Edwards STP-iXA3306C Manual
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Edwards STP-iXA3306C Manual

Stp-ixa3306 series stp series turbomolecular pumps
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MT-82E-001-H
Instruction Manual
STP Series Turbomolecular Pumps
STP-iXA3306 Series
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

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Summary of Contents for Edwards STP-iXA3306C

  • Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

  • Page 2: Declaration Of Conformity

    Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards. Manufacture: June. 2016, Yachiyo Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited Date and Place June. 2016, Burgess Hill EU representative: Date and Place...

  • Page 3: Table Of Contents

    Labels Operation principle of the STP pump STP pump specification TECHNICAL DATA STP pump specifications Maximum gas flow-rate 2.2.1 STP-iXA3306C/CV 2.2.2 STP-iXA3306B/BV Water cooling use condition Control unit External appearance of the STP pump Label affixing positions INSTALLATION OF THE STP PUMP Precautions before installation 3.1.1...
  • Page 4 STP-iXA3306 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page Connecting the water cooling pipe Attaching a baking heater Installation of the TMS unit 3.9.1 TMS unit specification 3.9.2 Configuration of the STP pump with the TMS 3.9.3 TMS heater 3.9.4 Connecting the TMS heater cable 3.9.5...
  • Page 5 STP-iXA3306 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page SERIAL COMMUNICATION PROTOCOL Introduction Connection and setting up 5.2.1 Signal connection 5.2.2 Connecting the RS485 5.2.3 Communication parameter setting 5.2.4 Input operation port setting 5.2.5 Serial communication timeout setting 5.2.6 Recommended items about communication cable installation 86 Protocol specifications 5.3.1...
  • Page 6 STP-iXA3306 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.4.21 ReadOptions 5.4.21.1 Second speed function setting 5.4.21.2 Second speed select STP-LINK AND DISPLAY UNIT STP-Link Display unit SAFETY FUNCTIONS Safety functions 7.1.1 Power Failure 7.1.2 Operation after a power recovery 7.1.3 Abnormal state of magnetic bearing (Disturbance) 7.1.4...
  • Page 7 STP-iXA3306 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STORAGE AND DISPOSAL Storage of the STP pump Disposal SERVICE, SPARES AND ACCESSORIES 10.1 Introduction 10.2 Service 10.3 Spares 10.4 Accessories MT-82E-001-H Page v...
  • Page 8 Heavy product caution label High voltage device caution label Rotation instruction label Cross sectional view of the STP pump External appearance of STP-iXA3306C(V)/iXA3306B(V) Label affixing positions Space around the STP pump Example of lifting the STP pump Example of lifting the STP pump (horizontal positioning)
  • Page 9 STP-iXA3306 Series Turbomolecular Pump ILLUSTRATIONS (CONTINUED) PAGE Figure Title Page Example of answer resending process Example of response when the command is sent continuously 100 Example of command sending during answer data reply Example of communication cycle process Example of command sending process Example of answer receiving process Display unit iDT-001 WARNING output...
  • Page 10 STP-iXA3306 Series Turbomolecular Pump TABLES PAGE viii Table Title Page Maximum gas flow-rate (STP-iXA3306C) Maximum gas flow-rate (STP-iXA3306CV) Maximum gas flow-rate (STP-iXA3306B) Maximum gas flow-rate (STP-iXA3306BV) Environmental requirements for installation Eyebolt size Pump functions Control unit front panel functions Control unit front panel functions (continued)
  • Page 11 STP-iXA3306 Series Turbomolecular Pump TABLES (CONTINUED) PAGE Table Title Page Default setting of WARNING function Factory Setting and Variable Range Priority of failure signal Error List Error List (continued) Error List (continued) Error List (continued) Error List (continued) Error List (continued) Troubleshooting with no indication of the "FAILURE"...
  • Page 12 STP-iXA3306 Series Turbomolecular Pump PAGE This page intentionally blank MT-82E-001-H Page x...

  • Page 13: Introduction

    INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP pump as specified in this manual otherwise the protection provided by the equipment may be impaired.

  • Page 14: Applied Standards

    STP-iXA3306 Series Turbomolecular Pump Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are displayed on the LCD of the display unit iDT-001 (optional accessory). Note that the words "WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions during the operation.

  • Page 15: Limited Warranty

    This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted This warranty applies only to the product delivered from Edwards to the customer.

  • Page 16: Spare Parts

    LED of the control unit or the LCD ("WARNING" message) of the display unit iDT-001. 16. Overhaul and replacement of maintenance parts. 1.3.4 Spare parts  Touch down bearing.  Air-cooling fan Touch down bearing and air-cooling fan should be replaced at Edwards, contact Edwards. MT-82E-001-H Page 4...

  • Page 17: Precautions For Safe Operation Of The Stp Pump

    1.4.1 Usable gases Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards.  Gases including alkaline metals except Li gas.  Gases including Ga, Hg, In, or Sn.  HBr gas.

  • Page 18: Maintenance And Inspection Precautions

    STP-iXA3306 Series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".

  • Page 19: Heavy Product Caution Label

    STP-iXA3306 Series Turbomolecular Pump Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 3.2, "Unpacking" so as not to cause any accident during handling. Figure 3 - Heavy product caution label High voltage device caution label The pump and control unit are equipped with a high voltage device.

  • Page 20: Operation Principle Of The Stp Pump

    1. Oil free 2. Low vibration 3. High reliability 4. Compact size (Integrated control unit) 5. Temperature management system 6. Dust and water protection (STP-iXA3306C/B) Touch down bearing Rotor blade Radial electromagnet Control unit Stator blade...
  • Page 21 STP-iXA3306 Series Turbomolecular Pump 1. Oil free Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. 2. Low vibration The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4).

  • Page 22: Stp Pump Specification

    STP-iXA3306CV STP-iXA3306B STP-iXA3306BV Naming convention:  "C" following a pump model name indicates a corrosion resistant type. (e.g. STP-iXA3306C)  "B" following a pump model name indicates corrosion resistant and high-emissivity coating type. (e.g. STP-iXA3306B)  "V" indicates a TMS unit.
  • Page 23 STP-iXA3306 Series Turbomolecular Pump The display unit iDT-001 is available as an optional accessory with the STP-iXA3306 series. The display unit operates the STP pump, confirms the pump status or sets various settings. (refer to Section 6.2 and the Instruction Manual of the "Display Unit iDT-001".) Display unit iDT-001 MT-82E-001-H Page 11...
  • Page 24 STP-iXA3306 Series Turbomolecular Pump This page intentionally blank MT-82E-001-H Page 12...

