Edwards iXH100 Instruction Manual

Dry pumping systems

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M561-00-880

Issue C Original

Instruction Manual

iXH, iXL and pXH Dry Pumping Systems

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Summary of Contents for Edwards iXH100

Page 1 M561-00-880 Issue C Original Instruction Manual iXH, iXL and pXH Dry Pumping Systems...
Page 2 iXH and pXH Dry Pumping Systems Pump Booster Size TMS System Exhaust Seals Motor Low Voltage High Voltage 0 = Standard 0 = r 0 = r 0 = None 1 = T-Variant 1 = Standard 1 = r 0 = None A = None 1 = 4.5 kW 2 = T-Variant...
Page 3 iXL Dry Pumping Systems Exhaust Seals Pump Booster Size TMS System Motor 0 = r High Voltage 0 = r Low Voltage 0 = Standard 1 = r 0 = None 1 = r 1 = Standard 2 = Standard 1 = 4.5 kW A = None without...
Page 4 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Low Volt Systems...
Page 5 Declaration of Conformity Edwards Limited, Crawley Business Quarter Manor Royal, Crawley, West Sussex RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Low Volt Systems...
Page 6 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Low Volt Systems...
Page 7 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Low Volt Systems...
Page 8 P601-01-100 Issue C Original The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39 (also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in China after 1st March 2007 – Mark the product and packaging ...
Page 9: Table Of Contents
Emergency stop ......................44 Restart the pump after an emergency stop or automatic shut-down .......... 44 Advanced control and monitoring ..................44 © Edwards Limited 2012. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 10 Other problems ......................75 A2.4.1 Pump controller communications ..................75 For return of equipment, complete the HS Forms at the end of this manual. Page ii © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 11 SETUP menu ......................60 COMMANDS menu .......................61 GAS VALVES menu ......................61 INV FAULT HIST (Display Inverter Fault History) menu ............61 FIT ACCESSORY menu ....................62 © Edwards Limited 2012. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12 Han® is a registered trademark of Harting Electric GmbH EtherCon® is a registered trademark of Neutrik® AG Fomblin® is a registered trademark of Solvay Solexis SpA Page iv © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 13: Introduction
Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards iXH, iXL and pXH dry pumping systems. You must use your pumping system as specified in this manual otherwise the protection provided by the equipment may be impaired.
Page 14: Applications
In addition to the control modules listed above, the pXH proximity booster can control or be controlled by the Edwards backing pump. Contact Edwards for more information on how to control a pXH using an iXH or other Edwards pumping system.
Page 15: Active Utility Control
The Active Utility Control (Green Mode) function reduces utility consumption of the system while on stand-by. The Green Mode functionality is controlled by the on/off process signal from the Tool Interface Module. Contact Edwards for advice on application and activation.
Page 16: The Controls/Connectors On The Rear Of The Pump
Exhaust gas outlet connection Accessory interface Cooling water return connection MicroTIM in control LED (green) RF earth (ground) stud EMS interface Page 4 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17: Technical Data
(bolted) diameter enclosure) Units dB(A) mm/s kg force kg force iXH100 784 x 390 x 526 < 70 < 1.5 < 20 < 4 ISO63 NW40 iXH200H 901 x 390 x 526 < 70 <...
Page 18: General Technical Data
<10 ISO160 NW50 iXL750R 1622 x 517 x 1031 <70 <1.5 <10 ISO160 NW50 Contact Edwards for installation drawings † Measured in laboratory on level concrete surface Table 2 - General technical data Item Description Rating Units Intended use Indoor...
Page 19: Performance Data
3450 < 1 x 10 1000 Speed may be limited † Ultimate achieved when pXH used in conjunction with an appropriate backing pump. Please contact Edwards to discuss your application. The pXH does not have a shaft seal purge.
Page 20: Loading Data
Loading data Table 4 - Loading data (refer to Figure 5) Dimension to centre of gravity Load at levelling foot position Pump Units iXH100 165.5 iXH200H 165.5 iXH450H iXH500H iXH610 165.5 iXH1210/H 165.5 iXH1220H/T 165.5 iXH1820/H/T 165.5 iXH3030/T iXH3045H 220.5...
Page 21: Nitrogen Purge Data
Figure 5 - Centre of gravity and levelling foot loads Nitrogen purge data Table 5 - Nitrogen purge data for iXH and iXL systems Characteristics Rating Units Nitrogen supply pressure range 2.5-6.9 bar gauge 36 - 100 psi gauge Nitrogen supply quality To ISO 8573 Nitrogen inlet connection 1/4 inch tube fitting...
Page 22: Gas Module Types And Flows
+ inlet purge Gas ballast purge with electronically selected Multi mode harsh/medium + inlet purge + exhaust purge Contact Edwards Note: H variant pumps fitted with Single Mode+ modules include the innovative Gas Buster inlet purge for improved powder handling.
Page 23: Electrical Data
Electrical data Table 7 - Electrical data iXH100 to iXH1820/H/T Characteristics iXH100 iXH200H iXH450H iXH500H iXH610 iXH1210 iXH1210H iXH1220H/T iXH1820/H/T Units Dry pump motor rating Mechanical booster motor rating Current rating (200 - 230 V systems) Current rating (380 - 460 V systems)
