Maintenance And Inspection; Routine Inspection; Vacuum And Exhaust Piping - EBARA EV-SA20 Instruction Manual

6. Maintenance and Inspection

6.1 Routine Inspection

Check periodically that ALARM signal is not output on the panel or remote output. When the ALARM
display appears, take action in accordance with Section 9. "Troubleshooting".
Be sure to turn off the power at the circuit protector (CP) and disconnect the power cable
from the power connector, before the pump maintenance. Never supply power to the
pump, until you have completed the pump maintenance.
The pump and exhaust piping will remain at a high temperature during operation and for
a short time after the pump has stopped. Avoid contact and keep inflammable
substances out of reach. Do not remove the outer cover during operation.
Even when the cause of the ALARM signal has been removed, the signal will be maintained until the
RESET signal is entered. After you have taken the remedial action, press the RESET button on the
panel or the RESET signal from the control signal connector to reset the ALARM.
When an ALARM signal has been generated in the REMOTE operating mode, do not
start the maintenance tasks until you have interrupted the external RUN signal.
If any abnormal symptoms other than those displayed on the panel appear, take action in accordance
with the instruction of Section 9. "Troubleshooting".

6.2 Vacuum and Exhaust Piping

Follow the instructions below when carrying out maintenance work on the vacuum and exhaust piping
of the pump..
(1) Be sure to interrupt the power supply.
(2) After you have washed the piping, do not reconnect until it has dried completely.
The pump casing, inlet piping and exhaust piping become extremely hot during
operation and for some time after stopping. Be sure that pump and exhaust piping do
not come in contact with humans or inflammable substances. Do not remove the pump
cover during operation.
Be sure to check for gas leaks after you have finished pipe maintenance work.
When checking for gas leaks by pressurization, please pressurize by less than 0.05
MPa.
PM10U
WARNING
WARNING
WARNING
WARNING
WARNING
P.47
EBARA
CORPORATION