Interface Modules; Microtim; Ems Modules; Igateway Modules - Edwards iXM Series Instruction Manual

13.8 Interface modules

13.8.1 MicroTIM

Tool specific control and monitoring via parallel interface (except for LAM-LON and
RS232 Micro-TIM's which are serial interface devices).
Table 46 Tool specific modules
MicroTIMs
SPI
MCM
TEL
E73
LAM
C3
Hitachi
eTIM
LON TP-1250*
EtherCAT®†
Configuration storage
RS232
* For use with Lam 2300 platforms with LON communication.
† EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff
Automation GmbH, Germany.

13.8.2 EMS modules

Tool specific controlled stop interfaces.
Table 47 Tool specific EMS modules
EMS Modules
SPI
MCM
LAM
C3

13.8.3 iGateway modules

The Pump LON to Ethernet iGateway and Serial to Ethernet iGateway give an additional
Ethernet connection to the Drypump. This is used for connection to an Edwards
Fabworks / EdCentra system or third party equipment using Semi E54.
The Pump-Serial to Pump-LON and Dual SIM Gateway connects to an Edwards Drypump.
This gives connections to support LON networks and components and two isolated
RS232 serial links with Edwards Serial Interface Module (SIM) protocol.
M56635880_D
M56635880_D - Accessories
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Item number
D37360310
D37360320
D37360330
D37360340
D37360350
D37360360
D37360370
D37361500
D37362000
D37363000
D37360390
D37370385
Item number
D37370310
D37370320
D37370350
D37370360
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