  • Page 25: Technical Data

    STP-iXA3306 Series Turbomolecular Pump TECHNICAL DATA STP pump specifications The values shown below are typical. They are not guaranteed. Item STP-iXA3306C(V) / STP-iXA3306B(V) Flange size Inlet port flange VG250 / ISO250F VG300 / VG350 ICF305 (DN250CF) ISO320F ICF356 (DN320CF) Outlet port flange...

  • Page 26: Maximum Gas Flow-Rate

    26 to 35 ºC > 1,300 L/min 2.53 1500 3.72 2200 > 10,000 L/min 2.87 1700 6.59 3900 Table 1 - Maximum gas flow-rate (STP-iXA3306C) Maximum gas flow-rate Cooling water backing-pump [Pa･m [SCCM] (setting value) 15 to 25ºC > 1,300 L/min 2.03 1200 70 ºC...

  • Page 27: Stp-Ixa3306B/Bv

    > 8.4×10 ±1.7×10 /s (50±10 SCCM) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-82E-001-H Page 15...

  • Page 28: Water Cooling Use Condition

    STP-iXA3306 Series Turbomolecular Pump Water cooling use condition Use cooling water which fulfills the following conditions. Item Specification Port type Rc 1/4 (Female) Flow rate L/min Water temperature °C 15 to 35 Water pressure MPa (kgf/cm 0.3 (3) Maximum grain size 0.03 6.5 to 8.0 Water hardness...

  • Page 29: Control Unit

    STP-iXA3306 Series Turbomolecular Pump Control unit The values shown below are typical. They are not guaranteed. Item STP-iXA3306C/B STP-iXA3306CV/BV Input voltage 200 to 240 Input power 1500 maximum 1800 maximum (without TMS unit) (with TMS unit) Input frequency 50/60 ± 2 Leakage current 2.0 maximum...
  • Page 30 STP-iXA3306 Series Turbomolecular Pump Item STP-iXA3306 series Safety function Electromagnetic bearing failure detection STP pump overheat detection Motor driver overload detection Power failure detection STP pump overspeed detection Control unit overheat detection Other failure detection MT-82E-001-H Page 18...

  • Page 31: External Appearance Of The Stp Pump

    Purge port KF10 Cooling water port 2-Rc1/4 Height of water cooling Rc1/4 port (OUT) Inlet port VG250 ISO250F VG300 VG350 ISO320F ICF305 VG350 ICF356 flange φ A φ B 28.5 Figure 7 - External appearance of STP-iXA3306C(V)/iXA3306B(V) MT-82E-001-H Page 19...

  • Page 32: Label Affixing Positions

    STP-iXA3306 Series Turbomolecular Pump Label affixing positions Refer to Section 1.6, "Labels" for the details of the labels 1 to 5. STP pump installation warning label Hot surface warning label Heavy product caution label High voltage device caution label Rotational direction instruction label Name plate Company logo WATER IN label...

  • Page 33: Installation Of The Stp Pump

    And, take measures according to MSDS to prevent an accident caused by exhaust gas. CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except Li gas. •...

  • Page 34: Environmental Requirements For Installation

     A place free of exposure to radiation.  No discharge of high voltage (more than 500 V) (If more than 500 V is discharged, contact Edwards).  Others: An area free of exposure to direct sunlight, high humidity, dust, salty air, dripping water, explosive or flammable gas, corrosive gas, excessive vibration and sources of electric noise.

  • Page 35: Installation Area

    STP-iXA3306 Series Turbomolecular Pump 3.1.2 Installation area Leave enough space for the followings in addition to that for the STP pump: (see Figure 9)  Space for maintenance and inspection.  Space for connecting cables. CAUTION DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump. In addition, leave enough space to install other cables without bending them excessively.

  • Page 36: Bench

    The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. 3.1.4 Insulation test CAUTION The varistor for the power supply line protection is installed in the control unit.

  • Page 37: Unpacking

    Unpacking the STP pump Check outer package for damage and that the delivery note corresponds to the purchase order. If the STP pump is damaged, contact Edwards or their distributor. Note: It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse.

  • Page 38: Example Of Lifting The Stp Pump (Horizontal Positioning)

    STP-iXA3306 Series Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, pump base, or control unit (see Figure 11). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts. A crane due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more.

  • Page 39: Jack-Up The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump Use lifting devices when installing the STP pump under the equipment. A device due to jacking up the STP pump should withstand the load of five times or more the weight of the STP pump. Figure 12 - Jack-up the STP pump When jacking up the bottom of the control unit, place the STP pump on the table which is larger than base size (Figure 13 [A]) Jacking up the bottom plate (Figure 13 [B]) may deform the plate and cause the breakage of internal parts.

  • Page 40: Prohibited Matter

    STP-iXA3306 Series Turbomolecular Pump DO NOT the grip and pull the cooling water pipe (Figure 14) for cooling water when installing the STP pump. Figure 14 - Prohibited matter When installing the STP pump to the vacuum equipment in upside-down position, the STP-iXA3306 series can be loft with the eyebolts attached to the screw holes for securing the base.

  • Page 41: Name And Function Of Each Part

    STP-iXA3306 Series Turbomolecular Pump Name and function of each part 3.3.1 Name and function of the pump The STP pump in Figure 16 is a typical pump model. Refer to Section 2, "TECHNICAL DATA". Figure 16 - Configuration of the STP pump Item Description Function...

  • Page 42: Name And Function Of The Control Unit

    STP-iXA3306 Series Turbomolecular Pump 3.3.2 Name and function of the control unit Figure 17 shows the front panel of the control unit. WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign . DO NOT touch the connecter. Doing so may result in electric shock.

  • Page 43: Control Unit Front Panel Functions

    STP-iXA3306 Series Turbomolecular Pump Item Description Function "MAIN POWER" switch Main power circuit breaker NEVER stop the power supply to the STP pump while the STP pump is in rotation. "AC POWER" connector AC input inlet (240 Va.c. maximum) (X11) For the AC power cable Input voltage range is between 200 to 240V AC (50/60Hz) "HEATER"...

  • Page 44: Control Unit Front Panel Functions (Continued)

    STP-iXA3306 Series Turbomolecular Pump Item Description Function "Off-Line" LED (Orange LED) Functions only when the Profibus (optional accessory) is equipped. Slave (STP pump) is not in data exchange as defined by the Profibus standard. "Error" LED (Red LED) Functions only when the Profibus (optional accessory) is equipped.

  • Page 45: How To Install The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump How to install the STP pump Install the STP pump to the inside of the vacuum equipment as shown in Figure 18. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided.

  • Page 46: Cleaning The Seal

    Foreign materials falling into the STP pump through the splinter shield may result in product damage. Take care not to scratch the flange of the STP pump. Check whether or not there are scratches on the surface, before installing the STP pump. If unsatisfactory, contact Edwards. MT-82E-001-H Page 34...

