Keithley 6517 Service Manual
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Keithley 6517 Service Manual

Keithley 6517 Service Manual

Electrometer
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Model 6517A
Electrometer
Service Manual
References to the Model 6517 also apply to the Model 6517A.
Contains Performance Verification, Calibration, and Repair Information

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Summary of Contents for Keithley 6517

  • Page 1 Model 6517A Electrometer Service Manual References to the Model 6517 also apply to the Model 6517A. Contains Performance Verification, Calibration, and Repair Information...
  • Page 2 WARRANTY Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment. Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batter- ies, diskettes, and documentation.
  • Page 3 Model 6517A Electrometer Service Manual ©1998, Keithley Instruments, Inc. All rights reserved. Cleveland, Ohio, U.S.A. Second Printing, April 1999 Document Number: 6517A-902-01 Rev. B...
  • Page 4 Revision A (Document Number 6517A-902-01)................September 1998 Revision B (Document Number 6517A-902-01)..................April 1999 All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand and product names are trademarks or registered trademarks of their respective holders.
  • Page 5 (IEC) Standard IEC 664, digital multimeter measuring circuits The types of product users are: (e.g., Keithley Models 175A, 199, 2000, 2001, 2002, and 2010) are Installation Category II. All other instruments’ signal terminals are Responsible body is the individual or group responsible for the use Installation Category I and must not be connected to mains.
  • Page 6 NOT as safety earth ground connections. leads, and input jacks, must be purchased from Keithley Instru- ments. Standard fuses, with applicable national safety approvals, If you are using a test fixture, keep the lid closed while power is ap- may be used if the rating and type are the same.

  • Page 7: Table Of Contents

    Table of Contents Performance Verification Introduction ............................... 1-1 Environmental conditions ..........................1-1 Warm-up period ..............................1-2 Line power ................................ 1-2 Recommended test equipment .......................... 1-2 1.5.1 Meter performance verification equipment ....................1-2 1.5.2 Voltage source verification equipment ..................... 1-3 1.5.3 Temperature verification equipment ......................
  • Page 8 2.9.1 Calibration commands ..........................2-15 2.9.2 IEEE-488 bus comprehensive calibration procedure ................2-15 2.10 Single-point calibration ........................... 2-21 2.10.1 Front panel single-point calibration ......................2-21 2.10.2 IEEE-488 bus single-point calibration ....................2-22 2.11 Programming calibration dates ........................2-23 Calibration Command Reference Introduction ...............................
  • Page 9 Troubleshooting Introduction ................................ 5-1 Repair considerations ............................5-1 Power-on test ..............................5-2 Front panel tests ..............................5-2 5.4.1 KEYS test ..............................5-2 5.4.2 DISPLAY PATTERNS test ........................5-2 5.4.3 Character set test ............................5-2 Principles of operation ............................5-2 5.5.1 Display board .............................
  • Page 10 List of Illustrations Performance Verification Figure 1-1 Connections for DC volts verification ....................... 1-7 Figure 1-2 Connections for 20pA–2µA range verification ..................1-7 Figure 1-3 Connections for 20µA–20mA range verification ..................1-9 Figure 1-4 Connections for coulombs verification ....................1-10 Connections for ohms verification (2M Ω...
  • Page 11 Calibration Messages Figure B-1 EERR? query response (calibration execution errors) ................B-6 Figure B-2 VERR? query response (voltage function cal errors) ................B-6 Figure B-3 IERR? query response (current function cal errors) .................. B-6 Figure B-4 CERR? query response (coulombs function cal errors) ................B-7 Figure B-5 TERR? query response (temperature function cal errors) .................
  • Page 12 List of Tables Performance Verification Table 1-1 Recommended test equipment for meter performance verification ............1-3 Table 1-2 Recommended test equipment for voltage source verification ..............1-3 Table 1-3 Temperature verification equipment ......................1-3 Table 1-4 Humidity verification equipment ....................... 1-4 Table 1-5 Limits for DC volts verification .........................
  • Page 13 Calibration Command Reference Table 3-1 IEEE-488 bus calibration command summary ................... 3-2 Table 3-2 Volts function calibration commands and parameters ................3-10 Table 3-3 Amps function calibration commands and parameters (all ranges, without calibration standard) ..3-11 Table 3-4 Amps function calibration commands and parameters (20pA-2µA ranges, using calibration standard). 3-12 Table 3-5 Coulombs function calibration commands and parameters (without calibration standard) .....

  • Page 14: Performance Verification

    If the instrument is still under warranty, 1.11 Temperature verification: Explains how to check and its performance is outside specified temperature measurement accuracy. limits, contact your Keithley representa- tive or the factory to determine the correct 1.12 Humidity verification: Summarizes the basic proce- course of action.

  • Page 15: Warm-Up Period

    Performance Verification Warm-up period 1.5.1 Meter performance verification equipment Table 1-1 lists all test equipment required for verifying the The Model 6517A must be allowed to warm up for at least measurement accuracy of Model 6517A meter functions. one hour before performing the verification procedures. If This equipment will allow you to check the accuracy of the the instrument has been subjected to temperature extremes instrument volts, amps, and coulombs functions.

