if the system is used on any other application. Contact your supplier if you are in doubt, for advice on the suitability of the system for any particular application. M56635880_D Page 11 10/2020 - ©Edwards Limited...

  • Page 15: Advanced Control And Monitoring

    The Green Mode functionality is controlled with a PDT accessory or the tool through a MicroTIM accessory. Refer to Accessories on page 93. Contact us for advice on application and activation of the available accessories. M56635880_D Page 12 10/2020 - ©Edwards Limited...

  • Page 16: Technical Data

    ▪ At 96 slpm purge mbar 0.01 0.05 flow Connections Pump inlet flange ISO200 ISO100 ISO100 ISO100 ISO100 ISO63 Exhaust gas outlet NW40 NW25 NW25 NW25 NW25 NW25 3.2 Operating and storage conditions M56635880_D Page 13 10/2020 - ©Edwards Limited...

  • Page 17: Manufacturing Materials

    Table 3 Materials in contact with pumped gases Material Where used Cast iron Steel Pump, shaft and rotors Coated cast iron (Xcede variant only) PTFE Seals and gas system Fluoroelastomer Stainless steel Gas system Aluminium M56635880_D Page 14 10/2020 - ©Edwards Limited...

  • Page 18: Loading Data

    M56635880_D - Technical data 3.4 Loading data Figure 4 Centre of gravity and levelling foot loads iXM200 M56635880_D Page 15 10/2020 - ©Edwards Limited...

  • Page 19: Figure 5 Centre Of Gravity And Levelling Foot Loads Ixm600 And Ixm1200

    M56635880_D - Technical data Figure 5 Centre of gravity and levelling foot loads iXM600 and iXM1200 M56635880_D Page 16 10/2020 - ©Edwards Limited...

  • Page 20: Figure 6 Centre Of Gravity And Levelling Foot Loads Ixm3000

    214.1 * See also Figure: Centre of gravity and levelling foot loads iXM200, Figure: Centre of gravity and levelling foot loads iXM600 and iXM1200 Figure: Centre of gravity and levelling foot loads iXM3000. M56635880_D Page 17 10/2020 - ©Edwards Limited...

  • Page 21: Nitrogen Purge Data

    3.6 Electrical data Table 7 Pump electrical data 1200 Characteristics Units 3000 1200T 600T 200T 1200TX Rated system input power at maximum load Dry pump motor rating Mechanical booster motor rating M56635880_D Page 18 10/2020 - ©Edwards Limited...
  • Page 22 T or class J fuses) Must be installed with cross-sectional area equal to phase conductor size, up to 16 Second protective earth (ground) conductor Typical earth leakage* ▪ for 200 - 230 V a.c. systems < 5 M56635880_D Page 19 10/2020 - ©Edwards Limited...
  • Page 23 5 V d.c. 100 mA nection allowed) EMS interface XLR type 6-way plug External controlled stop button Pin 1 supply, Pin 2 - return 24 V d.c. 100 mA Internal controlled stop button§ M56635880_D Page 20 10/2020 - ©Edwards Limited...

  • Page 24: Cooling Water Data

    Table 10 Wire assembly according to VDE 0295 Fine stranded wires VDE 0295 Wire size (Awg) UL style Wire size (mm class 5 84 x 0.30 1015 80 x 0.40 1015 128 x 0.40 1015 3.7 Cooling water data M56635880_D Page 21 10/2020 - ©Edwards Limited...

  • Page 25: Heater Data

    3.8 Heater data Table 12 TX variant heater data Description Units Rating Exhaust heater control temperature °C Exhaust heater power consumption iXM1200TX Typical booster heater control temperature °C Typical booster heater power consumption iXM1200TX M56635880_D Page 22 10/2020 - ©Edwards Limited...

  • Page 26: Tracer Gas Analysis

    (ppm)* (ppm) rate outside (ppm) (slm) (slm) enclosure (ppm) Difluoromethane CH 1000 0.12 Pass Methane 1000 0.60 Pass Carbon Monox- 6.25 0.30 Pass Hydrogen 4000 1000 24.00 Pass Nitrous Oxide 12.5 9.00 Pass M56635880_D Page 23 10/2020 - ©Edwards Limited...
  • Page 27 * Threshold Limit Value (TLV)/Lower Explosive Limit (LEL) in Parts Per Million (PPM) 25% TLV/LEL (ppm) † Where Pass indicates permitted enclosure (satisfies SEMI S2 criteria of less than 25% of the TLV) M56635880_D Page 24 10/2020 - ©Edwards Limited...

