Connect To The Electrical Supply - Edwards iXM Series Instruction Manual

▪ The gas module supplied with the pump is not intended as a safety feature. If
necessary, install additional measures to monitor the flow of purge gas, for
example external sensors. Do not use the systems that are installed with the
load‑lock gas module on applications pumping flammable or pyrophoric materials.
For more information refer to semiconductor pumping application guide (Publication no.
P41100090) or contact us.
Gas purges
WARNING: HAZARDOUS GASES
Risk of injury and damage to the equipment. If you use inert gas purges to dilute the
dangerous gases to a safe level, make sure that the pump is shut down if the inert gas
supply fails.
1. Switch on the inert gas purge to remove air from the pump and the exhaust
pipeline before you start the process.
2. Switch off the purge flow at the end of the process only after the remaining
flammable gases or vapours have been purged from the exhaust pipeline.
▪
▪
3. Measure the inert gas flow rate continuously.
▪

4.6.6 Connect to the electrical supply

WARNING: PROTECTIVE EARTH CONNECTION
Risk of electric shock. The secondary protective earth (ground) is necessary in case of
failure of the primary earth (ground) and because pump filters can cause high earth
leakage currents, refer to
Contact us, if the system needs to be configured for use at different voltage range to
what is specified on the rating plate.
Solid state electronics protects the system from motor overload and short circuits. Refer
to Electrical data
information can be found on the label on the rear of the pump.
If the electrical supply to the system is connected through an Earth Leakage Circuit
Breaker (ELCB) or Residual Current Device (RCD) (depending on territory) it must be
applicable for protection of equipment with a d.c. component in the fault current, and
applicable for short duration switch-on surges, and for high leakage current (for
M56635880_D
M56635880_D - Installation
If liquids that produce flammable vapours are present in the pump foreline,
the inert gas purge to the dry pumping system must be supplied for all the
time liquid is present. Flammable liquids can possibly be present in the
foreline because of condensation or can be carried over from the process.
To calculate the flow rate of inert gas necessary for dilution, use the maximum
flow rate for the flammable gases/vapours that can occur. For example, if a
mass flow controller is being used to supply flammable gases to the process,
assume a flow rate for flammable gases that can possibly occur if the mass
flow controller is fully open.
If the flow rate falls below the requirement, stop the flow of flammable gases
or vapours to the pump.
Table: General electrical
on page 18, when you select the overload protection. Pump rating
data.
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