Install Additional Safety Equipment - Edwards iXM Series Instruction Manual

CAUTION: INSTALLATION SAFETY
Risk of injury. The system power must be switched off when the MicroTIM or active
accessories module is installed or removed. If it is not, these modules can be
damaged. Refer to the accessory manual for more information.
Refer to the individual accessories manuals for information about installation.
The disconnect box (when installed), which agrees with the SEMI S2 requirements and is
used:
▪ to energise and isolate the power to the system
▪ to isolate the electrical supply during an emergency
▪ for maintenance
▪ for troubleshooting the system
The photohelic switch/gauge, when installed, monitors the loss of extraction from the
enclosure, which agrees with SEMI S2 requirements.

4.7 Install additional safety equipment

WARNING: HAZARDOUS GASES
Risk of injury. If the process tool or control system needs to know the total flow rate
of nitrogen to the dry pumping system for safety reasons, install applicable
measurement equipment in the nitrogen supply pipeline.
WARNING: NITROGEN PURGE
Risk of injury. If you use the nitrogen purges to dilute dangerous gases to a safe level,
make sure that the system shuts down if the nitrogen supply to the system fails.
If the sensors or microprocessors fail, the total flow rate of nitrogen displayed or output
by the system can be incorrect. If it is necessary to know the total flow rate of nitrogen
to the dry pump for safety reasons, install applicable measurement equipment in the
nitrogen supply pipeline. If a rotameter is installed, make sure that it is applicable for use
with nitrogen and that it is correctly calibrated.
If the nitrogen supply to the system fails, a warning message is shown on the Pump
Display Terminal (PDT) (if installed) and sent to any interface system connected to the
system. Make sure that the installation is configured so that it remains safe if there is a
failure of the nitrogen supply to the system.
If an alarm condition occurs (and the system is not configured to 'Run 'til crash', refer to
Alarm conditions
the installation remains safe if the system shuts down automatically.
M56635880_D
M56635880_D - Installation
on page 79) the system will shut down automatically. Make sure that
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