  • Page 16: Voltage Source Verification Equipment

    Recommended test equipment for voltage source verification Mfg. Model Description Specifications Mfg. Model Description Specifications* Omega CL-307K Type K Thermo- -190°C to Keithley 2001 Multimeter 200V range: ±41ppm couple Calibrator/ +1300°C, ±0.4% 1000V range: ±47ppm Simulator Keithley 8607 Dual banana plug cable...

  • Page 17: Humidity Verification Equipment

    Performance Verification 1.5.4 Humidity verification equipment • Model 6517A 200µA range one-year accuracy: ±(0.1% of reading + 5 counts) Table 1-4 summarizes test equipment recommended to ver- • Calibrator total absolute uncertainty at 190µA output: ify the accuracy of the Model 6517A humidity measurement ±103ppm function.

  • Page 18: Offset Voltage And Bias Current Calibration

    Performance Verification Offset voltage and bias current Wait until the instrument completes this step before con- tinuing. calibration 3. Removing the triax shorting cable, and connect the triax shielding (non-shorting) cap in its place. Before performing meter verification procedures (checking 4.

  • Page 19: Dc Volts Verification

    • 20pA – 2µA range verification using a DC voltage cal- 3. Restore Model 6517A factory default conditions, as ibrator and the Keithley Model 5156 Electrometer Cal- explained in paragraph 1.7. ibration Sandard, which contains standard resistors. 4. Select the Model 6517A 2V DC range, and make sure the filter is enabled.
  • Page 20 CAUTION: CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. BNC-to-dual Model 6517 Electrometer Banana Plug DC Voltage Calibrator Adapter (Connect Cable Shield to...

  • Page 21: Table

    Performance Verification After calculating the actual voltage values, record them Proceed as follows: where indicated in Table 1-6. 1. Connect the Model 6517A to the DC current calibrator using the low-noise coax cable, triax-to-BNC adapter, 9. Set the DC calibrator to the actual voltage. and BNC-to-dual banana plug adapter, as shown in Fig- 10.

  • Page 22: Coulombs Verification

    FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. BNC-to-dual Banana Plug Model 6517 Electrometer Adapter (Connect DC Current Calibrator Cable Shield to Output LO) Figure 1-3 Connections for 20µA–20mA range verification...

  • Page 23: Table

    Performance Verification DC Voltage Calibrator Model 6517 Electrometer WARNING: WARNING: NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. 1010V PEAK MADE SELECTED LINE VOLTAGE U.S.A. 90-110V 180-220V PREAMP OUT COMMON...

  • Page 24: Ohms Verification

    Performance Verification 1.9.4 Ohms verification Step 1: Select the auto voltage source mode 1. Press CONFIG and then R. Ohms function accuracy is verified by connecting accurate 2. Select VSOURCE in the displayed menu, and then resistance standards to the Model 6517A and then verifying press ENTER.

  • Page 25: Table

    CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Model 6517 Electrometer Resistance Calibrator Figure 1-5 Connections for ohms verification (2M Ω –200M Ω ranges) Table 1-9 Limits for ohms verification...
  • Page 26 Chassis are linked. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Model 6517 Electrometer Triax Cable Figure 1-6 Connections for ohms verification (2G Ω –200G Ω ranges)

  • Page 27: Voltage Source Verification

    FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Shielded Characterized Resistor (See Figure 1-8 for construction details) Model 6517 Electrometer Figure 1-7 Connections for ohms verification (2T Ω –200T Ω ranges) Metal Test...

  • Page 28: Temperature Verification

    CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Input LO Model 6517 Electrometer Model 2001 DMM Figure 1-9 Connections for voltage source verification...

  • Page 29: Humidity Verification

    CAUTION: Thermocouple Wire FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Model 6517 Electrometer Type K Thermocouple Simulator/Calibrator Figure 1-10 Connections for temperature verification 1.12 Humidity verification...
  • Page 30 CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Output LO Model 6517 Electrometer DC Voltage Calibrator Figure 1-11 Connections for humidity verification 1-17...

  • Page 31: Calibration

    Calibration Introduction Warm-up period: Discusses the length of time the Model 6517A should be allowed to warm up before This section gives detailed procedures for calibrating the calibration. Model 6517A. Basically, there are four parts to the compre- Line power: States the power line voltage limits when hensive calibration procedure: calibrating the unit.

  • Page 32: Environmental Conditions

    Calibration Environmental conditions Recommended calibration equipment Voltage and 20µA-20mA current calibration procedures Table 2-1 summarizes test equipment recommended for cal- should be performed at an ambient temperature of 23° ±5°C, ibrating the various Model 6517A functions. Alternate and at a relative humidity of less than 70% unless otherwise equipment may be used as long as that equipment has speci- noted.

  • Page 33: Table

    ±5ppm basic uncertainty DC Voltage: 1.9V: ±7ppm 19V: ±5ppm 190V: ±7ppm DC current: 19µA: ±576ppm 190µA: ±103ppm 1.9mA: ±55ppm 19mA: ±55ppm 100M Ω Keithley 5156 Electrometer Calibration Standard 1G Ω 10G Ω 100G Ω 100nF Keithley 2001 Multimeter 1000V range: ±47ppm 200V range: ±41ppm...

  • Page 34: Calibration Lock

    Calibration Calibration lock 2.7.2 IEEE-488 bus error reporting You can detect errors over the bus by testing the state of EAV 2.6.1 Unlocking calibration (Error Available) bit (bit 2) in the status byte. (Use the *STB? Before performing calibration, you must first unlock calibra- query or serial polling to request the status byte.) If you wish tion by momentarily pressing in on the recessed CAL switch.

