Selected when detecting the overall defects of specified zones and measurement
objects.
Rectangle, ellipse
(circle), polygon
1.
In the Item Tab area, tap [Region setting].
2.
Use the Drawing tools to specify the measurement region.
Up to 8 figures can be combined.
3.
In the figure setting area, tap [OK].
The measurement region is registered and displayed in the Image Display area.
Measurement Parameters (Precise Defect)
This item specifies the judgement condition for measurement results.Measurement parameters can be
changed as needed to address unstable measurement results or to increase the processing speed.
1.
In the Item Tab area, tap [Measurement].
FZ3 Processing Items List Manual
Precise Defect
219
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