  • Page 28: Installation

    Disconnect the components in the process system from the electrical supply to prevent accidental operation. ▪ Electricity, nitrogen and water supplies are possible hazardous energy sources. Lockout and tagout supply sources before you start maintenance. M56635880_D Page 25 10/2020 - ©Edwards Limited...

  • Page 29: Unpack And Inspect

    Give the supplier and the carrier the information that follows: ▪ Item number of the pump ▪ Order number ▪ Supplier's invoice number Retain all packing materials for inspection. Do not use the pump if it is damaged. M56635880_D Page 26 10/2020 - ©Edwards Limited...

  • Page 30: Position The System

    Obey all local and national manual handling guidelines when you move the system. Give a firm, level platform, which is strong enough to support the weight of the pump and ancillary equipment. M56635880_D Page 27 10/2020 - ©Edwards Limited...
  • Page 31 Remove the lifting eyebolts and replace them with the lifting eyebolt hole plugs supplied with the system. Make sure that to the emergency stop button is accessible. Refer to Figure: Front panel controls. If not, use a disconnect box, refer to Accessories on page 93. M56635880_D Page 28 10/2020 - ©Edwards Limited...

  • Page 32: Install The System

    Refer to Accessories page 93 to select the correct seismic bracket kit for the system and for information about the systems which can be held with only two brackets. M56635880_D Page 29 10/2020 - ©Edwards Limited...

  • Page 33: Figure 7 Reduce The Effective System Footprint

    M56635880_D - Installation Figure 7 Reduce the effective system footprint M56635880_D Page 30 10/2020 - ©Edwards Limited...

  • Page 34: Lubrication

    CAUTION: CONDENSATE DRAINAGE Risk of damage to the equipment. Use a catchpot to prevent the drainage of condensate back into the system. Condensate that drains back into the system can damage the pump. M56635880_D Page 31 10/2020 - ©Edwards Limited...
  • Page 35 The check valve also provides additional reduction of the pulses in exhaust pressure. ▪ For dusty applications, use a low impedance inlet filter to limit the damage to the pump. M56635880_D Page 32 10/2020 - ©Edwards Limited...

  • Page 36: Connect The Pump Inlet

    Use half claw clamps when you connect an ISO style foreline flange to the dry pumping system inlet. Refer to Figure: Connect the pump inlet Table: Half claw clamps. Figure 9 Connect the pump inlet (iXM200 and iXM3000) M56635880_D Page 33 10/2020 - ©Edwards Limited...

  • Page 37: Connect The Pump Exhaust

    23 for the necessary extraction rates. Refer to Accessories on page 93 for the necessary exhaust extraction cover kit. Refer to Figure: Front view of the system for location of the extraction port. M56635880_D Page 34 10/2020 - ©Edwards Limited...

  • Page 38: Connect The Nitrogen Supply

    For example, dilution with nitrogen to below one quarter LEL (Lower Explosive Limit) or, if that is not practical, to below 60% LOC (Limiting Oxidant Concentration). M56635880_D Page 35 10/2020 - ©Edwards Limited...

  • Page 39: Connect To The Electrical Supply

    Breaker (ELCB) or Residual Current Device (RCD) (depending on territory) it must be applicable for protection of equipment with a d.c. component in the fault current, and applicable for short duration switch-on surges, and for high leakage current (for M56635880_D Page 36 10/2020 - ©Edwards Limited...
  • Page 40 Table: Wire assembly according to VDE 0295, i.e. from 6 mm to 10 mm ) to the protective earth (ground) stud, Figure: Controls/connectors on the rear of the system. M56635880_D Page 37 10/2020 - ©Edwards Limited...
  • Page 41 37 before you connect the system to the mains supply. Two types of electrical supply connector are used on the system. Refer to Electrical data on page 18 for details of the connector types the systems to which they are connected. M56635880_D Page 38 10/2020 - ©Edwards Limited...
  • Page 42 Attach a secondary protective earth (ground) conductor (with a cross-sectional area at least equal to phase conductor size) to the protective earth (ground) stud. Refer to Figure: Mains connector on pump bulkhead. M56635880_D Page 39 10/2020 - ©Edwards Limited...