  • Page 35: Table

    Calibration Table 2-2 Front panel calibration summary Step Description Equipment/connections Warm-up, unlock calibration None Offset voltage adjustment Triax shorting cap to INPUT jack Bias current adjustment Triax shielding cap to INPUT Zero voltage calibration Triax short to INPUT +2V calibration Voltage calibrator to INPUT -2V calibration Voltage calibrator to INPUT...

  • Page 36: Front Panel Calibration Procedure

    Calibration Table 2-2 Front panel calibration summary (cont.) Step Description Equipment/connections -100V voltage source calibration DMM to V SOURCE OUT 0V 1000V range voltage source cal DMM to V SOURCE OUT 400V voltage source calibration DMM to V SOURCE OUT 1000V voltage source calibration DMM to V SOURCE OUT -1000V voltage source calibration...

  • Page 37: Figure 2-1 Calibration Unit Connections

    Digital I/O Digital Cable (Supplied with 5156) Connector Caution: Do not connect any equipment except Model 5156 Calibration Standard to Model 6517 DIGITAL I/O port during calibration. Figure 2-1 Calibration unit connections Step 3: Volts Calibration Step 2: Offset Calibration 1.

  • Page 38: Volts Calibration Summary

    CAUTION: CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. BNC-to-dual Model 6517 Electrometer Banana Plug DC Voltage Calibrator Adapter (Connect Cable Shield to...

  • Page 39: Figure 2-3 Connections For 20Pa–2Μa Range Calibration

    Calibration DC Voltage Calibrator Model 6517 Electrometer WARNING: WARNING: NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. 1010V PEAK BNC-to-dual MADE SELECTED LINE VOLTAGE U.S.A. Banana Plug 90-110V 180-220V PREAMP OUT...

  • Page 40: Amps Calibration Summary (20Pa-2Μa Ranges)

    FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. BNC-to-dual Banana Plug Model 6517 Electrometer Adapter (Connect DC Current Calibrator Cable Shield to Output LO) Figure 2-4 Connections for 20µA–20mA range calibration...

  • Page 41: Figure 2-5 Connections For Coulombs Calibration

    Calibration DC Voltage Calibrator Model 6517 Electrometer WARNING: WARNING: NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY. 1010V PEAK MADE SELECTED LINE VOLTAGE U.S.A. 90-110V 180-220V PREAMP OUT COMMON 2V ANALOG...

  • Page 42: Coulombs Calibration Summary

    Thermocouple Wire CAUTION: CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Model 6517 Electrometer Type K Thermocouple Simulator/Calibrator Figure 2-6 Connections for temperature calibration...

  • Page 43: Voltage Source Calibration Summary

    CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Input LO Model 6517 Electrometer Model 2001 DMM Figure 2-7 Connections for voltage source calibration...

  • Page 44: Humidity Calibration Summary

    CAUTION: CAUTION: FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING. Model 6517 Electrometer Output LO DC Voltage Calibrator Figure 2-8 Connections for humidity calibration...

  • Page 45: Ieee-488 Bus Calibration

    :CAL:UNPR:VOFF computer using a shielded IEEE-488 cable such as the Wait until the instrument completes this step before con- Keithley Model 7007. tinuing. (See paragraph 3.9.) 2. Connect the calibration standard to the Model 6517A 3. Disconnect the triax shorting cap from the INPUT jack, DIGITAL I/O jack (see Figure 2-1).

  • Page 46: Ieee-488 Bus Volts Function Calibration Summary

    Calibration Step 4: Volts Calibration 5. Send the following command to the instrument: Perform the steps below to calibrate the Model 6517A volts :CAL:PROT:V2 1.9 function. Table 2-10 summarizes these steps. NOTE 1. Remove the triax shielding cap from the INPUT jack, If you are using calibration values other and connect the DC voltage calibrator to the INPUT than those given, be sure to change...
  • Page 47 Calibration Step 5: Amps Calibration 6. Repeat steps 4 and 5 for the 200pA through 2µA ranges using the calibration values summarized in Table 2-11. Perform the following steps to calibrate the amps function. For each step, be sure to connect the appropriate resis- Table 2-11 and Table 2-12 summarize these steps.

  • Page 48: Ieee-488 Bus Amps Calibration Summary (20Pa-2Μa Ranges)

    Calibration Table 2-11 IEEE-488 bus amps calibration summary (20pA-2µA ranges) Calibration Resistance Nominal voltage standard current Calibration command Triax cap 100GΩ :CAL:PROT:AZERO20P Triax cap 10GΩ :CAL:PROT:AZERO200P Triax cap 1GΩ :CAL:PROT:AZERO2N Triax cap 100MΩ :CAL:PROT:AZERO20N Triax cap 100MΩ :CAL:PROT:AZERO200N Triax cap 100MΩ...

  • Page 49: Ieee-488 Bus Coulombs Calibration Summary

    Calibration Step 6: Coulombs Calibration 6. Set the calibrator output voltage to -1.900000V, then send: Perform the steps below to calibrate the coulombs function over the bus. Table 2-13 summarizes the necessary steps. :CAL:PROT:CN2NCARD -1.9 7. Repeat steps 3 to 6 for the remaining coulombs calibra- 1.

