Edwards iXL600 Instruction Manual
  1. Manuals
  2. Brands
  3. Edwards Manuals
  4. Water Pump
  5. iXL600
  6. Instruction manual

Edwards iXL600 Instruction Manual

Dry pump systems
Hide thumbs
Table of Contents

Advertisement

Quick Links

Instruction Manual
iXL600 and iXL1000 Dry Pump Systems
Description
iXL600 200-460 V 50/60 Hz
iXL600N 200-460 V 50/60 Hz
iXL1000 200-460 V 50/60 Hz
iXL1000N 200-460 V 50/60 Hz
Original Instructions
A540-55-880
Item Number
A541-33-010
A541-34-010
A541-53-020
A541-54-020
Issue D

Advertisement

Table of Contents
loading

Related Manuals for Edwards iXL600

Summary of Contents for Edwards iXL600

  • Page 1 A540-55-880 Issue D Instruction Manual iXL600 and iXL1000 Dry Pump Systems Description Item Number iXL600 200-460 V 50/60 Hz A541-33-010 iXL600N 200-460 V 50/60 Hz A541-34-010 iXL1000 200-460 V 50/60 Hz A541-53-020 iXL1000N 200-460 V 50/60 Hz A541-54-020 Original Instructions...
  • Page 2 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) iXL600 200-460 V 50/60 Hz...
  • Page 3 All iXL200 models which are above the limit requirement in GB/T All iXL600, 600N, 600M models 26572 as detailed in the declaration table below. All iXL1000, 1000N, 1000M models These parts can safely be used for the...
  • Page 4 This page has been intentionally left blank.

  • Page 5: Table Of Contents

    Emergency stop ......................35 Restart the pump after an emergency stop or automatic shut-down .......... 35 Advanced control and monitoring ..................35 © Edwards Limited 2015. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Other problems ......................62 A2.4.1 Pump controller communications ..................62 For return of equipment, complete the HS Forms at the end of this manual. Page ii © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 Nitrogen switch assembly .....................46 MicroTIM modules .......................46 EMS modules ......................46 iGateway modules ......................47 Pump start control ......................49 Pump stop and control ....................50 © Edwards Limited 2015. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 8 Han® is a registered trademark of Harting Electric GmbH ® EtherCon® is a registered trademark of Neutrik Fomblin® is a registered trademark of Solvay Solexis SpA Page iv © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Introduction

    Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards iXL600 and iXL1000 dry pumping systems. The pump must be used as specified in this manual. Read this manual before installing and operating the pump.

  • Page 10: Applications

    Edwards can offer advice and assistance in matching the pump to the application. If using the iXL600(N) or iXL1000(N) system on an application for which it is not intended, the warranty may be invalidated.

  • Page 11: The Front Panel Controls

    Seismic bracket (4 off if fitted) Note: Diagram shows side fitting location Pumped gas inlet connection RF Earth (ground) cable Extraction port Lifting eyebolt (1 off) © Edwards Limited 2015. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 12: The Controls/Connectors On The Rear Of The Pump

    Nitrogen Purge Flow Meter (if fitted) MicroTIM in control LED (green) RF Earth M6 stud (ground) EMS interface Nitrogen purge adjustment (if fitted) Page 4 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 13: Priority Of Control

    2), a Pump Display Terminal (PDT), the Edwards System Controller or by the tool through the MicroTIM or one of the serial interfaces. Only one of these can have control of the system at any one time. That is, once one of these has control of the system, control requests from the others are denied.
  • Page 14 A540-55-880 Issue D This page has been intentionally left blank. Page 6 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 15: Technical Data

    695 x 280 x 650 < 2 < 20 < 4 ISO100 NW25 iXL600(N) Contact Edwards for installation drawings † Measured in laboratory on level concrete surface Table 2 - Technical data Item Description Rating Units Intended use...

  • Page 16: Performance Data

    Average values are the mean value taken from a sample of typical production units. † The maximum pressure at which the pump will operate without generating warnings or alarms. ‡ For iXL600N and iXL1000N with no purge use values for iXL600 and iXL1000. Figure 5 - Continuous operating zones Item Description...

  • Page 17: Loading Data

    Loading data Table 4 - Loading data (refer to Figure 6) Dimension to centre of gravity Load at levelling foot position Pump Units iXL1000/ iXL600(N) Figure 6 - Centre of gravity and levelling foot loads...

  • Page 18: Nitrogen Purge Data

    Nitrogen inlet connection ¼ inch tube fitting Flow:- N Variant (Factory set) Note: Nitrogen purge can be set in the range 0-40 slm. Please contact Edwards to discuss the application. Electrical data Table 6 - Electrical ratings Characteristics Value Units...
  • Page 19 Contact Edwards for more information about configuration requirements for earth leakage reduction. Table 8 - Electrical connections...