  • Page 47: Stp Pump Installation Positions

    STP-iXA3306 Series Turbomolecular Pump 3.4.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. Vacuum equipment 4. Slanted Upside-down 5. Vertical Horizontal Figure 19 - STP pump installation positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.

  • Page 48: Secure The Stp Pump

    Table 10 - Tightening torque of bolt When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-82E-001-H Page 36...

  • Page 49: Maximum Torque Predicted And Recommended Securing Bolt For Inlet Port Flange

    STP-iXA3306 Series Turbomolecular Pump Pump model STP-iXA3306C (V) / STP-iXA3306B (V) Flange type ISO250F VG250 ICF305 ICF356 Torque reduction Equipped Equipped Not Equipped Equipped Equipped mechanism Equipped (optional) (standard) (standard) (standard) (standard) Destructive 48.1 48.1 71.2 71.2 71.2 Torque [kNm]...
  • Page 50 STP-iXA3306 Series Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 21, is designed to absorb energy and also buffer the destructive torque. There are two installation methods for the pump, as shown in Figure 22.

  • Page 51: Shape Of Reduced Diameter Shank Bolts

    STP-iXA3306 Series Turbomolecular Pump Vacuum equipment ISO250F ISO320F VG250 VG300/VG350 Inlet port flange 15 mm 20 mm 15 mm 18 mm Washer 2 mm 2.5 mm 2.5 mm 2.5 mm Torque reduction mechanism 35 mm 50 mm 50 mm 50 mm Bolt insert position 22 mm 24 mm...

  • Page 52: Legs For Securing The Base

    STP-iXA3306 Series Turbomolecular Pump 3.4.4 Legs for securing the base CAUTION When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more. Figure 23 shows the position of the six screw holes for securing the base of the STP pump. (A) Screw holes for securing the base M16, depth 30 mm...

  • Page 53: Power Cable

    STP-iXA3306 Series Turbomolecular Pump 3.4.5 Power cable WARNING Ensure that the electrical supply cable is suitably protected against earth (ground) faults and that the earth (ground) and "X11 AC POWER" is correctly connected. CAUTION The power cable is designed specifically for the STP pump. DO NOT use the power cable with other products.

  • Page 54: Connecting Method Of The Power Cable

    STP-iXA3306 Series Turbomolecular Pump Control unit side Power side (Primary) Black 1 M4-bolt (fixing screw) Black 2 Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block Use material flammability: UL 94V-0 Use the UL-recognized terminal block satisfying with the following conditions; a) Clearance (between each terminal): 1.5 mm or more b) Material flammability: UL 94V-0 c) The installation category Ⅱ...

  • Page 55: How To Connect The Power Cable

    Moreover, an accident caused by water leaks or gas leak may occur. CAUTION Use the power cable that Edwards has specified. The use of other cables may result in product damage. CAUTION Confirm the power voltage on the label.
  • Page 56 STP-iXA3306 Series Turbomolecular Pump CAUTION DO NOT place heavy objects on the cables or bend them excessively. Support each cable so as not to apply direct force to the connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.

  • Page 57: Precautions Of Vacuum Piping

    STP-iXA3306 Series Turbomolecular Pump Precautions of vacuum piping CAUTION DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. Install the valve to isolate purge gas N or cooling water (Lockout/Tagout) at your company.

  • Page 58: Connecting The Purge Port

    STP-iXA3306 Series Turbomolecular Pump Note: Maximum flow for water cooled and TMS unit are applicable under the condition listed in Section 2.3, "Water cooling use condition". Connecting the purge port When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump.

  • Page 59: Connecting The Water Cooling Pipe

    STP-iXA3306 Series Turbomolecular Pump Connecting the water cooling pipe Secure the connection pipe to prevent water leakage and use cooling water under the conditions provided in Section 2.3, "Water cooling use condition". It is recommended to connect the water cooling pipes according to the direction (IN side / OUT side) in Figure 27. Install a secondly containment for liquids or a water leak detector in the place (ex.

  • Page 60: Attaching A Baking Heater

    STP-iXA3306 Series Turbomolecular Pump Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION DO NOT apply excessive force to the cable for the baking heater. CAUTION Wind the baking heater around the surface of the STP pump tightly.

  • Page 61: Installation Of The Tms Unit

    STP-iXA3306 Series Turbomolecular Pump Installation of the TMS unit WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch or remove the heater cover. It causes electric shock or burns. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation.

  • Page 62: Configuration Of The Stp Pump With The Tms

    STP-iXA3306 Series Turbomolecular Pump 3.9.2 Configuration of the STP pump with the TMS Figure 29 shows wiring and piping of two-way valve type. Refer to Figure 30 for wiring and piping of three-way valve type. STP pump 5. TMS heater cable TMS heater (Built-in) 6.

  • Page 63: Tms Heater

    STP-iXA3306 Series Turbomolecular Pump 3.9.3 TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP pump at the factory. A fuse is set in the TMS heater cable of the STP-iXA3306 series. 3.9.4 Connecting the TMS heater cable Insert the TMS heater cable into the connector "X12 HEATER"...

  • Page 64: Connecting The Pump And Tms Valve

    STP-iXA3306 Series Turbomolecular Pump 3.9.6 Connecting the pump and TMS valve The control unit is always water-cooled. For (A) Two-way valve type and (B) Three-way valve type in Figure 30, two water supply lines are required for ON/OFF valve control. Connect the pump and TMS valve according to Figure 30.

  • Page 65: Connecting To Semiconductor Equipment

    STP-iXA3306 Series Turbomolecular Pump 3.10 Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.10.1 Connecting to power The STP pump receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (Rated current 10 A).
  • Page 66 STP-iXA3306 Series Turbomolecular Pump This page intentionally blank MT-82E-001-H Page 54...

  • Page 67: Operation

    Take measures according to MSDS to prevent an accident when using toxic, reactive or combustible gases. CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except Li gas. •...

  • Page 68: How To Introduce A Purge Gas

    STP-iXA3306 Series Turbomolecular Pump 4.1.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage. Connect a needle valve or a similar part to the purge port and introduce a dry N gas or other gas to perform a gas purge (see Section 3.10, "Connecting the purge port").

  • Page 69: Baking The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump Baking the STP pump WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot. Never touch them with bare hands. CAUTION The TMS unit and the baking heater cannot be used together at the same time. To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump.

  • Page 70: Before Starting The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.

  • Page 71: Powering On

    STP-iXA3306 Series Turbomolecular Pump Powering ON Turn "ON" the "MAIN POWER" switch on the control unit. If no error is found, the magnetic bearing functions and the rotor levitates (POWER ON state). The "POWER" LED illuminates in green (Levitation state). Pump operation 4.6.1 Input operation port setting...