  • Page 50: Ieee-488 Bus Voltage Source Calibration Summary

    Calibration Step 8: Voltage Source Calibration 5. After settling, note the DMM reading, then send the actual DMM reading as a numeric parameter included Perform the steps below to calibrate the Model 6517A volt- with the following command: age source. Table 2-14 summarizes these steps. :CAL:PROT:VSRCZ100 <DMM_reading>...

  • Page 51: Single-Point Calibration

    Calibration 2.10 Single-point calibration Step 9: Humidity Calibration Perform the steps below to calibrate the Model 6517A Normally, the complete comprehensive calibration proce- humidity function. These steps are summarized in Table dure should be performed to ensure that the entire instrument 2-15.

  • Page 52: Ieee-488 Bus Single-Point Calibration

    Calibration 1. Turn on the Model 6517A, and allow the instrument to calibration commands. Keep in mind that all commands for warm up for at least one hour before performing a given range or function must be sent in order to completely calibration.

  • Page 53: Programming Calibration Dates

    Calibration Here, <yr> is the year (1994-2093), <mon> is the month 2. Select CAL, then press ENTER. The following options (1-12), and <date> can have any value between 1 and 31. will be displayed: 11. Send the following command to save calibration PERFORM CALIBRATION constants: COMPREHENSIVE POINT-CALS...

  • Page 54: Calibration Command Reference

    Calibration Command Reference Introduction Temperature calibration commands: Discusses commands required to calibrate the temperature This section contains detailed information on the various function. Model 6517A IEEE-488 bus calibration commands. Section Humidity calibration commands: Covers commands 2 of this manual covers detailed calibration procedures. For used for calibrating the humidity function.

  • Page 55: Calibration Command Reference

    Calibration Command Reference Table 3-1 IEEE-488 bus calibration command summary Command Description CALibration: Calibration subsystem PROTected: Commands protected by CAL switch INITiate Required before performing ANY cal steps VZERO2 2V range zero step V2 <Nrf> +2V step VN2 <Nrf> -2V step VZERO20 20V range zero step V20 <Nrf>...

  • Page 56: Table

    Calibration Command Reference Table 3-1 IEEE-488 bus calibration command summary (cont.) Command Description CALibration: PROTected: AZERO2M 2mA range zero step A2M <Nrf> +2mA step AN2M <Nrf> -2mA step AZERO20M 2mA range zero step A20M <Nrf> +20mA step AN20M <Nrf> -20mA step CZEROA2N 2nC range zero check part A C2N <Nrf>...
  • Page 57 Calibration Command Reference Table 3-1 IEEE-488 bus calibration command summary (cont.) Command Description CALibration: PROTected: VSET1000 Set voltage source to +1000V VSRC1000 <Nrf> Voltage source +1000 V cal VSETN1000 Set voltage source to -1000 V VSRCN1000 <Nrf> Voltage source -1000 V cal HUMZERO Humidity input 0 V step HUM05...

  • Page 58: Miscellaneous Commands

    Calibration Command Reference Miscellaneous commands Miscellaneous commands are those commands that have such functions as initiating calibration, saving calibration constants, locking out calibration, and programming date parameters. 3.3.1 :INIT (:CALibration:PROTected:INITiate) Purpose To initiate calibration. Format :cal:prot:init Parameter None Description The :INIT command enables Model 6517A calibration when performing these procedures over the bus.

  • Page 59: Save (:Calibration:protected:save)

    Calibration Command Reference 3.3.3 :SWITch? (:CALibration:PROTected:SWITch?) Purpose To read calibration lock status. Format :cal:prot:swit? Response Calibration locked Calibration unlocked. Description The :SWITch? query requests status from the Model 6517A on calibration locked/unlocked state. Calibration must be unlocked by pressing in on the CAL switch while power is turned on before calibration can be performed.

  • Page 60: Date (:Calibration:protected:date)

    Calibration Command Reference 3.3.5 :DATE (:CALibration:PROTected:DATE) Purpose To send the calibration date to the instrument. Format :cal:prot:date <yr>, <mon>, <day> Parameters <yr> = year (yyyy, 1994 to 2093) <mon> = month (mm, 1 to 12) <day> = day of month (dd, 1 to 31) Query Format :cal:prot:date? Response...

  • Page 61: Caltemp (:Calibration:protected:caltemp)

    Calibration Command Reference 3.3.7 :DATA? (:CALibration:PROTected:DATA?) Purpose To download calibration constants from the Model 6517A. Format :cal:prot:data? Response <Cal_1>,<Cal_2>,...<Cal_n> Description The :DATA? query allows you to request calibration constants stored in EEROM from the instrument. This command can be used to compare present constants with those from a previous calibration procedure to verify that calibration was performed properly.

  • Page 62: Meter Commands

    Calibration Command Reference Meter commands Meter commands include those necessary to null offsets and calibrate the volts, amps, and coulombs measurement functions. 3.4.1 Offset commands :VOFF (:CALibration:UNPRotected:VOFFset) Purpose To null voltage offsets. Format :cal:unpr:voff Parameter None Description The :VOFF command performs voltage offset calibration and is normally used as part of the cal- ibration procedure.