  • Page 43: Figure 11 Mains Input Supply Connector

    9. Connector block 10. L2 10. L2 11. L1 11. L1 12. L3 12. L3 Torque settings for connector pins Maximum torque setting (Nm) Cable size (mm Figure 12 Method for connecting phase wires M56635880_D Page 40 10/2020 - ©Edwards Limited...

  • Page 44: Figure 13 Coding Pin Configuration

    Figure 13 Coding pin configuration Figure 14 Mains connector on pump bulkhead Pin identification Pin A1 Phase 1 Pin A2 Phase 2 Pin B1 Phase 3 Pin B2 Not connected Pin PE Protective earth M56635880_D Page 41 10/2020 - ©Edwards Limited...

  • Page 45: Figure 15: Mains Input Supply Connector - Han® K 4/4

    4. 2.5 mm hex (Allen) key Pin identification Pin 1 Phase 1 Pin 2 Phase 2 Pin 3 Phase 3 Pin 4 Not connected Protective earth Torque settings for connector pins Maximum torque setting (Nm) Cable size (mm M56635880_D Page 42 10/2020 - ©Edwards Limited...

  • Page 46: Figure 16 Protective Earth (Pe) Connection

    ▪ Tighten the locking screws to firmly hold the locking mechanism in place. ▪ Connect the other end of the electrical supply cable to the electrical supply through an isolator. M56635880_D Page 43 10/2020 - ©Edwards Limited...

  • Page 47: Connect An Additional Rf Earth (Ground) (Optional)

    Connect an additional earth (ground) cable to the RF earth (ground) stud (Figure: Controls/connectors on the rear of the system). An applicable low impedance cable must be used (for example, use braided cable). M56635880_D Page 44 10/2020 - ©Edwards Limited...

  • Page 48: Connect To The Emergency Stop Circuit

    Risk of injury and damage to the equipment. Do not turn on the cooling water supply until the electrical installation of the pump is complete. Failure to do so can cause condensation in the enclosure and a risk of electric shock. M56635880_D Page 45 10/2020 - ©Edwards Limited...
  • Page 49 Use the following procedure to connect the cooling water supply and make sure that the system is receiving the correct water flow rate. Before you start, make sure that the electrical power supply to the system is switched off: M56635880_D Page 46 10/2020 - ©Edwards Limited...

  • Page 50: Connect The Accessories

    Risk of burn injury. The surfaces of the dry pump, booster and spools are very hot when the system is running. Let these surfaces cool to safe temperatures before you install accessories in the system enclosure. M56635880_D Page 47 10/2020 - ©Edwards Limited...

  • Page 51: Install Additional Safety Equipment

    If an alarm condition occurs (and the system is not configured to ‘Run 'til crash’, refer to Alarm conditions on page 79) the system will shut down automatically. Make sure that the installation remains safe if the system shuts down automatically. M56635880_D Page 48 10/2020 - ©Edwards Limited...

  • Page 52: Commission

    If the pressure is decreasing continue at Step 9. After commissioning the system: ▪ To continue to operate the system, refer to Start-up on page 59. ▪ Otherwise, shut down the system, refer to Shut down on page 62. M56635880_D Page 49 10/2020 - ©Edwards Limited...

