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iF1800
Edwards iF1800 Manuals
Manuals and User Guides for Edwards iF1800. We have
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Edwards iF1800 manual available for free PDF download: Instruction Manual
Edwards iF1800 Instruction Manual (126 pages)
Rapid Loadlock Dry Pumping Systems
Brand:
Edwards
| Category:
Water Pump
| Size: 3.83 MB
Table of Contents
Table of Contents
5
Introduction
11
Scope and Definitions
11
The if System
12
Safety
13
The FDP Dry Pump
13
The FDP Gas System
13
The if System (If1800 Shown Without Panelwork)
14
The HMB Mechanical Booster Pump
15
Temperature Control System
15
FDP Pump Temperature Control System
15
HMB Pump Temperature Control System
15
Exhaust System
15
Scematic Diagram of the FPD Pump Gas System
16
Electrical System
17
Introduction
17
Electrics Box
17
Control Module
18
Gas Module
18
Schematic Diagram of the If1800 Electrical Systems
19
Controls and Indicators
20
Control Functions
20
Priority of Control
20
Services and Electrical Connections on the Rear of the if System
21
Electrical Components (Shown Without Enclosures for Clarity)
22
Setpoints, Warning and Alarm Conditions
23
Safety Sensors
23
Pump Display Terminal
23
Drip Tray
24
Anchor Brackets
24
Labels
24
Controls and Indicators on the Dashboard
24
Exhaust Enclosure
25
Accessories
25
Controls and Indicatorss on the PDT
26
Label Fixing Positions on the FDP and HMB
27
Label Positions on the if System Enclosures
28
Technical Data
29
General
29
Performance
29
If1800 Dimensions (MM)
30
Temperature Control System
31
Cooling Water Supply
31
Lubrication
32
FDP Pump
32
HMB Pump
32
Electrical Data
35
Gas System
36
Materials in Contact with Process Gases
37
Fire Safety
37
Resource Conservation
37
Default Setpoints
37
Connections
39
Item Numbers
39
Installation
41
Safety
41
Installation Checklist
41
Unpack and Inspect
43
Remove the Enclosure Panels
45
Locate the if System
47
Check the Pump Oil Level(S)
47
Check the Pump Oil-Level(S)
47
If1800 Systems
47
Install or Replace the Pump Display Terminal and Optional Accessories (if Necessary)
48
Install or Replace the Pump Display Terminal and Optional Accessories(if Necessary)
48
Install the Pump Display Terminal
48
Install Optional Accessories
48
Connect the if Inlet to Your Vacuum System
48
Connect the if Exhaust Outlet to Your Exhaust-Extraction System
49
Connect the if Exhaust Outlet to Your Exhaust Extraction System
49
Connect to Your Factory Extraction System (Optional)
51
Connect the Nitrogen Supply
51
Leak Test the System
51
Install Additional Safety Equipment
54
Connect to Your Emergency Stop Circuit (Optional)
54
Electrical Supply and RF Earth (Ground) Connections
54
Reconfigure the if System for Your Electrical Supply (if Necessary)
54
Install Additional Safety Equipment (Optional)
54
Connect the Electrical Supply to the if System
57
Connect an Additional RF Earth (Optional)
57
Refit the Enclosure Panels
58
Connect the Cooling-Water Hoses
58
Adjust the Interstage Purge Flow Rates if Necessary
59
Commission the if System
59
Switch on an If1800 System
59
Pump Display Terminal Menus and Display Formats
61
Introduction
61
General Operation
61
The CANCEL Button
62
Display Text and Variable Text
62
Wrap-Around
63
Timeout
63
Menu Structure
63
Example
63
Operation
91
Introduction
91
Configure the System (Optional)
91
Change the Display Format
92
Change the Normal Display
92
Change the Display Units
92
Take and Release Control
92
Check the Nitrogen Pressure and Adjust if Necessary
93
Monitor the Status of the if System
94
Warning and Alarm Indications
94
Manual Shut-Down
95
Automatic Shut-Down
95
Emergency Stop
97
Restart the HMB Pump after Automatic Pump Shut-Down
97
Restart the if System after an Emergency Stop or Automatic Shut-Down
97
Operation of the if System Components
98
Operation of the Load-Lock Pump
98
Maintenance
99
Safety
99
Correct Use of Tube Fittings
100
Fit a Tube Fitting
100
Reconnect a Tube Fitting
100
Maintenance Frequency
101
Inspect the Connections, Pipelines, Cables and Fittings
101
Check the Purge Gas Flow Rates
101
Inspect and Clean the Exhaust-Silencer, Elbow and Check-Valve
101
Dismantle, Clean and Refit the Exhaust Silencer
103
Clean the Check-Valve
104
Check the HMB Pump Oil-Level
105
Check the FDP Pump Oil-Level
106
Change the FDP Pump Oil
108
Change the HMB Pump Oil
108
Relubricate the FDP Rotor Bearings
109
Zero the Gas Module Flow Transducer
110
Adjust the Pump Display Terminal Display Viewing Angle
110
Replace a Fuse
110
Replace the Pump Display Terminal
111
Relocate the if System for Maintenance
111
Fault Finding
112
Warning and Alarm Message Fault Finding
112
Other Fault Finding
112
Storage and Disposal
121
Storage
121
Disposal
121
Service, Spares and Accessories
123
Introduction
123
Service
123
Spares
123
Regrease Spares
123
Ordering Accessories
124
Exhaust Temperature Sensor
124
Active Gauge Connection Kit
124
Other Accessories
124
If Communications Module
124
If Interface Module
125
If Single Pumpset Monitor and if Fabworks
125
If PC Interface Kits
125
If Nitrogen Flow Switch
125
If Pump Display Module
125
If Pump Display Module Extension Cables
126
If Pump Display Terminal Extension Cables
126
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