Page 24 Table 7 - Electrical data iXH3030/T to pXH6000 (continued) Characteristics iXH3030/T iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T pXH4500 pXH6000 Units Dry pump motor rating Mechanical booster motor rating Current rating (200 - 230 V systems) Current rating (380 - 460 V systems) Recommended branch circuit fuse UL (200 - 230 V systems)
Page 25 Table 7 - Electrical data iXL250Q, iXL500Q/R and iXL750Q/R (continued) Characteristics iXL250Q iXL500Q iXL500R iXL750Q iXL750R Units Dry pump motor rating Mechanical booster motor rating Current rating (200 - 230 V systems) Current rating (380 - 460 V systems) Recommended branch circuit fuse UL (200 - 230 V systems) Recommended branch circuit fuse IEC (200 - 230 V systems)
Page 26: General Electrical Data
Contact Edwards for more information about configuration requirements for earth leakage reduction.
Page 27: Electrical Connections
Table 9 - Electrical connections Description Mating Connector description / external supply rating Internal supply rating Mains connection Refer to Table 7 for the mains connector fitted to each variant. Connector is either: Refer to installation section for wiring diagram Harting Han®...
Page 28: Wire Assembly According To Vde 0295
Table 9 - Electrical connections (continued) Description Mating Connector description / external supply rating Internal supply rating Accessory interface 15-way D socket Analogue measurement for water flow meter Pin 1 - input, Pin 5 common Active accessory module Pin 3 - RS485 +, Pin 10 - RS485 – Pump running status contacts Pin 6 - Dry pump (normally open) Pin 14 - Mechanical booster (normally open)
Page 29: Cooling-Water Data
Cooling-water data Table 11 - Water cooling system data Description Rating Units Maximum supply pressure barg psig Maximum allowable system differential pressure Minimum required pressure differential across supply and return Refer to Table 13 Supply temperature range Refer to Table 12 Water type Treated or non-corrosive industrial Maximum particle size...
Page 30: Cooling Water Supply Temperature
Table 12 - Cooling water supply temperature Cooling water supply temperature Units Applies to pump models 10 - 30 °C iXH100 iXH200H iXH610 iXH1210/H iXH1220H/T iXH1820/H/T iXH3030/T iXL250Q 10 - 25 °C iXH450H iXH500H iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T...
Page 31: Water Consumption Data
The ‘Rated Min Pressure Differential’ is required to maintain adequate cooling water flow under adverse operating conditions. © Edwards Limited 2012. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 32: T Variants
   - Exhaust extraction cover kit fitted    - 50mm duct connected to exhaust extraction kit  Page 20 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 33: Worst Case Test Results
Extraction flow rates required for each system are detailed in Table © Edwards Limited 2012. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 34: Extraction Rates Required By System Variant
System iXH100 iXH200H iXH450H iXH500H iXH610 iXH1210/H iXH1220H/T iXH1820/H/T iXH3030/T iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T iXL250Q iXL500Q iXL500R iXL750Q iXL750R Page 22 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Installation
If in doubt, consult Edwards.
Page 36: Locate The Dry Pumping System
1. Use suitable lifting equipment attached to all four lifting eyebolts to move the system close to its final operating position. Note: The iXH100, iXH200H and iXH 610 variants have only two eyebolts provided for lifting. Figure 3, item 8.
Page 37: Lubrication
If you are not sure which dry pump you have, find the product code number on the label on the rear of the pump and then refer to the product configurator at the front of this manual. © Edwards Limited 2012. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 38 160 °C at the point of connection to the pump. For all other pump variants, ensure that pipelines are rated for 110 °C. Edwards recommends the use of metal seals at any joint where the continuous operating temperature of the exhaust is greater than 160 °C.
Page 39: Connect To Your Factory Extraction System (Optional)
Refer to Figure 3, item 7 for location of the extraction port. The pXH does not have facility for extraction. © Edwards Limited 2012. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 40: Connect The Nitrogen Supply
Systems that are fitted with the loadlock gas module must not be used on applications pumping flammable or pyrophoric materials. For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-090) or contact Edwards. Page 28 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 41: Gas Purges
Leak test the system after installation and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system. Note: If you need further information on leak-testing, contact your supplier or Edwards for advice. Electrical supply WARNING Ensure that the electrical installation of the pumping system conforms with your local and national safety requirements.
Page 42 If you do, the interface control may be damaged. Contact Edwards if you wish to use the system with a power supply in a different voltage range to that specified on the rating plate. The system is protected from motor overloads and short circuits by solid state electronics. The power wiring between the system and your electrical installation must be protected.