  • Page 72: Starting/Stopping The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump 4.6.2 Starting/stopping the STP pump There are two methods for the starting/stopping operation with the parallel port. Use one of them. 1. Contact input Open the circuit between (19)–(37). Method Starting the pump Stopping the pump 1) Short the circuit between (1)-(21).

  • Page 73: Pump Operation Method 1 (Voltage Input)

    STP-iXA3306 Series Turbomolecular Pump 2. Voltage input Short the circuit between (19)-(37). Method Starting the pump Stopping the pump 1) Supply 12 to 24 VDC to the circuit between Shutoff the circuit between (21)-(1). (21)-(1). 2) Supply 12 to 24 VDC to the circuit between (3)-(1) for 0.3 seconds or more.

  • Page 74: How To Start/Stop The Stp Pump

    STP-iXA3306 Series Turbomolecular Pump How to start/stop the STP pump 4.7.1 Starting the STP pump after stopping Perform the start operation shown in Section 4.6.2, "Starting/stopping the STP pump". The STP pump can be reaccelerated even while it is stopping. 4.7.2 Starting the STP pump after a safety function operates A safety function operates when an abnormality/error occurs in the STP pump or peripheral equipment.

  • Page 75: Led

    STP-iXA3306 Series Turbomolecular Pump Three LEDs indicate the pump’s operational state. Power on state Acceleration Deceleration Warning/ (Levitation state state Failure state state) POWER Steady green Steady green Steady green Steady green (green) (OFF only at power failure) ROTATION Extinguishes Green Orange See left...

  • Page 76: Parallel Port Input/Output Signal

    STP-iXA3306 Series Turbomolecular Pump Parallel port input/output signal The remote input/output signal connector "X2 REMOTE" is used for input/output remote signals (see Figure 36). This connector is of D-Sub (37 pins, socket type) type. The screw for connector is M2.6. Note: The connector (pin type) is not included.

  • Page 77: X2 Remote Input Signal Pins

    STP-iXA3306 Series Turbomolecular Pump Description Pins for choosing the input signal. (37) (19) When using the contact input, open the circuits between (19)-(37). POLARITY SELECT Pins for inputting the START signal. (21) The following two methods are available: 1） Short the circuits between (1)-(21). Then, short the circuits STOP IN START IN between (3)-(21) for 0.3 seconds or more.

  • Page 78: X2 Remote Input Signal Pins (Continued)

    STP-iXA3306 Series Turbomolecular Pump Description Pins for inputting the input operation port select signal. When the pins between (1)-(4) are short-circuited, the input operation port will be set to the parallel port automatically, and the input operation via the serial port is disabled. PORT SELECT IN When the pins between (1)-(4) are opened, a parallel port or any of three serial ports from COM1 to COM3 can be selected...

  • Page 79: X2 Remote Input Signal Pins (Contact Input)

    STP-iXA3306 Series Turbomolecular Pump A. In case of Start 1) B. In case of Start 2) Figure 37 - X2 REMOTE input signal pins (contact input) Note: COM pins (1, 37 pin) are isolated from the frame ground. Note: The input current of remote input signal is approx. 5 mA. Make sure the minimum applicable load of the relay contact when the remote operation with the relay.

  • Page 80: X2 Remote Input Signal Pins (Voltage Input)

    STP-iXA3306 Series Turbomolecular Pump Description Pins for choosing the input signal. (37) (19) When using voltage input, short the circuits between (19)-(37). COM POLARITY SELECT (21) Pins for inputting the START signal. The following two methods are available: 1) Supply 12 to 24 VDC to the circuits between (21)-(1). Then, STOP supply 12 to 24 VDC to the circuits between (3)-(1) for 0.3 seconds or more.

  • Page 81: X2 Remote Input Signal Pins (Voltage Input) (Continued)

    STP-iXA3306 Series Turbomolecular Pump Description Pins for inputting the rotation INHIBIT signal. The input pins are valid even when input operation port is set to serial port. + INHIBIT IN When the pins (5)-(1) are shutoff, the STP pump does not rotate despite the presence of a start signal.

  • Page 82: X2 Remote Input Signal Pins (Voltage Input)

    STP-iXA3306 Series Turbomolecular Pump A. In case of Start 1) B. In case of Start 2) Figure 38 - X2 REMOTE input signal pins (voltage input) MT-82E-001-H Page 70...

  • Page 83: Input Operation Port Setting

    STP-iXA3306 Series Turbomolecular Pump 4.9.2 Input operation port setting Set the input operation port to the parallel port when operating the STP pump via the connector X2. The input operation port can be changed by "PORT SELECT IN" signal of the connector X2 and "Remote Operation Mode"...

  • Page 84: Rotation Inhibit Signal

    STP-iXA3306 Series Turbomolecular Pump 4.9.3 Rotation INHIBIT signal When using rotation INHIBIT signal, short-circuit the "INHIBIT ENABLE IN" signal. Relations between rotation INHIBIT signal input and pump operation state are shown in Table 23. Signal input Pump operation ● The pump accelerates when the START After short-circuit of rotation INHIBIT input signal (A), the START operation is operation is performed (B).

  • Page 85: Second Speed Option

    STP-iXA3306 Series Turbomolecular Pump 4.9.4 Second speed option When the second speed option is enabled, second rating speed can be set independently of the normal rating speed setting. The selection of the second rating speed and normal rating speed are operated from I/O remote input or serial communication port.

  • Page 86: Output Signal Pins

    STP-iXA3306 Series Turbomolecular Pump 4.9.5 Output signal pins Table 25 and Figure 39. The pins function when the input operation port is either in parallel port setting or serial port setting. Three abbreviations are used in Table 25. N.O OUT: Normal Open Output Pin N.C OUT: Normal Close Output Pin...

  • Page 87: X2 Remote Output Signal Pins

    STP-iXA3306 Series Turbomolecular Pump Description Pins for outputting the POWER ON state signal. (28) POWER These pins are closed when magnetic bearing functions and N.O OUT the rotor levitates. This output is opened at a power failure (10) (29) Pins for outputting the ACCELERATION state signal. ACCELERATION These pins are closed when the STP pump is in acceleration.

  • Page 88: X2 Remote Output Signal Pins

    STP-iXA3306 Series Turbomolecular Pump Description Pins for optional signal output. (26) In state of the second speed option is "ENABLE", and second N.O OUT speed is selected, the pins between (7)-(26) are closed and the pins between (7)-(26) are opened. Table 26 - X2 REMOTE output signal pins (continued) Figure 39 - X2 REMOTE output signal pins MT-82E-001-H...
  • Page 89 STP-iXA3306 Series Turbomolecular Pump Table 27 shows the rated contacts for relays CR1 to CR8 in Figure 39. Resistance Load (COS Ø=1) Rated Load 30 V DC, 0.5 A Rated Current 0.5 A Maximum Contact Point Current 0.5 A Maximum Open/Close Capacity DC: 15 W 10 mV DC, 10 μA Minimum Applicable Load...

