Standard Control; Application; Wiring - Omron E5AR - MANUAL 2 User Manual

Section 3 Typical Control Examples

3.1 Standard control

The following is an example of basic, single-loop control whereby temperature control of a heater plate for
semiconductors is carried out (example of combined sensor and heater).

■ Application

IN1
Channel 1
PV
+
SP
-
PID*
MV
OUT1

■ Wiring

3-2
When controlling a heater plater for semiconductor wafers with the
E5AR, the control mode is set to standard control and instrumentation
is as shown in the following example.
Sensor
Heater
The control period can be set from 0.2 sec to 99.0 sec-
onds on the E5AR/ER. (The shortest setting on our previ-
Hint
ous models was 1 sec).
For high precision control applications that previously
required the combined use of our cycle control unit
(G32A-EA) and an SSR, the G32A-EA is now no longer
needed.
The platinum resistance temperature input sensor Pt100 is connected
to the IN1 terminal, and the OUT1 terminal is connected to the SSR.
Wiring for the E5AR-Q4B is shown in the following schematic.
100 - 240 V AC
Sensor
Sensor
SSR
G3PA
IN1 OUT1
SUB1 SUB2 SUB3 SUB4 U-ALM
8.8.8.8.8
8
PV
8.8.8.8.8
SV
8.8.8.8
MV
OUT1 OUT2 OUT3 OUT4 STOP RSP
PF1 PF2/CH
A/M
SSR
G3PA
E5AR
A B C
1
2
3
4
5
6
1
2
3
4
5
OUT1
6
F G H I
D E
1
2
3
4
5
6
1
2
3
4
5
IN1
6
J K