Connect To The Emergency Stop Circuit; Schematic Diagram Of Emergency Stop Facility - Edwards EPX HiVac Series Instruction Manual

riicWARCS
A419-00-880 Issue K
• Route and secure cables, hoses and pipe-work neatly during installation to avoid possible risk of trips.
• Wipe up any water spilt during installation to avoid possible risk of slips.
• Each EPX pump must be connected to an independent water circuit not in series with each other or other
equipment.
• The cooling water supply should have a lock out/tagout facility in accordance with SEMI S2·0200 clause 17.4.
• Edwards recommends incorporating a suitable ball-type flow indicator in the water return pipeline, to
provide a visual indication of cooling water flow through the EPX pump.
• Edwards recommends incorporating a suitable filter in the water supply pipeline, if the water supply contains
particulates. (For the cooling water supply specification refer to Section 2.4).
To conserve resources we recommend t hat the return water is cooled and re-circulated.
3. 9 Connect to the emergency stop circuit
Refer to Figure 18. The pump must be connected to an emergency stop faci lity, which should be located near to the
pump. The operation of the emergency stop function should immediately disconnect power from the pump when the
emergency stop control is operated. Returning the emergency stop control to its normal operating position should
not result in power being re-applied to the pump; a separate start or reset control should be used for this.
The emergency stop control must be compliant with clause 12 of SEMI S2·0200.
Figure 18 - Schematic diagram of eme rgency stop facility
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EMERGENCY
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© Edwards limited 2017. All rights reserved.
RE:SE:T/START
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Emergency Stop
Facility
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