Sign In
Upload
Manuals
Brands
Edwards Manuals
Water Pump
STP-L301 Series
Edwards STP-L301 Series Manuals
Manuals and User Guides for Edwards STP-L301 Series. We have
2
Edwards STP-L301 Series manuals available for free PDF download: Instruction Manual
Edwards STP-L301 Series Instruction Manual (120 pages)
Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.5 MB
Table of Contents
Limited Warranty
9
Table of Contents
11
Precautions for Safe Operation of the STP Pump
17
Usable Gases
17
Precautions on Maintenance and Inspection
17
Labels
18
Operation Principle of the STP Pump
21
Figure2.1 Cross Sectional View of the STP Pump
22
Unpacking
23
Unpacking the STP Pump and the STP Control Unit
23
Accessories
23
Table 3.1 Accessories
23
Table 3.2 Accessories for Chemical Specific Pump (Type C)
23
Installation of the STP Pump
25
Name and Function of each Part
25
Figure 4.1 Configuration of the STP Pump
26
Precautions before Installation
27
Operating Environment
27
Installation Area
28
Bench
28
How to Install the STP Pump
29
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
29
Cleaning the Seal
30
STP Pump Installation Positions
31
Figure 4.3 STP Pump Installation Positions
31
How to Secure the STP Pump
32
Table 4.1 Tightening Torque of Bolt
32
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
33
Figure 4.5 Example of Securing the STP Pump
33
When Securing the Inlet Port with Bolts
33
Table 4.3 Number of Claw Clamps by Size of Flange
34
Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
34
Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
35
Vacuum Piping
36
Connecting the Ground Cable
37
Connecting the Purge Port (for the Chemical Specific Pump, Type C)
38
Figure 4.8 Connecting the Purge Port
38
Baking, Cooling the STP Pump and Gas Pumping
39
Baking the STP Pump
39
Attaching a Baking Heater
39
Cooling the STP Pump
40
Water Cooling Method
40
Air Cooling Method
41
Gas Suction
42
How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]
42
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
43
Installation of the STP Control Unit
45
Name and Function of each Part
45
Front Panel
45
Figure 6.1 STP Control Unit Front Panel
46
Rear Panel
47
Figure 6.2 STP Control Unit Rear Panel
48
Top Panel
49
Figure 6.3 STP Control Unit Top Panel
49
Side Panel (Left Side)
50
Figure 6.4 STP Control Unit Side Panel (Left Side)
50
Precautions before Installation
51
Operating Environment
51
Insulation Test
51
Installation Area
52
Figure 6.5 Peripheral Spaces of the STP Control Unit
52
Attaching the STP Control Unit Front Panel to a Rack
53
Figure 6.6 Example of Securing the STP Control Unit
53
Cable Connection
54
Name and Dimensions of each Cable
54
Figure 6.7 External Dimensions of Ground Cable
54
Figure 6.8 External Dimensions of STP Connection Cable
54
Figure 6.9 External Dimensions of STP Connection Cable
55
How to Connect the Cables
56
Table 6.1 Connecting the Power Cable
57
Figure 6.10 Connecting Method of the AC Power Cable
57
Figure 6.11 How to Secure the Power Cable
58
Connecting to Semiconductor Equipment
59
Connecting to Power
59
Emergency off Circuit (EMO Circuit)
59
How to Start/Stop the STP Pump
61
Before Starting
61
Start Procedures
62
Stop Procedures
62
Manual Operation
63
Powering on
63
Starting the STP Pump
63
Stopping the STP Pump
63
Starting the STP Pump after Stopping
64
Powering off
64
Starting the STP Pump after a Safety Function Operates
64
Remote Operation (I/O TB2)
65
Powering on
65
Starting/Stopping the STP Pump
65
Starting the STP Pump after Stopping
65
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)
65
Powering off
66
Starting the STP Pump after a Safety Function Operates
66
Table 7.2 Reset Operation During Remote Operation (I/O TB2)
66
Remote Operation (CON4: Optional Accessory)
67
Powering on
67
Starting/Stopping the STP Pump
67
Starting the STP Pump after Stopping
67
Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)
67
Powering off
68
Starting the STP Pump after a Safety Function Operates
68
Table 7.4 Reset Operation During Remote Operation (CON4)