  • Page 63: Volts Function Calibration Commands

    Calibration Command Reference 3.4.2 Volts function calibration commands Purpose To calibrate voltage function ranges. Format See Table 3-2. Parameter See Table 3-2. Table 3-2 Volts function calibration commands and parameters Range Command format* <Cal_voltage> parameter limits (V) :cal:prot:vzero2 None :cal:prot:v2 <Cal_voltage> 0.95 to 2.05 :cal:prot:vn2 <Cal_voltage>...

  • Page 64: Amps Calibration Commands

    Calibration Command Reference 3.4.3 Amps calibration commands Purpose To calibrate amps function ranges. Format See Tables 3-3 and 3-4. Parameter See Tables 3-3 and 3-4. Table 3-3 Amps function calibration commands and parameters (all ranges, without calibration standard) Range Command format* <Cal_current>...

  • Page 65: Table 3-4 Amps Function Calibration Commands And Parameters (20Pa-2Μa Ranges, Using Calibration Standard)

    Calibration Command Reference Table 3-4 Amps function calibration commands and parameters (20pA-2µA ranges, using calibration standard) Range Command format* <Cal_voltage> parameter limits (V) 20pA :cal:prot:azero20p None :cal:prot:a20pcard <Cal_voltage> 0.95 to 2.05 :cal:prot:an20pcard <Cal_voltage> -0.95 to -2.05 200pA :cal:prot:azero200p None :cal:prot:a200pcard <Cal_voltage> 0.95 to 2.05 :cal:prot:an200pcard <Cal_voltage>...

  • Page 66: Coulombs Calibration Commands

    Calibration Command Reference 3.4.4 Coulombs calibration commands Purpose To calibrate coulombs function ranges. Format See Tables 3-5 and 3-6. Parameter See Tables 3-5 and 3-6. Table 3-5 Coulombs function calibration commands and parameters (without calibration standard) Range Command format* <Cal_charge> parameter limits (Q) :cal:prot:czeroa2n None :cal:prot:c2n <Cal_charge>...

  • Page 67: Coulombs Function Calibration Commands And Parameters (Using Calibration Standard)

    Calibration Command Reference Table 3-6 Coulombs function calibration commands and parameters (using calibration standard) Range Command format* <Cal_voltage> parameter limits (V) :cal:prot:czeroa2n None :cal:prot:c2ncard <Cal_voltage> 0.95 to 2.05 :cal:prot:czerob2n None :cal:prot:cn2ncard <Cal_voltage> -0.95 to -2.05 20nC :cal:prot:czeroa20n None :cal:prot:c20ncard <Cal_voltage> 9.5 to 20.5 :cal:prot:czerob20n None...

  • Page 68: Voltage Source Calibration Commands

    Calibration Command Reference Voltage source calibration commands Purpose To calibrate the Model 6517A voltage source. Format See Table 3-7. Parameter See Table 3-7. Description The :V commands calibrate the Model 6517A voltage source. Each calibration point uses two commands. First, the :VSET command is used to program the voltage source for a specific out- put voltage.

  • Page 69: Temperature Calibration Commands

    Calibration Command Reference Temperature calibration commands Purpose To calibrate the temperature function. Format 0mV (0°C) cal point :cal:prot:tzero 4.095mV (100°C) cal point :cal:prot:t100 Parameter None Description The :T commands calibrate the Model 6517A temperature function. The only two temperature calibration points correspond to 0mV input and 4.095mV input respectively. A suitable refer- ence junction compensated type K thermocouple calibrator is required for calibration.

  • Page 70: Calibration Errors

    Calibration Command Reference Calibration errors 3.8.1 Error query commands Purpose To request calibration errors over the bus. Format Request cal execution error status :cal:prot:eerr? Request voltage function cal errors :cal:prot:verr? Request current function cal errors :cal:prot:aerr? Request charge function cal errors :cal:prot:cerr? Request temperature function cal errors :cal:prot:terr?

  • Page 71: Detecting Calibration Errors

    Calibration Command Reference 3.8.2 Detecting calibration errors 2. When MAV is set, a message is available in the output queue, and you can read the output queue and test for an If an error occurs during any calibration step, the Model ASCII 1.

  • Page 72: Routine Maintenance

    1. Insert a flat-bladed screwdriver into the slot of the fuse carrier. Firmware updates: Recommends a course of action for firmware updates provided by Keithley. 2. While pushing in, turn the screwdriver counterclock- wise until the spring-loaded fuse carrier releases from the fuse holder.

  • Page 73: Input Connector Cleaning

    Table 4-1 Power line fuse It is possible that you may receive a firmware update from Keithley Keithley to enhance operation. The firmware for the main Line voltage Rating part no. microprocessor is contained in two ROMs (U637 and U638)

  • Page 74: Troubleshooting

    For units that are out of warranty, com- pletely assembled PC boards can be This section is arranged as follows: ordered from Keithley to facilitate repairs. Repair considerations: Covers some considerations that should be noted before making any repairs to the 1.

  • Page 75: Power-On Test

    Perform the following steps to run the display test: ating principles for each major circuit section of the Model 6517. Figure 5-1 shows an overall block diagram of the 1. Display the MAIN MENU by pressing the MENU key.

  • Page 76: Figure 5-1 Model 6517A Overall Block Diagram

    Troubleshooting Figure 5-1 Model 6517A overall block diagram...

