Connecting To Semiconductor Equipment; Connecting To Power; Emergency Off Circuit (Emo Circuit) - Edwards STP-XF1303 Series Instruction Manual

3.7

Connecting to semiconductor equipment

3
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when designing the semiconductor equipment.
3.7.1

Connecting to power

The STC-U receives its power from the semiconductor equipment electrical distribution system via a
circuit breaker (rated current 15 A).
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main disconnect device or
circuit breaker of the semiconductor equipment, thereby removing power from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated for at least 10,000
A symmetrical amperes interrupting capacity (AIC).
rms
3.7.2

Emergency off circuit (EMO circuit)

Activation of EMO circuit of the equipment will interrupt electrical power from the STC-U and STP
control unit.
When the power is shut off, the STP pump performs the same as a power failure. (After backup
operation of a power failure, the rotor lands on the touch down bearing)
Consider the following when establishing the EMO circuit.
Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump
when the EMO circuit operates (example: shut the valve). When atmosphere is introduced into the
The STP pump rotates for a while after the EMO circuit shuts off the power. Perform a recovery
Before performing the operation check of the EMO circuit with regular maintenance, stop the STP
Note : Procure the main disconnect device and the EMO circuit at your company.
Use the main disconnect device which is lockable only in the de-energised position.
Locate the main disconnect device and the EMO button in the place where personnel are
readily accessible and are not exposed to any hazards during operation.
MT-92E-A01-C
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STC-U eTMS unit
STP pump, the touch down bearing may not operate normally.
operation after the STP pump has stopped completely.
pump to prevent damage to the touch down bearing.
CAUTION
CAUTION
CAUTION