Connect The Cooling Water Supply - Edwards EPX HiVac Series Instruction Manual

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A419-00-880 Issue K
3.8
Connect the cooling water supply
WARNING
In products supplied with quick-release water connectors, a water expansion valve is installed
between the connector and the pump. This is to prevent over-pressurisation of the water circuit
in the event that the pump is incorrectly operated with water supply disconnected. When using or
maintaining this pump DO NOT REMOVE THE WATER EXPANSION VALVE.
WARNING
A release of water under pressure constitutes a significant safety hazard. The water supply should
be provided with an isolator in accordance with SEMI S2-0200 lockout/Tagout requirements.
CAUTION
Do not operate the pump without connecting the water supply and return lines, as permanent damage may be
caused to the equipment.
CAUTION
Appropriate filtration must be provided to ensure that the water supply quality is in accordance with Table 9.
CAUTION
Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such
that the dew point is not reached.
CAUTION
To prevent damage to the pump in the event of cooling water supply failure or a blockage in the pump, Edwards
recommends incorporating a suitable flow switch in the cooling water return pipelines. The outputs of the flow
switch can be connected to the control equipment to shut down the pump if the cooling water flow through the
pump gets too low.
Connect the cooling water supply as follows:
1. If the pump has been supplied with quick-release connectors, fit a suitable female quick-release connector to
the cooling water supply line, and a suitable male quick-release connector to the cooling water return line
(refer to Section 2).
2. Refer to Figure 2. Remove the yellow blanking-caps from the cooling water inlet (Figure 2, item 4) and outlet
(Figure 2, item 9).
3. Fit the male quick-release connector on the cooling water return pipeline to the cooling water outlet (Figure 2,
item 9).
4. Fit the female quick-release connector on t he cooling water supply pipeline to the cooling water inlet (Figure 2,
item4).
5. Turn on the cooling water supply.
6. Inspect the water hoses, pipelines and connection to make sure t hat there are no leaks.
7. Turn off the water supply whilst the remainder of the installation procedure is completed .
Take note of the following when connecting the cooling water supply and return pipelines:
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