  • Page 77: Display Board

    Troubleshooting 5.5.1 Display board The display uses a common multiplexing scheme with each character refreshed in sequence. U903 and U904 are the grid The following information provides some basic circuit the- drivers, while U901 and U905 are the dot drivers. Note that ory that can be used as an aid to troubleshoot the display and dot driver and grid driver data is serially transmitted from the keyboard.

  • Page 78: Figure 5-3 Power Supply Block Diagram

    Troubleshooting +5V K CR306 C305,C308 Q305 K Common AC In Fuse +12V K CR307 F101 C306, C307 K Common C309, C310 U301, U302 -12V K Power Switch S101 +5V B CR403 C405, C407 B GND C408, C422 Q401, U408 -5V B Selection Switch S102...

  • Page 79: Digital Board

    Troubleshooting Line power circuits Memory circuits AC power is applied to the AC receptacle J1001 through the ROMs U637 and U638 store the code for instrument opera- fuse F101, line switch S101, and line voltage selection tion. U637 stores the D0-D7 bits of each word, and U638 switch S103 to the power transformer T1.

  • Page 80: Analog Board

    Troubleshooting U637, U638 U635, U636 Serial Reset RS-232 Interface Interface U639 U641 NVRAM GPIB Microprocessor U634 - U640 U621 - U623 U631 IEEE - 488 Interface Control/Data A/D Interface U614 To Display Board Controller 16MHz Y602 Voltage Source Trigger, Control Trigger/ Digital I/O Digital I/O...

  • Page 81: Figure 5-5 Analog Board Block Diagram

    Troubleshooting Range/Function Switching K401, K402, K405 K406, K411, K412 Preamp Zero Check Input K416, K417 Output Stage Prescaler U214 Multiplexer U405 Q402 - Q413 U215 Converter U211, U212 Input Stage +220V Analog U209 Output Input Amplifier Thermocouple Thermocouple Input U401 U402 U504 Offset...
  • Page 82 Troubleshooting converted into parallel data by U403 and U404, and fed to a 12-bit DAC, U407. After the digital-to-analog conversion process, offset signals are buffered by U401 and U402 and applied to appropriate nodes of the preamplifier input stage OUT = to null offsets.

  • Page 83: Circuit Board Checks

    Troubleshooting Voltage source Voltage source ranging is provided by selecting feedback resistor values with elements of U312. Approximate voltage The various voltage source circuits include the digital inter- gain on the 100V range is × 20.5, while the 1000V range gain face, the DAC, range control, and the power output stage.

  • Page 84: Power Supply Checks

    Troubleshooting 5.6.2 Power supply checks Power supply problems can be checked out using Table 5-3. Drawing reference: Analog Board; 6517-100 WARNING Some power supply voltages are hazard- ous. Use caution to avoid electrical shock that may result in personal injury or death.

  • Page 85: Digital Board Checks

    Troubleshooting 5.6.3 Digital board checks Table 5-4 summarizes checks for the digital board. Drawing reference: Digital board; 6517-140 Table 5-4 Digital board checks Step Item/component Required condition Remarks Power-on test RAM OK, ROM OK. Verify that RAM and ROM are functional.

  • Page 86: Analog Board Checks

    Circuit checks for the analog board are summarized in Table cern hazardous voltages. Use caution to 5-5. avoid electric shock that may result in Drawing reference: Analog Board; 6517-100 personal injury or death. Table 5-5 Analog board checks Step Item/component...
  • Page 87 Troubleshooting Table 5-5 Analog board checks (cont.) Step Item/component Required condition Remarks 2V ANALOG OUTPUT Referenced to COMMON. Front panel controls Coulombs function, 20nC range, zero check off. Initial test conditions. INPUT jack Apply 20nC charge. Input test charge. PREAMP OUT +20V Referenced to COMMON.

  • Page 88: Disassembly

    Disassembly Introduction Instrument re-assembly: Provides some general guidelines to follow when re-assembling the Model The information in this section explains how to disassemble 6517A. the Model 6517A. Also discussed are handling and cleaning Assembly drawings: Provides mechanical drawings considerations as well as the procedure to change the main to assist in the disassembly and re-assembly of the CPU firmware in the event of an upgrade.

  • Page 89: Solder Repairs

    Disassembly 6.2.2 Solder repairs Case cover removal Observe the following precautions when it is necessary to If it is necessary to troubleshoot the instrument or to replace use solder on a circuit board: a component, use the following procedure to remove the case cover.

  • Page 90: Digital Board Removal

    The digital board is removed through the bottom of the chas- retaining clip away and lift the board up until it clears sis (see drawing 6517-053). Note that the power switch push- the clip. With the board clear of the retaining clip, rod need not be removed in order to remove the digital board.

  • Page 91: Front Panel Disassembly

    U638) located on the digital board. (See the digital board board to the chassis. component layout drawing 6517-140 at the end of Section 8. Remove analog board: The board is held in place by edge guides on each side of the chassis. Slide the analog Perform the following steps to replace the CPU firmware:...

  • Page 92: Instrument Re-Assembly

    U637, and the even-addressed ROM disassembly and re-assembly of the instrument. Also, the must be installed at U638. The instrument Keithley part numbers for most mechanical parts are will not operate if the ROMs are incor- provided in these drawings.

