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2.
Use the O‑ring supplied and suitable nuts, bolts and washers (not supplied) to
connect the inlet flange (Refer
inlet flange is not designed for use with a trapped O ring or centring ring. Use our
half claw clamps when connecting an ISO style foreline flange to the dry pumping
system inlet. Refer to
3.
Use the trapped O‑ring and clamp supplied to connect the exhaust outlet (Refer
Front view
Figure 12 Connecting the pump inlet
1. Undo the screws
1. Undo the screws
3. Do not use trapped O‑ring or centering
3. Do not use trapped O‑ring or centering
ring
ring
Flange diam‐
eter
ISO100
5.6 Connect the purge gas supply
WARNING:
A release of nitrogen has potential to cause harm by asphyxiation. The nitrogen
supply should be able to be isolated for lockout/tagout purposes.
CAUTION:
Ensure that the purge gas supply conforms to the requirements given in the
data
on page 15. Failure to do so may cause the gas pipelines to become blocked or
the dry pumping system to be damaged.
A41870880_A
A41870880_A - Installation
Front view
Figure: Connecting the pump
on page 10 or
Rear view
Half claw clamp part num‐
ber
C10007093
Page 37
on page 10) to the vacuum system. The
inlet.
on page 12) to the exhaust extraction system.
2. Remove cover
2. Remove cover
Quantity required
8
07/2021 - ©Edwards Limited
Tightening torque
(Nm)
5
Technical
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