68
Figure 7.1 STP Pump Operation Procedures
69
Remote Input/Output Signal Terminal Blocks
71
I/O TB1 Terminal Block
71
Table 8.1 I/O TB1 Terminal Block
71
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block
73
I/O TB2 Terminal Block
75
Table 8.4 I/O TB2 Terminal Block
75
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block
76
CON4 Connector (Optional Accessory)
77
Remote Input Signals
77
Table 8.5 CON4 Connector (Remote Input Signal)
77
Figure 8.3 CON4 Remote Input Signal Connector
78
Remote Output Signals
79
Table 8.7 con 4 Connector (Remote Output Signal)
79
Figure 8.4 CON4 Remote Output Signal Connector
80
Remote Cables (Optional Accessories)
81
Table 8.9 Remote Cable Connections (Single-Side Connector Type)
81
Adjustment Method
83
Tuning
83
Tuning Method
83
Figure 9.1 Tuning Procedures
84
Setting the Rated Speed
85
When Setting DSW-B No.1 to on under Power-ON State
85
When Setting DSW-B No.1 to on before Powering on
86
Figure 9.2 LCD Message in Rated Speed Setting Mode
87
10 Safety Functions
89
Table 10.1 States of Leds and REMOTE Output Signals at Power Failure
90
Table 10.2 Operations of the STP Pump after Power Recovery
90
Table 10.3 Safety Functions
92
Table 11.1 Error Messages
97
Table 11.2 Troubleshooting after Powering on
101
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
101
Table 11.4 Troubleshooting While the STP Pump Is Rotating
102
Table 11.5 Recommended Spare Parts
104
Table 11.6 Cleaning and Decontamination
105
Table 13.1 Specifications of the STP Pump
111
Figure 13.1 External Appearance of the STP Pump STP (STP-L301: ISO100)
112
Figure 13.2 External Appearance of the STP Pump (STP-L451: ISO160)
113
Figure 13.3 Label Affixing Position for the STP Pump
114
Table 13.2 Specifications of the STP Control Unit
115
Figure 13.4 External Appearance of the STP Control Unit
117
Figure 13.5 Label Affixing Positions for the STP Control Unit
118
Advertisement
Edwards STP-L301 Series Instruction Manual (63 pages)
Turbomolecular pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.47 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Operation Principle of the STP Pump
14
Temperature Management System
15
Name of the STP Pump
16
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36
Scu-800
36
Scu-801
36
Scu-1600/1601
37
Scu-1601
37
Cable Connection
38
STP Connection Cable
38
Power Cable
39
How to Connect the Cables
40
Operation
43
Before Starting the STP Pump
43
Tuning
43
Operation of Vacuum System
44
Pump Operation
44
LED Indication During Operation
44
Starting the STP Pump after a Safety Function Operates
45
Gas Pumping, Cooling and Baking the STP Pump
45
Gas Pumping
45
How to Introduce a Purge Gas
46
Cooling the STP Pump
46
Water-Cooling Method
46
Air-Cooling Method
47
Baking the STP Pump
47
How to Use the TMS Unit
48
Parameter Set Mode
48
Starting/Stopping the TMS Unit
48
Temperature Control
48
Safety Functions
49
Power Failure
49
Operation after a Power Recovery
49
Abnormal State of Magnetic Bearing
50
Excessive Vibration
50
Motor Driver Overload
50
Overheating Inside the STP Pump
50
Overheating Inside the STP Control Unit
51
Overspeed
51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)
51
Maintenance and Inspection
53
Cleaning
54
Inspecting the Deposit
54
Maintenance
55
Recommended Overhaul Intervals
55
Standard Replacement Parts
55
Recommended Maintenance Intervals for Main Parts
56
Transporting for Repair or Overhaul
57
Storage and Disposal
59
Storage of the STP Pump
59
Disposal
60
Service, Spares and Accessories
61
Introduction
61
Service
61
Spares
61
Accessories
62
Advertisement
Related Products
Edwards STP-L451 Series
Edwards STP-L301H
Edwards STP-L451H
Edwards STP-XH3203P Series
Edwards STP-XA2703C
Edwards STP-451H
Edwards STP-iXA4507-HV Series
Edwards STP-iS1607S
Edwards STP-iS1607CS
Edwards STP-A2803 Series
Edwards Categories
Water Pump
Control Unit
Measuring Instruments
Controller
Medical Equipment
More Edwards Manuals
Login
Sign In
OR
Sign in with Facebook
Sign in with Google
Upload manual
Upload from disk
Upload from URL