  • Page 93: Replaceable Parts

    Introduction Factory service This section contains replacement parts information and If the instrument is to be returned to Keithley Instruments for component layout drawings for the Model 6517A. repair, perform the following: 1. Call the Repair Department at 1-800-552-1115 for a Return Material Authorization (RMA) number.
  • Page 94 Replaceable Parts...

  • Page 95: Table

    Replaceable Parts Table 7-1 Model 6517A ADC board, parts list Keithley part Circuit designation Description number ADC ASSEMBLY 2001-160 CHOKE 21-030-J CH-55 DIODE, ZENER 6.4V, IN4579 (DO-7) DZ-73-1 PROGRAM 2001-802* SOCKET, 68-PIN QUAD SO-128-68 C800-803,807,809,815,819,820 CAP, .1UF, 20%, 50V, CERAMIC (1206) C-418-.1...

  • Page 96: Table

    Replaceable Parts Table 7-1 Model 6517A ADC board, parts list (cont.) Keithley part Circuit designation Description number R840 RES, 40K, .1%, 1/10W, METAL FILM R-263-40K R841 RES, 57.8K, .1%, 1/10W, METAL FILM R-263-57.8K R842 RES, 920K, .1%, 1/10W, METAL FILM...

  • Page 97: Model 6517A Display Board, Parts List

    Replaceable Parts Table 7-2 Model 6517A display board, parts list Keithley part Circuit designation Description number BUMPER FE-27A CLIP, GROUND 2001-352B DISPLAY BOARD ASSEMBLY 2002-110 TAPE, 3/4 WIDE X 1/32 THICK TP-12-1 C901 CAP, 22UF, 20%, 6.3, TANTALUM (C6032) C-417-22 C902,904,907,908,910 CAP, .1UF, 20%, 100V, CERAMIC (1812)

  • Page 98: Model 6517A Analog Board, Parts List

    Replaceable Parts Table 7-3 Model 6517A analog board, parts list Keithley part Circuit designation Description number ANALOG ASSEMBLY 6517-100 FUSE HOLDER FH-32 HEAT SINK 6517-329A HEAT SINK HS-33 LATCHING HEADER, FRICTION, SINGLE ROW CS-724-10 LATCHING HEADER, FRICTION, SINGLE ROW CS-724-12...

  • Page 99: Table

    Replaceable Parts Table 7-3 Model 6517A analog board, parts list (cont.) Keithley part Circuit designation Description number F101 FUSE, .5A, 250V FU-71 F201 FUSE FU-100-1 J1002 CONN, MOLEX, 3-PIN CS-772-3 J1010 CONNECTOR TEMPERATURE CS-823 J1011 CONN, 6 PIN CIRCULAR DIN...
  • Page 100 Replaceable Parts Table 7-3 Model 6517A analog board, parts list (cont.) Keithley part Circuit designation Description number R301,302,424,425,510,513 RES, 200K, 5%, 250MW, METAL FILM (1210) R-376-200K R303,306,310,321 RES, 2.21K, 1%, 100MW, THICK FILM (0805) R-418-2.21K R304,308,314,316,441,463 RES, 4.02K, 1%, 100MW, THICK FILM (0805) R-418-4.02K...
  • Page 101 Replaceable Parts Table 7-3 Model 6517A analog board, parts list (cont.) Keithley part Circuit designation Description number S101 SWITCH, PUSHBUTTON (6 POLE) SW-466 S103 SWITCH, SLIDE (DPDT) SW-476 U201,304,410 IC, 8-BIT SERIAL-IN LATCH DRIVER, 5841A IC-536 U202,305,306,403,404 IC, 8 STAGE SHIFT/STORE REGISTER, 4094...

  • Page 102: Model 6517A Digital Board, Parts List

    Replaceable Parts Table 7-4 Model 6517A digital board, parts list Keithley part Circuit designation Description number BATTERY HOLDER FOR BT1 BH-34 DIGITAL ASSEMBLY 6517-140 SOCKET, 32 PIN FOR U637 AND U638 SO-103-32 CR603,605,607,609-618, 635-642 DIODE, SWITCHING, 250MA, BAV103 (SOD-80) RF-89...
  • Page 103 Replaceable Parts Table 7-4 Model 6517A digital board, parts list (cont.) Keithley part Circuit designation Description number U612 IC, 350MA SATURATED SINK DRIVER UDN-2596A IC-578 U614 IC, OCT BFR/LINE DRIVE, 74HCT244 (SOLIC) IC-651 U615,630 IC, QUAD 2 IN NOR, 74HCT02 (SOIC)

  • Page 104: Model 6517A Mechanical Board, Parts List

    Replaceable Parts Table 7-5 Model 6517A mechanical board, parts list Keithley part Circuit designation Description number .020 VINYL STOCK BEZEL, REAR 428-303D CARD GUIDE, LONG 2001-315A CARD GUIDE, SHORT 2001-316A CHASSIS ASSEMBLY 6517-305B CLIP, REGULATOR 6517-324A COLLAR 6517-323A CONDUCTIVE RUBBER SWITCH...

  • Page 105: Model 6517A Miscellaneous Parts List

    Replaceable Parts Table 7-5 Model 6517A mechanical board, parts list (cont.) Keithley part Circuit designation Description number DS301 LED, HIGH POWER PL-94 J1001 CONN, AC RECEPTACLE (LINE FILTER) LF-6-1 J1003 CONNECTOR TRIAX CS-630 J1004 BINDING POST, YELLOW BP-11-7 J1005 BINDING POST, BLACK...