Page 43: Mains Supply Cable Connection
The Harting connector is not approved for connection and disconnection under load. If you need further information on connecting the electrical supply, contact Edwards for advice. Three different types of electrical supply connector are used on these pumping systems. Refer to Section 2.5...
Page 44: The Harting Han ® K 4/4 Cable-Mounted Connector
Max torque setting Cable size (mm (Nm) Pin 2 Phase 2 Pin 3 Phase 3 Pin 4 Not connected Protective earth Page 32 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 45: The Harting 100A Axial Screw Module Cable-Mounted Connector
) Max torque setting (Nm) Pin A1 Phase 1 Pin A2 Phase 2 Pin D1 Not connected Pin D2 Phase 3 © Edwards Limited 2012. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 46: Customer Connection Kit - Combination Low Volts Ixl750
CONDUIT SLEEVE KIT 50 MM LV iXL750 Cable Gland M50 x 1.5 EARTH TERM 24B LV CON KIT iXL750 Clamp for 10 mm cable diameter Ground Term Page 34 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 47: Connect An Additional Rf Earth (Ground) (Optional)
EMS link plug the system will not operate. If you require EMO functionality (for example, to satisfy the requirements of Semi S2) you can install the pumping system in combination with an Edwards Disconnect Box (available as an accessory, refer to Section 7.3).
Page 48: Connect And Set Up The Cooling-Water
8. Inspect the water hoses, pipelines and connections and check that there are no leaks. Turn off the water supply while you complete the remainder of the installation procedures. Page 36 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 49: Accessories
2, item 7 and Figure 4, item 4) go on. If the LEDs do not go on, contact Edwards. 2. Switch on the cooling-water and nitrogen supplies. 3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction system are open).
Page 50: Install Additional Safety Equipment
4.3.  Contact Edwards.  8. Look at the pressure gauge in your inlet pipeline: If the pressure is increasing, immediately shut down the system, and contact Edwards.  If the pressure is decreasing continue at Step  9. After you have commissioned the system:...
Page 51: Operation
3. Check that the exhaust-extraction system is not restricted, and that any valves in the exhaust-extraction system are open. The pump can be started using either the MicroTIM, the PDT or the front panel control. © Edwards Limited 2012. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 53: Manual Shut-Down
Ramped shut-down is an optional mode for iXH. In some harsh applications, process residues can accumulate in the pump mechanism during shut-down, making it difficult to restart the pump next time. To prevent this problem a special ramped shut-down can be performed. Contact Edwards for more information. 4.3.2 MicroTIM operation Use your control equipment to reset the pump start/stop signal to the interface connector.
Page 54: Automatic Shut-Down
Booster status Dry Pump status Not applicable to pXH systems. † Not applicable to systems which do not contain a booster. Page 42 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 55: Unplanned Shut-Down And Alarms
If you are in any doubt, contact Edwards. Note: The high temperature alarms on Edwards vacuum pumping systems are system protection trips and should be considered as an abnormal running condition. If a system has tripped due to any high temperature alarm the system should be investigated and the reason for the alarm established.
Page 56: Emergency Stop
4.1. Advanced control and monitoring FABworks is a tool that can be used to monitor pumping systems over a network. Contact Edwards for more information. For advanced applications, Edwards has a tool that allows the pumping system configuration to be changed. Contact Edwards for more information.
Page 57: Maintenance
Particular caution should be exercised when working with fluorinated materials which may have been exposed to temperatures greater than 260 °C. Refer to Edwards Material Safety Data Sheets for detailed information.
Page 58: Relocate The System For Maintenance
Fluorinated materials in the system may include oils, greases and seals. The system may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request.
Page 59: Draining The Cooling Water
The exhaust of T variant systems will heat up as soon as the electrical supply is switched on. 1. Relocate the system for maintenance as stated in Section 5.2. © Edwards Limited 2012. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 60: General Maintenance
The following maintenance can also be carried out on the system, contact Edwards for details and training: Inspect the connections, pipelines, cables and fittings inside the pump enclosure, refer to Section 5.5.
Page 61: Gas Module Configuration
The factory default setting for all gas modules is Harsh, except for the iXH1220H and iXH1820H models which contain the SM+96 gas module set to Medium. Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific recommendations.
Page 62: Ixl Variants
System operating temperature configuration The system operating temperature configuration may be adjusted to suit process demands. Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific recommendations.
Page 63: Transportation, Storage And Disposal
