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3. Use the trapped O-ring seal and clamp supplied to connect the exhaust outlet
pipe to the exhaust extraction system.
Undo screws
3.4
Connect to the factory extraction system (optional)
An extraction port is provided to allow secondary exhaust ventilation. When connected to the Photohelic switch/
gauge accessory, the system will continuously monitor the airflow from the enclosure and if interrupted it will stop
the pump in combination with the Disconnect Box accessory.
Refer to
Section 2.7
for extraction rates required and to
Refer to
Figure
3, item 7 for location of the extraction port.
3.5
Connect the nitrogen supply
A release of nitrogen has potential to cause harm by asphyxiation. The nitrogen supply should
enable isolation in accordance with SEMI S2-0200 Lockout/Tagout requirements.
Ensure that the nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn't,
the gas pipelines may become blocked or the system may be damaged.
Refer to
Figure
4, item 14 for the location of the nitrogen purge port. Refer to
module configuration.
Note:
Only the 'N' variants have the facility for a nitrogen purge. Refer to
requirements.
© Edwards Limited 2015. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 8 - Connecting the pump inlet
Section 7.3
WARNING
CAUTION
(Figure
4, item 17) on the exhaust
Remove cover
for the required exhaust extraction cover kit.
Section 5.6
for instructions on gas
Section 2.4
for nitrogen supply
A540-55-880 Issue D
Page 19
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