  • Page 106: Calibration Messages

    Calibration Messages Introduction Error summary This appendix lists error query commands, errors that may Table B-1 lists Model 6517A calibration error queries, and occur during calibration, summarizes Table B-2 summarizes Model 6517A calibration errors. The :CAL:PROT:DATA? query response messages. errors listed in Table B-1 may be requested with the :SYSTem:ERRor? query, while responses to error queries listed in Table B-2 are shown in Figure B-1 through Figure B-8.

  • Page 107: Table

    Calibration Messages Table B-1 Calibration error responses Error number Message Description Volts Function Errors +350 “2V offset out of spec” 2V range offset error +351 “2V pgain out of spec” 2V range positive slope error +352 “2V ngain out of spec” 2V range negative slope error +353 “20V offset out of spec”...

  • Page 108: Table

    Calibration Messages Table B-1 Calibration error responses (cont.) Error number Message Description Charge Function Errors (cont.) +394 “200nC ngain out of spec” 200nC range negative slope error +395 “2uC pgain out of spec” 2µC range positive slope error +396 “2uC ngain out of spec” 2µC range negative slope error Temperature Function Errors +399...

  • Page 109: Calibration Error Query Commands

    Calibration Messages Table B-2 Calibration error query commands Error number Message Figure :CALibration: UNPRotected: EERR? Request cal execution error status VERR? Request voltage function cal errors AERR? Request current function cal errors CERR? Request charge function cal errors TERR? Request temperature function cal errors HERR? Request humidity function cal errors SERR?

  • Page 110: Table

    Calibration Messages Table B-3 Table B-3 Calibration constants returned by :CAL:PROT:DATA? Calibration constants returned by :CAL:PROT:DATA? query query (cont.) Order Calibration constant description Order Calibration constant description Volts function 2V range zero offset Coulombs function 20nC range positive slope Volts function 2V range positive slope Coulombs function 20nC range negative slope Volts function 2V range negative slope Coulombs function 200nC range zero check A...

  • Page 111: Figure B-1 Eerr? Query Response (Calibration Execution Errors)

    Calibration Messages X X X X X X X X X X X X X X X X X X X X X X X X X X X X X CAL DATA INVALID CAL DATE SET CAL NDUE SET Figure B-1 EERR? query response (calibration execution errors) X X X X X X X X X X X X X X X X X X X X X X X...

  • Page 112: Figure B-4 Cerr? Query Response (Coulombs Function Cal Errors)

    Calibration Messages X X X X X X X X X X X X X X X X X X X X X X X X 2nC pgain out of spec 2nC ngain out of spec 20nC pgain out of spec 20nC ngain out of spec 200nC pgain out of spec 200nC ngain out of spec...

  • Page 113: Calibration Command Summary

    Calibration Command Summary Table C-1 Calibration commands Command Description CALibration: Calibration subsystem PROTected: Commands protected by CAL switch INITiate Required before performing ANY cal steps VZERO2 2V range zero step V2 <Nrf> +2V step VN2 <Nrf> -2V step VZERO20 20V range zero step V20 <Nrf>...

  • Page 114: Calibration Commands

    Calibration Command Summary Table C-1 Calibration commands (cont.) Command Description CALibration: PROTected: AN20N <Nrf> -20nA step AN20NCARD <Nrf> -20nA step (using cal standard) AZERO200N 200nA range zero step A200N <Nrf> +200nA step A200NCARD <Nrf> +200nA step (using cal standard) AN200N <Nrf> -200nA step AN200NCARD <Nrf>...
  • Page 115 Calibration Command Summary Table C-1 Calibration commands (cont.) Command Description CALibration: PROTected: TZERO 0mV (0°C) temperature step T100 +4.095mV (100°C) temperature step VSETZ100 Set voltage source to 0V for next command VSRCZ100 <Nrf> Voltage source 100V range 0V cal VSETZ1000 Set voltage source to 0V for next command VSRCZ1000 <Nrf>...
  • Page 116 Index Numerics Character set test 5-2 Circuit board checks 5-10 Command summary 3-1 2G Ω -200G Ω range verification 1-13 Generating an SRQ on calibration com- Component layouts 7-1 2M Ω -200M Ω range verification 1-11 plete 3-18 Coulombs calibration commands 3-13 2T Ω...
  • Page 117 Power supply circuits 5-7 Power-on test 5-2 Prescaler 5-9 Main CPU firmware replacement 6-4 Temperature and humidity circuits 5-9 Principles of operation 5-2 Memory circuits 5-6 Temperature calibration commands 3-16 Programming calibration dates 2-23 Meter commands 3-9 Temperature verification 1-15 Meter performance verification equipment Temperature verification equipment 1-3 Trigger and digital I/O circuits 5-6...
  • Page 118 Service Form Model No. Serial No. Date Name and Telephone No. Company List all control settings, describe problem and check boxes that apply to problem. Intermittent Analog output follows display Particular range or function bad; specify IEEE failure Obvious problem on power-up Batteries and fuses are OK Front panel operational All ranges or functions are bad...
  • Page 119 Keithley Instruments, Inc. 28775 Aurora Road Cleveland, Ohio 44139 Printed in the U.S.A.

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