  • Page 53: Leak Test The System

    Alarm: Illuminates red to indicate that a pump alarm is present. It flashes when a new alarm occurs until it is acknowledged by pressing Enter. It then illuminates continuously until the alarm clears. M56635880_D Page 50 10/2020 - ©Edwards Limited...
  • Page 54 Otherwise the display will revert to the original text from before the warning(s) and alarm(s) occurred. If there are warnings and alarms still present, but all acknowledged, the corresponding LED remains continuously illuminated. The text indicating acknowledged warning and M56635880_D Page 51 10/2020 - ©Edwards Limited...
  • Page 55 1.1 A Booster current MB CURRENT 1.1 A Green Mode state GREEN MODE STATE Off Gate valve open or closed state GATE VALVE Open Remote gate valve open or close state PB VALVE Open M56635880_D Page 52 10/2020 - ©Edwards Limited...
  • Page 56 Press up/down keys to scroll. Press ENTER to open a sub menu or CANCEL to return to Normal menu. Table 22 Setup menu Description Display Command Menu... Commands menu Display Inverter Fault History menu Inv Fault Hist... M56635880_D Page 53 10/2020 - ©Edwards Limited...
  • Page 57 Gate Valve (Open/Shut) § MB Pump (On/Off) § PB Pump (On/Off) § Green Mode State (On/Off) Green Mode Level Gas Valves Force Control Set N Warnings USB... Reset MicroTIM Default reset Store detail log M56635880_D Page 54 10/2020 - ©Edwards Limited...
  • Page 58 Configurations: It shows all the details of configuration software updates since the last default reset on the pump. USB upgrade menu This is used to update the existing executive software on the pump. M56635880_D Page 55 10/2020 - ©Edwards Limited...
  • Page 59 Press CANCEL to return to the SETUP menu. Refer to Table: FIT ACCESSORY menu. For an accessory press the up/down keys to select Fitted or Not Fitted and press ENTER to accept or CANCEL to return to the COMMANDS menu M56635880_D Page 56 10/2020 - ©Edwards Limited...
  • Page 60 Edit IP menu. Press CANCEL at the start of the line to cancel and return to the IP Configuration. M56635880_D Page 57 10/2020 - ©Edwards Limited...
  • Page 61 PDT between pumps and keep the same settings. It also means that different units can be displayed on two PDTs connected to the same pump. Table 31 UNITS (Units to display) Pressure... (PSI/kPa/ mbar/Torr) Temperature... (Centigrade/Fahrenheit/ Kelvin) Speed... (RPM/Hz) Active Gauge... (mbar/Torr/kPA) M56635880_D Page 58 10/2020 - ©Edwards Limited...

  • Page 62: Operation

    Damage to equipment. Do not operate the pump if the pipeline is restricted or blocked as the pump will not operate correctly and can be damaged. The system can be controlled by a number of modules: M56635880_D Page 59 10/2020 - ©Edwards Limited...

  • Page 63: Start Up Through A Microtim

    CONTROL' is displayed if the front connection is used or the message 'PDT2 IN CONTROL' is displayed if the rear connection of the system is used. If something else is in control, error message 'Control locked' appears. Refer to 'Control Holder' in the Status menu. M56635880_D Page 60 10/2020 - ©Edwards Limited...

  • Page 64: Start Up Through The Front Panel Control

    59. If the system shut down automatically because of an alarm condition, the alarm condition must be corrected before you restart the system. Restart the system as described in Start-up on page 59 M56635880_D Page 61 10/2020 - ©Edwards Limited...

  • Page 65: Restart The Pump After A Controlled Stop Or Automatic Shut Down

    The EMS button will always stop the pump. It does not matter which item has control. Refer to Controlled stop on page 63 If the pump is not required for some time, switch off the electrical supply and the cooling water supply. M56635880_D Page 62 10/2020 - ©Edwards Limited...

  • Page 66: Shut Down Modes

    Connect to the emergency stop circuit on page 45. When controlled stop is selected: ▪ The dry pump and/or the booster pump is switched off. M56635880_D Page 63 10/2020 - ©Edwards Limited...

  • Page 67: Gas Module Configuration

    If the flow reading goes beneath a value where calculating 30% less than the current flow will be below 5 slm, then the PDT will display 'CANNOT SET LOW READING'. The countdown will then be cancelled and the setting aborted. M56635880_D Page 64 10/2020 - ©Edwards Limited...

  • Page 68: System Operating Temperature Configuration

    Default value (°C) set(°C) Dry pump (Standard variants) 60 - 110 iXM600, iXM1200 Dry pump (Standard variants) 60 - 110 iXM200, iXM3000 Dry pump 60 - 130 (T and TX variants) Booster (Only TX variants) M56635880_D Page 65 10/2020 - ©Edwards Limited...

  • Page 69: Maintenance

    We recommend you do a monthly visual inspection of the system. Check that the cables, hoses and pipelines connected to the pump are in good condition and make sure that all connections are secure. M56635880_D Page 66 10/2020 - ©Edwards Limited...

  • Page 70: Inspect The Connections, Pipelines, Cables And Fittings

    Repair or replace any pipelines, hoses and connections that are corroded, damaged or which leak. Install the enclosure side and top panels again. M56635880_D Page 67 10/2020 - ©Edwards Limited...