  • Page 20: Cooling Water Data

    2.0 (30 °C water & 40 °C ambient) Rated minimum pressure differential Water type Treated or non-corrosive industrial Maximum particle size 0.03 Acidity 6.5 to 8.0 Page 12 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 21 The ‘Rated Min Pressure Differential’ is required to maintain adequate cooling water flow under adverse operating conditions. © Edwards Limited 2015. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 22: Tracer Gas Analysis

    0.25 0.25 0.03 Pass Tetrachloride Where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV). Page 14 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 23: Installation

    Edwards Safety Manual Publication Number P400-40-100 Vacuum Pump and Vacuum Systems. Only Edwards trained engineers may install the dry pumping system. Users can be trained by Edwards to  conduct the tasks described in this manual. Contact the local service centre or Edwards for more information.

  • Page 24: Locate The Dry Pumping System

    These can be fitted to the sides or the front and back of the pump, whichever is most convenient, as shown in Figure Page 16 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Seismic Bracket Front And Side Attachments With Dimensions

    A540-55-880 Issue D Figure 7 - Seismic bracket front and side attachments with dimensions © Edwards Limited 2015. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 26: Lubrication

    Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent  loading of coupling joints. Edwards recommends using Edwards braided flexible pipelines. Adequately support vacuum/exhaust pipelines to prevent the transmission of stress to pipeline coupling ...

  • Page 27: Connect To The Factory Extraction System (Optional)

    Note: Only the ‘N’ variants have the facility for a nitrogen purge. Refer to Section 2.4 for nitrogen supply requirements. © Edwards Limited 2015. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Flammable/Pyrophoric Materials

    Leak test the system after installation and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system. Note: If further information on leak testing is required, contact the supplier or Edwards for advice. Page 20 © Edwards Limited 2015. All rights reserved.

  • Page 29: Electrical Supply

    If higher voltages are connected, the interface control may be damaged. Contact Edwards if using the system with a power supply in a different voltage range to that specified on the rating plate. The system is protected from motor overloads and short circuits by solid state electronics. The power wiring between the system and the electrical installation must be protected.

  • Page 30: Mains Supply Cable Connection

    (ground) conductor will be the last conductor to be pulled from the connector. If further information on connecting the electrical supply is required, contact Edwards for advice. 1. Screw the cable gland onto the connector hood.

  • Page 31: Mains Input Supply Connector

    Tighten the connection using a flat blade screwdriver.  8. Refit the outer cover to the connector block then tighten the cable gland. © Edwards Limited 2015. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 32: Electrical Connector Locking Mechanism

    Tighten the locking screws (item 2) to firmly hold the locking mechanism in place.  Connect the other end of the electrical supply cable to the electrical supply through a suitable isolator.  Page 24 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Mains Connector On Pump Bulkhead

    Locking mechanism in unlocked position Locking mechanism in locked position Control/connector Item identification Electrical connector locking mechanism Locking screws Lever Protective cover © Edwards Limited 2015. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 34: Connect An Additional Rf Earth (Ground) (Optional)

    Used on its own, the EMS does not isolate the electrical supply to the pumping system and so does not provide an EMO (Emergency Off) function. This function can be provided by using an Edwards Disconnect Box available as an accessory, see Section 7.3.

  • Page 35: Connect And Set Up The Cooling Water

    Figure 4, item 4) go on. If the LEDs do not go on, contact Edwards. 2. Switch on the cooling water and nitrogen supplies. 3. Ensure that the exhaust extraction system is not blocked (for example, that valves in the exhaust extraction system are open).

  • Page 36: Nitrogen Flow Meter

    Insert the screw driver into hole 1 and adjust variable restrictor until the flow tube indicates the required  flow rate. If a different nitrogen flow rate is required please contact Edwards for further advice. 9. Look at the pressure gauge in the inlet pipeline.

  • Page 37: Install Additional Safety Equipment

    4.4) the pumping system will shut down automatically. Ensure that the installation remains safe if the pumping system shuts down automatically. © Edwards Limited 2015. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 38 A540-55-880 Issue D This page has been intentionally left blank. Page 30 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Operation

    The pump can be started using the front panel control, or the Pump Display Terminal (PDT) accessory, or the MicroTim accessory (refer to Section 7.3). © Edwards Limited 2015. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 40: Front Panel Control Operation

    4) will illuminate to indicate system status. Also refer to Appendix A2 for corrective actions should the system develop a problem. Page 32 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Manual Shut-Down

    Use the customer control equipment to reset the pump start/stop signal to the interface connector. The Running LEDs will then go off, and the pump running status output signal will open. © Edwards Limited 2015. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 42: Automatic Shut-Down

    If a PDT is connected to the pump, note and record any warning or alarm codes that are displayed (see Appendix A2) to assist with identifying the root cause of the shut-down or alarm. If in any doubt, contact an Edwards Service Engineer.

