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Teledyne API – Model T700 Dynamic Dilution Calibrator
7.2. CALIBRATING THE OUTPUT OF THE T700'S MFC'S
CAL
POINT
0
1
2
3
4
5
6
7
8
9
10
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16
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18
19
20
06873E DCN7106
In the displays associated with the FLOW > STAT submenu:
The numbers after "F=" are the flow.
The first number is the target flow.
The second is the actual flow.
The number after "P=" is pressure in PSIG.
If an MFC is off, its flows are displayed as OFF.
A table exists in the memory of the T700‟s for each MFC that sets the output of the
MFC at each of 20 equally spaced control points along its entire performance range.
This table may be accesses via the DIAG > MFC CONFIGURATION submenu (see
Section 7.2.2).
For each calibration point, the following is displayed:
The drive voltage in 20 equal, incremental steps from 0 mVDC to 5000 mVDC;
The expected flow rate corresponding to each drive voltage point (each equal
to1/20th of the full scale for the selected mass flow controller).
This table can also be used to calibrate the output of the MFCs by adjusting either the
control voltage of a point or its associated flow output value (see Section 7.2.2).
Table 7-1: Examples of MFC Calibration Points
DRIVE
1.0 LPM
VOLTAGE
000 mV
0.000
250 mV
0.050
500 mV
0.100
750 mV
0.150
1000 mV
0.200
1250 mV
0.250
1500 mV
0.300
1750 mV
0.350
2000 mV
0.400
2250 mV
0.450
2500 mV
0.500
2750 mV
0.550
3000 mV
0.600
3250 mV
0.650
3500 mV
0.700
3750 mV
0.750
4000 mV
0.800
4250 mV
0.850
4500 mV
0.900
4750 mV
0.950
5000 mV
1.000
MFC FULL SCALE
3.0 LPM
5.0 LPM
MFC TARGET OUTPUT
0.000
0.000
0.150
0.250
0.300
0.500
0.450
0.750
0.600
1.000
0.750
1.250
0.900
1.500
1.050
1.750
1.200
2.000
1.350
2.250
1.500
2.500
1.650
2.750
1.800
3.000
1.950
3.250
2.100
3.500
2.250
3.750
2.400
4.000
2.550
4.250
2.700
4.500
2.850
4.750
3.000
5.000
Calibration and Verification
10.0 LPM
0.000
0.500
1.000
1.500
2.000
2.500
3.000
3.500
4.000
4.500
5.000
5.500
6.000
6.500
7.000
7.500
8.000
8.500
9.000
9.500
10.000
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