  • Page 71: Fault Finding

    Warning 54.13 - Sensor Fault on page 71 Check MB thermistor Warning 55.11 - DP Temp High on page 71 Check Cooling Warning 55.13 - Sensor missing on page 71 Check DP thermistor M56635880_D Page 68 10/2020 - ©Edwards Limited...
  • Page 72 * This warning will only clear when the valve has successfully been opened and closed Note: Some of these warnings apply to pump sensors that are only present on certain dry pumping system variants. M56635880_D Page 69 10/2020 - ©Edwards Limited...
  • Page 73 ▪ A valve in the pipeline is possibly shut. ▪ There is possibly process debris or condensation in the exhaust pipeline. ▪ You can have too many pumping systems connected to the exhaust pipeline. M56635880_D Page 70 10/2020 - ©Edwards Limited...
  • Page 74 Check that the sensor is installed and is correctly connected. Fault Warning 55.13 - Sensor Fault Cause Sensor is faulty (short circuit). Remedy Check that the sensor is installed and is correctly connected. M56635880_D Page 71 10/2020 - ©Edwards Limited...
  • Page 75 Check that cooling water is connected, switched on and is to specification given in Cooling water data on page 21. Fault Warning 63.13 - Sensor missing Cause The dry pump temperature sensor has possibly become disconnected or failed Remedy Contact us. M56635880_D Page 72 10/2020 - ©Edwards Limited...
  • Page 76 Warning 84.13 - Sensor missing Cause The exhaust pipe temperature sensor has possibly become disconnected or failed. Remedy Contact us. Fault Warning 84.13 - Sensor Fault Cause Sensor is faulty (short circuit) Remedy Contact us. M56635880_D Page 73 10/2020 - ©Edwards Limited...
  • Page 77 83 for more information Fault Warning 186.13 - No DP Inv Comms Cause The pump controller cannot communicate with the dry pump inverter. Remedy Examine the wiring between the pump controller and the dry pump inverter. M56635880_D Page 74 10/2020 - ©Edwards Limited...
  • Page 78 Make sure that the DP motor cooling solenoid valve is installed and is correctly connected. Fault Warning 193.01 - Valve Fault Cause The MB Stator cooling solenoid valve is faulty (short circuit) Remedy Contact us. M56635880_D Page 75 10/2020 - ©Edwards Limited...

  • Page 79: Alarms

    78 Check Exh Pipe Temperature Alarm 174.10 - MB Low Speed on page 78 Check MB Rotor ffff xxxx yyyy Alarm 176.01 - MB zzzzzzzzzzzzz on page 78 Diag aaaa bbbb M56635880_D Page 76 10/2020 - ©Edwards Limited...
  • Page 80 Fault Alarm 55.12 - DP Temp High Cause Pump temperature high alarm, which stops pump. Remedy Refer to Warning 55.11 - DP Temp High on page 71 for causes and action. M56635880_D Page 77 10/2020 - ©Edwards Limited...
  • Page 81 Fault Alarm 176.13 - No MB Inv Comms Cause The pump controller cannot communicate with the booster inverter during startup checks. Remedy Examine the wiring between the pump controller and the booster inverter. M56635880_D Page 78 10/2020 - ©Edwards Limited...

  • Page 82: Alarm Conditions

    'Run 'til crash' is automatically reset to 'off ' when the electrical supply is removed. The Tool Interface overrides the 'Run 'til crash' state selected if it has control of the pump. M56635880_D Page 79 10/2020 - ©Edwards Limited...

  • Page 83: Unplanned Shut Down And Alarms

    Dry pump motor temperature ▪ Standard and T variants Dry pump end cover temperature ▪ T and TX Booster pump motor temperature ▪ iXM600 ▪ iXM600T ▪ iXM1200 ▪ iXM1200T Booster pump stator temperature ▪ iXM1200TX M56635880_D Page 80 10/2020 - ©Edwards Limited...

  • Page 84: Events

    If in doubt, contact supplier. Note: The high temperature alarms on Edwards vacuum pumping systems are system protection trips and should be considered as an abnormal running condition. If a system has tripped due to any high temperature alarm the system should be examined and the reason for the alarm identified.
  • Page 85 2. If the warning does not disappear power cycle the pump. 3. If the warning re-appears after power cycling, contact us. Fault Event 257.63 - Front Port oload Cause Faulty equipment has just been plugged in M56635880_D Page 82 10/2020 - ©Edwards Limited...

  • Page 86: Inverter Warnings And Alarms

    0008 0000 INV_TEMP_HIGH High Inverter Temperature Trip Check cooling 0000 0100 MISSING_PHASE Missing Phase in mains supply Missing Phase in mains supply 8000 0000 LOW_SPEED____ Acceleration timeout (Pump Acceleration timeout Seized/overload) (Pump Seized/overload) M56635880_D Page 83 10/2020 - ©Edwards Limited...
  • Page 87 - not dis- alert - only appears in fault log played on PDT as alert - Ss1:0000 Ss2:0020 only appears in fault log Anything else INV_OTHER_FLT Inverter unidentified fault Report to us. M56635880_D Page 84 10/2020 - ©Edwards Limited...