  • Page 90: Operating The Tms Unit (For Use With The Tms Unit)

    STP-iXA3306 Series Turbomolecular Pump 4.10 Operating the TMS unit (for use with the TMS unit) 4.10.1 Before starting Check the following items before starting: 1. Check that the TMS heater cable is securely connected to the "X12 HEATER" connector on the control unit.

  • Page 91: Serial Communication Protocol

    STP-iXA3306 Series Turbomolecular Pump SERIAL COMMUNICATION PROTOCOL Introduction STPiXA3306 series is provided with compliant serial RS232/RS485 interface. Prepare the user application according to this protocol procedure. Operation instructions and information, such as the running state and setting values of the STP pump can be set by the software. The STP pump equips the serial ports for connecting the user application, STP-Link (optional accessory), or the display unit iDT-001 (optional accessory).

  • Page 92: Connection And Setting Up

    STP-iXA3306 Series Turbomolecular Pump Connection and setting up 5.2.1 Signal connection 1. Serial Port COM1 (X3 COM1 connector) The serial port COM1 is available for the serial communication via RS232 or RS485. When using a user application, connect it to this port. Connect the connector X3 (D-Sub9 pin, socket type) to the PC according to Table 28.

  • Page 93: X3/X4 Connector (D-Sub9)

    STP-iXA3306 Series Turbomolecular Pump Figure 41 - X3/X4 connector (D-Sub9) Note: The connectors X3 and X4 are fitted using M2.6 screws. The RS232 and RS485 share the X3 COM1 port. When connecting RS232, the length of the communication cable should be 15 m or less. When connecting RS485, refer to Section 5.2.2.

  • Page 94: Connecting The Rs485

    STP-iXA3306 Series Turbomolecular Pump 5.2.2 Connecting the RS485 Make sure the followings when using the serial port COM1 with RS485 or COM2. • A connection condition is 1 on 1 (single point connection) or 1 on N (multi-point connection). A maximum number of 32 SIMs are connectable in the multi-point connection. •...

  • Page 95: Communication Parameter Setting

    STP-iXA3306 Series Turbomolecular Pump 5.2.3 Communication parameter setting The factory setting of COM1 and COM2 is shown in Table 29. To set communication parameters, use the STP-Link (optional accessory) or the display unit iDT-001 (optional accessory). Communication Factory setting PC setting example parameter Baud rate 9,600 bps...

  • Page 96: Input Operation Port Setting

    STP-iXA3306 Series Turbomolecular Pump 5.2.4 Input operation port setting Set the input operation port to the serial port when operating the STP pump via the serial port in accordance with the following procedures. 1. Open the "PORT SELECT IN" signal between (1)-(4) of the "X2 REMOTE" connector. If the pins are closed, the input operation port will be set to the parallel port automatically, and the input operation via the serial port is disabled (refer to Section 4.9, "Parallel port input/output signal"...

  • Page 97: Serial Communication Timeout Setting

    STP-iXA3306 Series Turbomolecular Pump 5.2.5 Serial communication timeout setting If the signal to the input operation port of the STP pump is interrupted for a certain period during acceleration or normal operation, the STP pump detects a failure and stops. The time setting of the failure detection is user definable.

  • Page 98: Recommended Items About Communication Cable Installation

    STP-iXA3306 Series Turbomolecular Pump 5.2.6 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.

  • Page 99: Example Of Ring Ferrite Core Installation

    STP-iXA3306 Series Turbomolecular Pump  DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible.  As radio frequency noise measure, place a ferrite core on both ends of the communication cable. When electromagnetic interference caused by radio frequency noise in frequency band (150 kHz to 1 GHz) affects communication, attaching ring ferrite cores to the cable is effective to reduce communication failure.

  • Page 100: Example Of Differential Signal Waveform

    STP-iXA3306 Series Turbomolecular Pump  DO NOT insert or remove a communication cable while a communication device and a STP pump are turned ON the power. Communication interface circuit may break down if surge voltage caused by such as potential difference of communication interfaces or static electricity is applied to communication line.

  • Page 101: Protocol Specifications

    STP-iXA3306 Series Turbomolecular Pump Protocol specifications 5.3.1 General description The STP serial communication protocol enables the SIM to receive the communication command transmitted from the PC and sends a response following the communication command (Figure 48-1). Each communication command from the PC transmits a text message (ASCII text) assigned to each function (Figure 48-2).

  • Page 102: Standard Transmission Frame

    STP-iXA3306 Series Turbomolecular Pump Table 32 shows ASCII characters being used in the transmission control, error control and handshake in the application layer. ASCII Function character code Transmission layer Transmission block start character Transmission frame end character Transmission block end character Acknowledgment response Non-acknowledgment response Network frame ID character...

  • Page 103: (In The Rs232/Rs485 Single Point Connection)

    STP-iXA3306 Series Turbomolecular Pump Transmission frame when a message exceeds 255 characters (n = 255, m<=255, k = the number of transmission blocks): First 5+n+1 5+n+2 Block ASCII Second 5+n+1 5+n+2 Block ASCII Final 5+m+1 5+m+2 Block ASCII "Stx" is used as a start character of each transmission block; "Etb" is used as an end character of the transmission block with a message of 255 characters;...

  • Page 104: Query Command

    STP-iXA3306 Series Turbomolecular Pump Then the preceding SIM->PC character is "Ack", the instructed control command is executed and the SIM returns the following response. PC->SIM Ack or Nak SIM->PC Stx # or ! Etx LRC The PC transmits "Ack" or "Nak"; then transmits the next command if necessary. Transmission frame when data is transmitted to two blocks (message is more than 256 characters and less than 512 characters): Designate the control command (the 1st block) on the PC...

  • Page 105: Transmission Data Format

    STP-iXA3306 Series Turbomolecular Pump Parameter (from C to C ) serves as 16 bits signed hexadecimal value coded ASCII text. When a message (a space character, a function code, and parameter) exceeds 255 characters, input "?" and CHR to the top transmission block only (the first transmission block of the transmission frame). It is not necessary to input them to the 2nd and succeeding transmission blocks.

  • Page 106: Frame Control (Checksum)

    STP-iXA3306 Series Turbomolecular Pump 5.3.6 Frame control (checksum) The transmission frame is controlled by the odd number parity check. First initialize LRC as FF Next calculate LRC by EXCLUSIVE-OR (XOR) of all the frame bytes containing "Stx", "Etb", "Etx" and LRC and transmit the result as LRC.
  • Page 107 STP-iXA3306 Series Turbomolecular Pump Examples: Network frame ID character and number in the multi-point connection ASCII Network frame No "1" ASCII Network frame No "100" ASCII Network frame No "127" The transmission frame has a single block or multiple transmission blocks. Each transmission block consists of a network frame ID character, a network frame number, a start control character, data block number (3 digits), a message (up to 255 characters), an end control character and a checksum (LRC).

