Leak Test The Ixl120 System; Connect The Nitrogen Supply; Flammable/ Pyrophoric Materials - Edwards iXL120 Instruction Manual

A541-11-880 Issue A
3. If you are using t he ISO63 inlet port , t hen use t he O-ring supplied and suit able nut s, bolt s and washers (not
supplied) t o connect t he inlet -f lange
unused inlet port should remain blanked of f .
4. Use t he NW25 t rapped O-ring and clamp supplied t o connect t he exhaust out let
pipe, t o your exhaust ext ract ion syst em.
3. 6

Leak test the iXL120 system

Leak test the system after installation and seal any leaks found to prevent leakage of dangerous
substances out of the system and leakage of air into the system.
Not e: If you need f ur t her i nf or mat ion on l eak-t est i ng, cont act Edwar ds.
3. 7

Connect the nitrogen supply

3. 7. 1

Flammable/ pyrophoric materials

You must obey the instructions and take note of any precautions given below to ensure that
pumped gases do not enter their flammable ranges.
 The iXL120 and iXL120N are not suit able f or use wit h pot ent ially f lammable or pyrophoric mat erials.
When f lammable or pyrophoric mat erials are present wit hin t he pump t here may be addit ional risks t hat t he user is
responsible f or assessing and managing as part of t he ent ire Process Tool inst allat ion. The severit y of t he risks and
t he necessary cont rol measures will depend largely on whet her t he t ool exhaust is in t he f lammable region, if t his is
part of normal Process Tool operat ion, or if it might only occur under rare condit ions. The addit ional risks arise
because all dry pumps must be considered a pot ent ial source of ignit ion owing t o t he heat of compression, or possibly
f rict ion. If ignit ion occurs t hen t he f ollowing may happen:
 High pressures could occur wit hin t he pump and may not be cont ained
 A f lame f ront could t ravel back up t he f oreline
 A f lame f ront could t ravel downst ream f rom t he exhaust of t he pump.
Indust ry best pract ice suggest s t hat t he f ollowing measures will reduce t he risks of pumping f lammable mixt ures and
pyrophoric mat erials, but it is t he user's responsibilit y t o carry out a risk assessment and t ake appropriat e measures:

Do not allow air t o ent er t he equipment
 Ensure t hat t he syst em is leak t ight
 Ensure t hat gases in t he pump do not ent er t he f lammabl e range. This may be achieved by dilut ing gases in
t he pump by supplying suf f icient inert gas purge. For example, dilut ion wit h nit rogen t o below one quart er
LEL (lower explosive limit ) or, if t hat is not pract ical, t o below 60 % LOC (limit ing oxidant concent rat ion).
 The gas module supplied wit h t he pump is not int ended t o perf orm a saf et y f unct ion. Users may need t o
consider adding appropriat e measures t o monit or t he f low of purge gas, f or example ext ernal sensors.
Syst ems t hat are f it t ed wit h t he loadlock gas module must not be used on applicat ions pumping f lammable or
pyrophoric mat erials.
For f urt her inf ormat ion please ref er t o Semiconduct or Pumping Applicat ion Guide (Publicat ion no. P411-00-090) or
cont act Edwards.
Page 18
(Figure 2, it em 17b) of t he iXL120 syst em t o your vacuum syst em. The
WARNING
WARNING
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
(Figure 2, it em 5) on t he exhaust
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