Connecting To Semiconductor Equipment; Connecting To Power; Emergency Off Circuit (Emo Circuit) - Edwards STP-L301 Series Instruction Manual

6.5

Connecting to Semiconductor Equipment

The STP pump is a component system when installing to the semiconductor equipment.
Consider the followings when designing the semiconductor equipment.
6.5.1

Connecting to Power

The STP control unit receives its power from the semiconductor equipment electrical
distribution system via a circuit breaker.
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main disconnect
device or circuit breaker of the semiconductor equipment, thereby: removing power from the
STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated for at least
10,000 A symmetrical amperes interrupting capacity (AIC).
rms
6.5.2

Emergency off Circuit (EMO Circuit)

Activation of EMO circuit of the equipment will interrupt electrical power from the STP
control unit.
When the power is shut off, the STP pump performs the same as a power failure (after
backup operation of a power failure, the rotor lands on the touch down bearing).
Consider the followings when establishing the EMO circuit.
◇ Unite the exhaust gas system to prevent atmosphere from being introduced into the
STP pump when the EMO circuit operates (example: shut the valve). When
atmosphere is introduced into the STP pump, the touch down bearing may not
operate normally.
◇ The STP pump rotates for a while after the EMO circuit shuts off the power. Perform
a recovery operation after the STP pump has stopped completely.
◇ Before performing the operation check of the EMO circuit with regular maintenance,
stop the STP pump to prevent damage to the touch down bearing.
STP-L301/L451 Series Instruction Manual
6-15