  • Page 108: Control Command In The Rs485 Multi-Point Connection

    STP-iXA3306 Series Turbomolecular Pump 5.3.9 Control command in the RS485 multi-point connection The control command to be used when a pump operation instruction or a setting change instruction is transmitted to the SIM and is arranged in the order specified below. The top is "Sp" (space character, HEX code "20") and ASCII characters corresponding to the respective function code and parameter follow.

  • Page 109: 5.3.10 Query Command In The Rs485 Multi-Point Connection

    STP-iXA3306 Series Turbomolecular Pump Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command (the 2nd block). PC->SIM @ F Stx 0 Etx LRC SIM->PC Ack or Nak Always assign less than 510 characters (n< 510) to the parameter so that the message is less than 512 characters.

  • Page 110: 5.3.11 Broadcasting Command In The Rs485 Multi-Point Connection

    STP-iXA3306 Series Turbomolecular Pump Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters. Next, the preceding SIM->PC character is "Ack", the instructed query command is executed and the SIM returns the following response (1st block). PC->SIM Ack or Nak SIM->PC @ F...

  • Page 111: 5.3.12 Application Note

    STP-iXA3306 Series Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely. The followings are the methods to create the tool application with redundancy to a noise etc.

  • Page 112: Example Of Answer Resending Process

    STP-iXA3306 Series Turbomolecular Pump  Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use the data. When the incorrect data caused by noise is accepted, parameters might be set unexpected values. In this case, the processing of the tool application may determine to be a communication failure.

  • Page 113: Example Of Communication Cycle Process

    STP-iXA3306 Series Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint connection? Address selection: Next TMP Address check:...

  • Page 114: Example Of Command Sending Process

    STP-iXA3306 Series Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 msec. (Revision B: 50 msec.) *2 When using RS485 multipoint connection, also Block number: k = 1 an address is incorrect.

  • Page 115: Command Specifications

    STP-iXA3306 Series Turbomolecular Pump Command specifications 5.4.1 Command list Function Command/Query Name Function code ReadMeas Reads the measured rotational speed. Command Sends commands START, STOP, RESET (These commands are valid only when being sent to the serial port which is set as the input operation port.) ReadFailMess Reads the errors being detected.

  • Page 116: Readmeas

    STP-iXA3306 Series Turbomolecular Pump 5.4.2 ReadMeas Function: Reads the measured rotational speed. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks [System reservation] 56-bits hexadecimal coded ASCII Measured rotational speed 16-bits hexadecimal (Unit: Hz)

  • Page 117: Readfailmess

    STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal coded Refer to Table 35 ASCII Pump operation command Value START STOP RESET Table 35 - Pump operation commands Example: Pump operation command : RESET operation = 4 = 04 Parameter ASCII 30 34...
  • Page 118 STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remarks The number of error 8-bits hexadecimal Up to 80 errors coded ASCII 2 to 81 Error 1 8-bits hexadecimal coded ASCII … … Error 80 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the STP pump. It is recommended that an application be designed as variable-length data.

  • Page 119: Error Message Values

    STP-iXA3306 Series Turbomolecular Pump Error message Value Error message Value Ram Error AMB Com. Failure [System reservation] [System reservation] TMS Higher Temp TMS Sensor Lost [System reservation] [System reservation] [System reservation] [System reservation] Power Failure [System reservation] Power Supply Fail [System reservation] Overspeed 1 [System reservation]...

  • Page 120: Error Message Values (Continued)

    STP-iXA3306 Series Turbomolecular Pump Error message Value Error message Value [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Aberrant Brake [System reservation] Aberrant Accel Overspeed 4 [System reservation] [System reservation]...

  • Page 121: Readmodfonct

    STP-iXA3306 Series Turbomolecular Pump 5.4.5 ReadModFonct Function: Reads the pump operation mode and the errors being detected. The data of errors being detected reads the same data as that of "ReadFailMess". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 82 Etx LRC Parameter...

  • Page 122: Pump Operation Mode

    STP-iXA3306 Series Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest Tuning Tuning Complete [System Reservation] 9, 10, 11 Table 38 - Pump operation mode Example: Pump operation mode : 01 = 1 = Levitation The number of error : 02 = 2 errors...

  • Page 123: Readversion

    STP-iXA3306 Series Turbomolecular Pump 5.4.6 ReadVersion Function: Read the software version. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16 Control unit software version 8-bits hexadecimal coded ASCII 17 to 20 Motor driver software version...

  • Page 124: Readcounters

    STP-iXA3306 Series Turbomolecular Pump 5.4.7 ReadCounters Function: Reads serial number, running time and start counter. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10 Control unit serial number 4-bits ASCII character 11 to 20 Pump serial number...

  • Page 125: Readsetpoint

    STP-iXA3306 Series Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reads the setting value of the "Speed Set Point" and TMS temperature. The "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 2 Etx LRC...

  • Page 126: 5.4.10 Readstatus

    STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal (Unit: ºC) coded ASCII Example: Motor temperature : 0014 = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reads various settings (Remote mode, TMS function, Emergency vent valve). Transmission frame: PC->SIM Stx Etx LRC...

  • Page 127: 5.4.11 Readevents

    STP-iXA3306 Series Turbomolecular Pump Remote mode Value I/O Remote (X2) COM1 (X3) COM2 (X4) COM3 (X5 STP-Link) [System reservation] 3, 4 Table 39 - Remote mode Example: Remote mode setting : 01 = I/O Remote TMS function setting : 00 = ENABLE Emergency vent valve setting : FF...

  • Page 128: 5.4.12 Setspeedsetpoint

    STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remarks The number of 8-bits hexadecimal Up to 10 errors "Error Record" coded ASCII 2 to 11 Error Record 1 to 8-bits hexadecimal Error Record 10 coded ASCII *1 Value corresponding to the error message is transmitted (refer to Table 36 and Table 37). The most recent error has the smallest parameter number.

  • Page 129: 5.4.13 Readspeedsetpoint

    STP-iXA3306 Series Turbomolecular Pump Parameter Items Data format Remark Speed Set Point 16-bits hexadecimal (Unit: Hz) coded ASCII *1 When the value set to the parameter is larger than the upper limit, it is automatically set to the upper limit. When the value set to the parameter is smaller than the lower limit, it is automatically set to the lower limit.

  • Page 130: 5.4.14 Readmodfonctwithwarning

    STP-iXA3306 Series Turbomolecular Pump 5.4.14 ReadModFonctWithWarning Function: Reads the pump operation mode, errors and warnings being detected. Transmission Frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 82 Etx LRC Parameter Item Data format Remark Pump operation mode 8-bits hexadecimal See Table 37 coded ASCII...