  • Page 88: Decommissioning

    Particular caution should be exercised when you work with fluorinated materials which can possibly have been exposed to temperatures greater than 260 °C. Refer to Edwards Safety Data Sheets for more information.

  • Page 89: Relocate The System For Decommissioning

    The system has possibly overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Safety Data Sheets for fluorinated materials used in the pump are available on request.

  • Page 90: Drain The Cooling Water For Decommissioning

    Connect the system to an applicable mains electrical supply. The control system will now open each temperature control valve, purging the cooling water from all flow paths. After two minutes, remove the electrical supply. Wait for 10 seconds M56635880_D Page 87 10/2020 - ©Edwards Limited...

  • Page 91: Transportation

    Follow the procedure given in Storage on page 89 and then read form HS1 and fill out form HS2, which can be found at the back of printed manuals or can be downloaded from http:// edwardsvacuum.com/HSForms/. M56635880_D Page 88 10/2020 - ©Edwards Limited...

  • Page 92: Storage

    Relocate the system for decommissioning on page 86. Store the system in clean dry conditions until required. When required for use, prepare and install the system as described in Installation on page 25 of this manual. M56635880_D Page 89 10/2020 - ©Edwards Limited...

  • Page 93: Disposal

    ABS, polyamide. Take particular care with: ▪ Fluoroelastomers which can have decomposed as the result of being subjected to high temperatures. ▪ Components which have been contaminated with dangerous process substances. ▪ Lithium battery. M56635880_D Page 90 10/2020 - ©Edwards Limited...

  • Page 94: Service

    If you are returning a vacuum pump, note the following: ▪ If a pump is configured to suit the application, make a record of the configuration before returning the pump. All replacement pumps will be supplied with default factory settings. M56635880_D Page 91 10/2020 - ©Edwards Limited...
  • Page 95 HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to us. NOTICE: If we do not receive a completed HS2 form, your equipment cannot be serviced. M56635880_D Page 92 10/2020 - ©Edwards Limited...

  • Page 96: Accessories

    Accessory module Item number D37480500 D37480550 Accessory module extension cable (5.0 m) D37491502 13.3 Pump Display Terminal (PDT) The PDT allows control and monitoring of the pump. Table 41 PDT Item Item number D37280700 M56635880_D Page 93 10/2020 - ©Edwards Limited...

  • Page 97: Pdt Holster

    13.7 Nitrogen flow switch assembly Provides a signal when flow is in limits and may be used as an interlock. Table 45 Nitrogen switch assembly Item Item number Nitrogen flow switch assembly A50785000 M56635880_D Page 94 10/2020 - ©Edwards Limited...

  • Page 98: Interface Modules

    13.8.3 iGateway modules The Pump LON to Ethernet iGateway and Serial to Ethernet iGateway give an additional Ethernet connection to the Drypump. This is used for connection to an Edwards Fabworks / EdCentra system or third party equipment using Semi E54.

  • Page 99: Exhaust Check Valve

    Constant flow water valve 3 lpm (for iXM200) A50884000 Constant flow water valve 4 lpm (for iXM600 and A50883000 iXM1200) Constant flow water valve 7 lpm (for iXM3000) A50838016 Constant flow water valve 3 lpm (for iXM200) A50883000 M56635880_D Page 96 10/2020 - ©Edwards Limited...

  • Page 100: Water Flow Monitor Assembly

    M56635880_D - Accessories 13.12 Water flow monitor assembly The water flow monitor assembly gives water flow rate, which displays on PDT. Table 52 Water flow monitor assembly Item Item number Water flow monitor assembly A50799000 M56635880_D Page 97 10/2020 - ©Edwards Limited...
  • Page 101 This page has been intentionally left blank.
  • Page 102 This page has been intentionally left blank.
  • Page 103 This page has been intentionally left blank.
  • Page 104 edwardsvacuum.com...

This manual is also suitable for:

Ixm1200 standardIxm1200 customer special aIxm600 standardIxm200Ixm1200 xcede standardIxm1200 xcede customer special a ... Show all

Table of Contents