  • Page 43: Emergency Stop

    4.1. Advanced control and monitoring FabWorks-iMS is a tool that can be used to monitor pumping systems over a network. Contact Edwards for more information. For advanced applications, Edwards has a tool that allows the pumping system configuration to be changed. Contact Edwards for more information.
  • Page 44 A540-55-880 Issue D This page has been intentionally left blank. Page 36 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 45: Maintenance

    Particular caution should be exercised when working with fluorinated materials which may have been exposed to temperatures greater than 260 °C. Refer to Edwards Material Safety Data Sheets for detailed information.

  • Page 46: Relocate The System For Maintenance

    Fluorinated materials in the system may include oils, greases and seals. The system may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request.

  • Page 47: Draining The Cooling Water

    4, item 18). Position the open end of the drain hose in a suitable collection container. 4. Turn on the clean dry air supply. © Edwards Limited 2015. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 48: General Maintenance

    Edwards recommends that carrying out a monthly visual inspection of the system in situ. Check that the cables, hoses and pipelines bringing services to the pump are in good condition and ensure that all connections are secure.

  • Page 49: Transportation, Storage And Disposal

    Perchlorate Material - special handling may apply, refer to www.dtsc.ca.gov/hazardouswaste/perchlorate/. Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including disposal. Refer to Section 7.2...
  • Page 50 A540-55-880 Issue D This page has been intentionally left blank. Page 42 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 51: Service, Spares And Accessories

    The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, state for each part required: 1. Model and Item Number of the equipment 2.

  • Page 52: Accessories

    The PDT holster retains the PDT and is attached to the pump or tool frame. Table 18 - PDT holster Item Item number PDT holster D37209800 Page 44 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 53: Pdt Extension Cable

    Table 23 - Photohelic gauge assembly Item Item number Extraction port chimney A50798010 Photohelic switch/gauge Contact Edwards © Edwards Limited 2015. All rights reserved. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 54: Nitrogen Flow Switch Assembly

    Table 26 - EMS modules EMS Modules Item number D37370310 D37370320 D37370330 Semi E73 D37370340 LAM Alliance D37370350 D37370360 Hitachi D37370370 Page 46 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 55 Accessory module PDT1 PDT2 iGateway module Nitrogen flow switch assembly Water flow control valve Water flow monitor assembly MicroTIM Photohelic switch © Edwards Limited 2015. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 56 A540-55-880 Issue D This page has been intentionally left blank. Page 48 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 57: Appendix A1 Pump Display Terminal

    Pump Running Press Press CANCEL No change (running) CANCEL Stopped or Running No PDT Control Press Press CANCEL No change CANCEL © Edwards Limited 2015. All rights reserved. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 58: A1.3 Warning / Alarm Display And Acknowledgement

    Typical Display Serial Number S/N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1.1A Booster current MB CURRENT 1.1A Page 50 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 59: A1.4.2 Status Menu

    Software Version Display menu S/W Version… Display Serial Number Serial Num… Fit Accessory menu Fit Accessory… Edit IP configuration menu IP Config… © Edwards Limited 2015. All rights reserved. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 60: A1.4.4 Commands Menu

    Under the Setup menu. Scroll through the software version loaded in the processors by pressing up/down keys. Press CANCEL to exit back to the SETUP menu. Page 52 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 61: A1.4.7 Fit Accessory Menu

    Edit IP menu. Pressing CANCEL at the start of the line will cancel and exit back to the IP Configuration menu. Display only items press CANCEL to exit back to the IP Configuration menu. © Edwards Limited 2015. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 62: A1.4.9 Display Attributes Menu

    PDT is connected to. This means a user can transfer a PDT between pumps and keep the same settings. It also means that different units could be displayed on two PDTs connected to the same pump. Page 54 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 63: Appendix A2 Troubleshooting

    Refer to pump. If the warning Section A2.4.1 for more information. persists, contact Edwards to replace the pump controller. © Edwards Limited 2015. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 64 Note: Some of these warnings apply to accessories and may only be encountered if the particular accessory is fitted. Page 56 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 65: A2.2 Alarms

    See Warning 63.11 for causes and DP Temp High temperature has reached the actions. maximum allowed so the system has stopped. © Edwards Limited 2015. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 66 Check the wiring between the No DP Inv Comms communicate with the dry pump pump controller and the dry pump inverter during startup checks inverter Page 58 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 67: A2.3 Inverter Warnings And Alarms

    Table A15 - Hexadecimal to digital conversion BIT SET COMBINATIONS HEXADECIMAL DECIMAL Combination 8+4+2+1 8+4+2 8+4+1 8+2+1 4+2+1 2 + 1 © Edwards Limited 2015. All rights reserved. Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 68: A16 Inverter Alarm Codes

    – possible causes include no or low cooling water flow, inverter water valve stuck closed or water pipe to inverter blocked. Page 60 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 69 8 in bit 4 – OVERT warning 2 in bit 6 - HIGHTM. This means the motor overheated and switched the output off. © Edwards Limited 2015. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 70: A2.4 Other Problems

    Once the pump has stopped, cycle the power to the pump and attempt to re-start it. Refer to Tables for actions if any warnings or alarms are generated. Page 62 © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ixl600nIxl1000Ixl1000n

Table of Contents