  • Page 131: Warning Value Bit Assign

    STP-iXA3306 Series Turbomolecular Pump Warning message 16-bits hex value 0001 [System reservation] WARNING: Second Damage Limit 0002 WARNING: First Damage Limit 0004 WARNING: Imbalance X_H 0008 WARNING: Imbalance X_B 0010 WARNING: Imbalance Z 0020 WARNING: Pump Run Time Over 0040 WARNING: Pump Overload 0080 [System reservation]...
  • Page 132 STP-iXA3306 Series Turbomolecular Pump Example: Pump operation mode : 01 = 1 = Levitation WARNING being detected : 000C = 0004 OR 0080 "WARNING: First Damage Limit" and "WARNING: Imbalance X_H" The number of error : 02 = 2 errors Error 1 : 0D = 13 = Disturbance Xh...

  • Page 133: 5.4.15 Readmeasvalue

    STP-iXA3306 Series Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed, and control unit temperature. The motor temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
  • Page 134 STP-iXA3306 Series Turbomolecular Pump Example: TMS temperature: 0046 = 70 ºC (158ºF) Motor temperature: 0014C = 20 ºC (68ºF) Motor current: = 2.5A Measured rotational speed: 01C2 = 450 Hz = 27,000 rpm Control unit temperature : 0032 = 50 °C Parameter ASCII Parameter...

  • Page 135: 5.4.16 Readoptionfunc

    STP-iXA3306 Series Turbomolecular Pump 5.4.16 ReadOptionFunc Function: Reads the setting value of the input operation port, warning function, and serial communication time out. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 13 Etx LRC *1 The HEX code of ASCII character ' = ' is "3D". Parameter Item Data format...

  • Page 136: Parameter Setting Value

    STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remarks Serial communication time out 16-bits hexadecimal 60 sec. step setting (Unit: sec.) coded ASCII [System reservation] 88-bits hexadecimal coded ASCII Parameter Item Setting range I/O REMOTE (X2): Input operation port setting COM1 (X3): COM2 (X4): COM3 (X5 STP-Link):...
  • Page 137 STP-iXA3306 Series Turbomolecular Pump Example: Input operation port: = I/O REMOTE TMS Option: = DISABLE Second Damage Limit Option: = ENABLE First Damage Limit Warning: = ENABLE Pump Runtime Over Warning: = DISABLE Pump Runtime Over Warning hours: 000003E8 = 1,000 (×100 hours) Imbalance Warning: = ENABLE Pump Overload Warning:...

  • Page 138: 5.4.17 Setoptionfunc

    STP-iXA3306 Series Turbomolecular Pump 5.4.17 SetOptionFunc Function: Changes the setting value of the input operation port, warning function, and serial communication time out. CAUTION There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is exceeded, it not only may become impossible to change the setting but can also cause pump failure.
  • Page 139 STP-iXA3306 Series Turbomolecular Pump Parameter Item Data format Remarks Pump Overload Warning 16-bits hexadecimal Default 0000 Rotational speed setting coded ASCII (0.0%) Default 003C Serial communication 16-bits hexadecimal (60 sec.) time out setting (Unit: sec.) coded ASCII [System reservation] 88-bits hexadecimal coded ASCII *1 Assign the parameter value the reading data of ReadOptionFunc (?=) or FFFF32003CFFhex.

  • Page 140: 5.4.18 Readcondition

    STP-iXA3306 Series Turbomolecular Pump Parameter ASCII *1 Assign the parameter value the reading data of ReadOptionFunc (?=) or FFFF32003CFFhex. *2 Assign the parameter value the reading data of ReadOptionFunc (?=) or Fhex. 5.4.18 ReadCondition Function: Reads the pump model and damage point. Transmission frame: PC→SIM Stx Etx LRC...
  • Page 141 STP-iXA3306 Series Turbomolecular Pump Example: Pump model: 5354502D6958413333303620202020202020202020 = STP-iXA3306 Damage point: = 50 Parameter "S" "T" "P" "–" "i" "X" "A" "3" "3" "0" ASCII 35 33 35 34 35 30 32 44 36 39 35 38 34 31 33 33 33 33 33 30 Parameter "6"...

  • Page 142: 5.4.19 Readeventswithtime

    STP-iXA3306 Series Turbomolecular Pump 5.4.19 ReadEventsWithTime Function: Reads the "Error Record" with detection time. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etx LRC PC→SIM SIM→PC Stx Parameter 15 to 22 Etx LRC *1 The HEX code of ASCII character ' } ' is "7D". Parameter Item Data format...
  • Page 143 STP-iXA3306 Series Turbomolecular Pump 1. In case of time flag = 0 Parameter Item Data format Remarks Error Code 8-bits hexadecimal coded ASCII Time flag 8-bits hexadecimal coded ASCII Pump running time 32-bits hexadecimal Unit: minute coded ASCII Control unit running time 32-bits hexadecimal Unit: minute coded ASCII...
  • Page 144 STP-iXA3306 Series Turbomolecular Pump Example: In case of Disturbance X_H detection at September 13, 2007 12: 34 Parameter ASCII 30 44 30 31 30 37 30 39 31 33 31 32 33 34 *3 System reservation Example: When 3 errors have been detected in the past; The number of "Error Record": = 3 errors The maximum number of "Error Record":...
  • Page 145 STP-iXA3306 Series Turbomolecular Pump Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 *1 System reservation MT-82E-001-H Page 133...

  • Page 146: 5.4.20 Setoptions

    STP-iXA3306 Series Turbomolecular Pump 5.4.20 SetOptions Function: Changes the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC Parameter Item Data format Remark Optional function number...

  • Page 147: 5.4.20.2 Second Speed Selection

    STP-iXA3306 Series Turbomolecular Pump This value can be changed in the range from half of the rated rotational speed to the rated rotational speed. When the parameter value is larger than the rated rotational speed, it is automatically set to the rated rotational speed. When the parameter value is smaller than half of rated rotational speed, it is automatically set to half of rated rotational speed.

  • Page 148: 5.4.21 Readoptions

    STP-iXA3306 Series Turbomolecular Pump 5.4.21 ReadOptions Function: Reads the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC Parameter Item Data format Remark...

  • Page 149: Second Speed Select

    STP-iXA3306 Series Turbomolecular Pump Example: Second speed setting : 00E1 = 225 Hz = 13500 rpm Second speed option setting : 0000 = DISABLE Selected speed value : 01C2 = 450 Hz = 27000 rpm (Normal rating speed setting) Parameter ASCII 30 30 31 34 30 30 45 31 30 30 30 30 30 31 43 32 5.4.21.2 Second speed select...
  • Page 150 STP-iXA3306 Series Turbomolecular Pump This page intentionally blank. MT-82E-001-H Page 138...

