Tracer Gas Analysis - Edwards iXL600 Instruction Manual

A540-55-880 Issue D
2.7

Tracer gas analysis

Tracer gas fugitive emission testing was carried out in accordance with the method given in
A 50 mm duct was connected to the extraction port on top of the enclosure.
Test Parameters
Tracer gas
Tracer gas concentration
Tracer gas release rate
Tracer gas release points
System Parameters
Extraction flow rate:
From port on top of enclosure
Volume of enclosure
Free volume of enclosure
Air changes per minute
Process Gas
Chlorine
Ammonia
Carbon Monoxide
Fluorine
Hydrogen
Methane
Nitrous Oxide
Nitrogen Trifluoride
Hydrogen Chloride
Sulphur
Hexafluoride
Silicone SiCl4
Tetrachloride
*
Where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV).
Page 14
Table 10 - Tracer gas test parameters
SF (Sulphur Hexafluoride)
6
100%
0.25 to 1 slm
Tracer gas flow evenly split between 2 release points
1) exhaust flange on pump
2) exhaust elbow joint within exhaust extraction cover
Table 11 - Tracer gas test system parameters
Table 12 - Worst case test results
Maximum
TLV/LEL
Gas Flow
(ppm)
(slm)
Cl 0.2 0.5
2
NH 20 25
3
CO 0.3 1
F 0.5 25
2
H 30 4000
2
CH 0.05 1000
4
N O 20 50
2
NF 0.5 10
3
HCI 0.4 5
SF 0.2 1000
6
0.1 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
iXL600/
iXL1000
180
0.11
0.069
43.5
Max SF
25% TLV/ SF
6
Detected
LEL Release
outside
(ppm) rate (slm)
enclosure
0.125 1
6.25 1
0.25 1
6.25 1
1000 1
250 1
12.5 1
2.5 1
1.25 1
250 1
0.25 1
© Edwards Limited 2015. All rights reserved.
Appendix A2 of SEMI S6.
iXL600N/
Units
iXL1000N
3
180 m /h
3
0.11 m
3
0.068 m
44.3 per min
6
ERC Pass/
(ppm) Fail
0.25 0.05 Pass
0.25 5.00 Pass
0.25 0.08 Pass
0.25 0.13 Pass
0.25 7.50 Pass
0.25 0.01 Pass
0.25 5.00 Pass
0.25 0.13 Pass
0.25 0.10 Pass
0.25 0.05 Pass
0.25 0.03 Pass
*