Keithley 6517B Reference Manual page 94

Section 4: Basic measurements
1. Enable zero check by pressing Z-CHK.
2. Select and configure the desired resistivity measurement type from the MEAS-TYPE
(RESISTIVITY) option of the ohms configuration menu (refer to
27) for more information).
3. Select the V-source adjustment mode. With AUTO V-source selected, the instrument
automatically selects the optimum V-source value (40 V or 400 V) for the measurement range.
With MANUAL V-source selected, you select the V-source range and value. The V-source
adjustment mode is selected from the V-SOURCE item of the CONFIGURE OHMS menu.
4. Connect the sample to be measured to the Model 6517B. The figure below shows the
connections to the Model 8009 for surface and volume resistivity measurements.
5. Select the ohms function by pressing R.
6. If the manual V-source adjustment mode is selected, use the cursor and the VOLTAGE SOURCE
adjust keys to set the voltage level. The V-source range can be changed from the RANGE item of
the CONFIGURE V-SOURCE menu. Note that you are not able to adjust the V-source if AUTO V-
source is selected.
7. Use the manual RANGE keys to select the ohms measurement range, or select AUTO range.
Note that with AUTO range selected, the instrument does not go the 2 TΩ, 20 TΩ, and 200 TΩ
ranges.
8. Disable zero check by again pressing Z-CHK.
9. Press OPER to place the V-source in operate and after an appropriate electrification period (bias
time), note the resistivity reading. Typically, an electrification period of 60 seconds is used. A
flashing VOLTAGE SOURCE OPERATE LED indicates that the V-source has gone into current
limit. The programmed voltage is not being applied to the load. In this situation, try using a lower
voltage for the measurement.
10. Place the V-source in standby by again pressing OPER and enable zero check.
4-26
Figure 48: Connections for measurements using Model 8009 test fixture
Model 6517B Electrometer Reference Manual
Ohms configuration
6517B-901-01 Rev. C / August 2015
(on page 4-