Perchlorate Material - special handling may apply, refer to www.dtsc.ca.gov/hazardouswaste/perchlorate/ Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including disposal. Refer to Section 7.2...
Page 65: Service, Spares And Accessories
Edwards products, spares and accessories are available from Edwards companies and distributors world-wide. These centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: 1.
Page 66: Ordering Accessories
If you wish to restrain your system using seismic brackets you will need to order the correct brackets for your particular system, refer to Table Page 54 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 67: Seismic Bracket Kits
/H iXH3050H iXH1220H /T iXH4545HT iXH1820 /H /T iXH4550HT iXH3030 /T iXH6045H /T iXH6050H /T © Edwards Limited 2012. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 69: Appendix A1 Pump Display Terminal
Pump Running Press Press CANCEL No change (running) CANCEL Stopped or Running No PDT Control Press Press CANCEL No change CANCEL © Edwards Limited 2012. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 70: A1.3 Warning / Alarm Display And Acknowledgement
Typical Display Serial Number S/N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1.1A Booster current MB CURRENT 1.1A Page 58 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 71: A1.4.2 Status Menu
MB SPEED 100 % Booster speed in Hz MB SPEED 100 Hz pXH Booster speed in percent PB SPEED 100 % © Edwards Limited 2012. All rights reserved. Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 72: A1.4.3 Setup Menu
This option requires a security code to access it. † Time is set automatically when connected to a Fabworks network. Each sub menu is described below. Page 60 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 73: A1.4.4 Commands Menu
Refer to Section A2.3 for more information about inverter warnings and alarms. © Edwards Limited 2012. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 74: A1.4.6 Software Version Display Menu
Note: Gate Valves additionally have an option of Fitted No Feedback for use where there are no position feedback switches fitted to the gate valve. To configure an accessory connected to the pXH, please contact Edwards. A1.4.8 IP Configuration menu Under the Setup menu.
Page 75: A1.4.9 Display Attributes Menu
PDT is connected to. This means a user can transfer a PDT between pumps and keep the same settings. It also means that different units could be displayed on two PDTs connected to the same pump. © Edwards Limited 2012. All rights reserved. Page 63 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 77: Appendix A2 Troubleshooting
- the gas module may be faulty Contact Edwards. Warning 35.13 The transducer is disconnected or has Contact Edwards. Sensor missing failed. © Edwards Limited 2012. All rights reserved. Page 65 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 78 - Check that cooling water is DP Temp 2 High connected, switched on and is to specification given in Section 2.6. Page 66 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 79 1. Some of these warnings apply to pump sensors that are only present on certain system variants. 2. Some of these warnings apply to accessories and may only be encountered if the particular accessory is fitted. © Edwards Limited 2012. All rights reserved. Page 67 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 81 Speed Too Low Contact Service least 30% less than demand for rotation and bearings before more than 3 minutes. attempting to restart. © Edwards Limited 2012. All rights reserved. Page 69 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 82: A2.3 Inverter Warnings And Alarms
Table A17 - Hexadecimal to digital conversion BIT SET COMBINATIONS HEXADECIMAL DECIMAL Combination 8+4+2+1 8+4+2 8+4+1 8+2+1 4+2+1 2 + 1 Page 70 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 83: A18 Inverter Alarm Codes
Motor/Drive system over temperature - refer to warning code to determine source. Check cooling. OVERI Motor overcurrent OVERV Inverter overvoltage Reserved Reserved © Edwards Limited 2012. All rights reserved. Page 71 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 84: A19 Inverter Warnings Codes
8 in bit 4 – OVERT warning 2 in bit 6 - HIGHTM. This means the motor overheated and switched the output off. Page 72 © Edwards Limited 2012. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 85: A20 Inverter Diagnostic Display Text
0x0000 0x0002 IGBT_OPEN_CCT___ 0x0000 0x0001 IGBT_SHORT_CCT__ 0x8000 0x0000 INTERNAL_COMMS__ 0x4000 0x0000 P_CHARGE_WARNING 0x2000 0x0000 WATCHDOG_TIMEOUT 0x1000 0x0000 OSTEST_FAULT____ 0x0800 0x0000 EEPROM_LOW_VCC__ © Edwards Limited 2012. All rights reserved. Page 73 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 87: A2.4 Other Problems
Once the pump has stopped, cycle the power to the pump and attempt to re-start it. Refer to Tables for actions if any warnings or alarms are generated. © Edwards Limited 2012. All rights reserved. Page 75 Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ixh200h Ixh1210 Ixh610 Ixh1210h Ixh1210ht Ixh1220h ... Show all

Edwards iXH100 Instruction Manual

Introduction

Technical Data

Installation

Operation

Maintenance

Transportation, Storage and Disposal

Service, Spares and Accessories

Appendix A1 Pump Display Terminal

Appendix A2 Troubleshooting

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Summary of Contents for Edwards iXH100

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