List Of Wastes During Maintenance - EBARA ESA25-D Instruction Manual

P.60
Following labels are attached to pump covers. When they are hard to read for
discoloring or peeling off, please stick them again as directed.
[DANGER]
[WARNING]
[WARNING]
[WARNING]
[WARNING]
[CAUTION]

8.6 List of wastes during maintenance

Table 8.4 lists wastes from general user maintenance. Dispose the wastes
properly according to your local waste disposal regulations in each area.
Part
Lubricant oil
Lithium battery
O-ring
PM10U
Table. 8.3 Labels
Label's Name
HAZARDOUS WEIGHT DANGER LABEL
HAZARDOUS VOLTAGE WARNING LABEL
HIGH TEMPERATURE WARNING LABEL
HAZARDOUS MATERIAL WARNING LABEL
HIGH TEMPERATURE EYEBOLT WARNING LABE
CHARGE MARK LABEL
Table 8.4 List of wastes during maintenance
Equipped on
Inside of pump module.
See section 8.4.
CPU board.
(No necessary to replace at
usual maintenance.)
Connection of vacuum line
Parts No.
C-7110-316-0001
C-7110-313-0001
C-7110-312-0001
C-7110-314-0001
C-7110-317-0001
L
C-7110-315-0001
Remarks
Refer to Appendix 1,2 for Material
Safety Data Sheet.
Refer to Appendix 3 for Material
Safety Data Sheet.
Usual industrial waste.
EBARA
CORPORATION