  • Page 151: Stp-Link And Display Unit

    STP-iXA3306 Series Turbomolecular Pump STP-LINK and DISPLAY UNIT The STP-Link (optional accessory) and the display unit iDT-001 (optional accessory) are available with the STP pump. STP-Link The "STP-Link" is a Windows application for operating the STP pump, confirming the pump status or setting various settings.

  • Page 152: Display Unit

    STP-iXA3306 Series Turbomolecular Pump Display unit The "display unit" operates the STP pump, confirms the pump status or sets various settings. The display unit iDT-001 is equipped with an LCD and flat panel switches. See the Instruction Manual of the "Display unit iDT-001" for the detailed specification and operating methods.

  • Page 153: Safety Functions

    STP-iXA3306 Series Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. When two or more warnings are detected simultaneously, a high-priority warning is indicated. Also, the warning signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.

  • Page 154: Operation After A Power Recovery

    STP-iXA3306 Series Turbomolecular Pump Table 45 shows the states of LED output and the "X2 REMOTE" output signals at a power failure. REMOTE output signal LEDs (REMOTE X2) Rotational Duration of speed power failure ALARM POWER FAILURE POWER N.O. N.C. 5,000 rpm or Approx.

  • Page 155: Abnormal State Of Magnetic Bearing (Disturbance)

    STP-iXA3306 Series Turbomolecular Pump 7.1.3 Abnormal state of magnetic bearing (Disturbance) CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump. If "FAILURE" cannot be released after reset operation, contact Service office. When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands on the touch down bearing and stops.

  • Page 156: Overspeed

    STP-iXA3306 Series Turbomolecular Pump 7.1.8 Overspeed When the rotational speed of the STP pump exceeds 29,000 rpm due to a failure in the motor driver, the STP pump changes into free-running and stops. The "FAILURE" LED (red) illuminates, and a failure signal is output from the "X2 REMOTE" connector.

  • Page 157: Warning" Function

    STP-iXA3306 Series Turbomolecular Pump "WARNING" function 7.2.1 "WARNING" function The STP pump is provided with a WARNING function when an overhaul is needed following a self-test as shown in Table 46. The type of warning is indicated by flashing pattern of the "FAILURE" LED (orange). When two or more warnings are detected simultaneously, a high-priority warning is indicated.

  • Page 158: Warning Output

    STP-iXA3306 Series Turbomolecular Pump ↓Warning detection "FAILURE" LED indication First Damage Limit Second Damage Limit (3 flashes in orange) Pump Run Time Over Pump Overload Corresponding to (2 flashes in orange) warning type Imbalance (1 flash in orange) 1 cycle X2 REMOTE output WARNING N.O OUT Close...

  • Page 159: Contents Of Warning Function

    STP-iXA3306 Series Turbomolecular Pump Contents of WARNING function 7.3.1 First Damage limit Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air from outside or in the event of power failure, can damage the touch-down bearings. The STP pump monitors these impacts and assigns damage points to the event of "Disturbance"...

  • Page 160: Pump Overload

    STP-iXA3306 Series Turbomolecular Pump 7.3.4 Pump Overload "Pump Overload" is displayed when the state that the motor current exceeding the setting value continues during the fixed time or the state that the STP pump rotational speed drops below the setting value continues during the fixed time. However, the motor current and the rotational speed are monitored only in the NORMAL state.

  • Page 161: Warning Function Setting

    STP-iXA3306 Series Turbomolecular Pump WARNING function setting The WARNING functions can be set to Enable or Disable. Set to "ENABLE" when using the WARNING function. Set to "DISABLE" to release each WARNING function after the WARNING is detected. A setting value of the "Pump Run Time Over" and "Pump Overload" are adjustable. The WARNING detection can be released by setting the value larger than pump running hours after "Pump Run Time Over"...

  • Page 162: Troubleshooting Immediately After Failure Occurs

    STP-iXA3306 Series Turbomolecular Pump Troubleshooting immediately after failure occurs The STP pump is provided with safety functions for various abnormities/errors. A safety function operates when an abnormality/error occurs. The "FAILURE" LED illuminates or flashes. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.

  • Page 163: Troubleshooting

    STP-iXA3306 Series Turbomolecular Pump Troubleshooting 7.6.1 Indication of "FAILURE" LED (red) The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error. When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the failure signal is output from the "X2 REMOTE"...
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  • Page 165: Error List (Continued)

    STP-iXA3306 Series Turbomolecular Pump MT-82E-001-H Page 153...

  • Page 166: Error List (Continued)

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  • Page 167: Error List (Continued)

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  • Page 168: Error List (Continued)

    STP-iXA3306 Series Turbomolecular Pump MT-82E-001-H Page 156...

  • Page 169: Error List (Continued)

    STP-iXA3306 Series Turbomolecular Pump MT-82E-001-H Page 157...

  • Page 170: Indication Of "Failure" Led (Green)

    STP-iXA3306 Series Turbomolecular Pump 7.6.2 Indication of "FAILURE" LED (green) If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED flashes green. This is the indication of STP pump or control unit failure. Contact Service Office. 7.6.3 No Indication of the "FAILURE"...

  • Page 171: Maintenance And Inspection

    NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office.

  • Page 172: Cleaning

    Contact with the atmosphere may cause a reaction of the deposit. DO NOT open the STP pump to the atmosphere. Edwards can supply a Temperature Management System (TMS) unit which will keep the temperature high inside the STP pump and prevent the accumulation of deposit. For details, contact Edwards. MT-82E-001-H Page 160...

  • Page 173: Maintenance

    5 years No gases used (only vacuum pumping) Other use 2 years Dependent on application, contact Edwards. "Etching" includes semiconductor etching and LCD etching. Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is essential to have the touch down bearings replaced regardless of the recommended overhaul intervals.

  • Page 174: Recommended Maintenance Intervals For Main Parts

    STP-iXA3306 Series Turbomolecular Pump 8.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause unexpected failures.

  • Page 175: Transporting For Repair Or Overhaul

    Procedure". CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
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  • Page 177: Storage And Disposal

    STP-iXA3306 Series Turbomolecular Pump STORAGE AND DISPOSAL Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: 1. Store the STP pump in a vertical position. 2.

  • Page 178: Disposal

    Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-82E-001-H Page 166...

  • Page 179: Service, Spares And Accessories

    A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: ...

  • Page 180: Accessories

    STP-iXA3306 Series Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual STP Pump Instruction Manual This manual Supplied with STP pump Power cable Primary input power Standard cable length is 5 m.
  • Page 181 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2016 Edwards Japan Limited. All rights reserved.

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