Safety Function Of Blade Temperature Sensor; Stp Pump Specifications - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
1.1.3

Safety function of blade temperature sensor

When R TMP OVERHEAT occurs or R TMP HIGHER frequently occurs, continuous use of the pump may
lead to serious failure such as rotor blade breakage. The cause of the WARNIGN/failure may be an
overload on the pump, accumulation of deposits in the pump, deterioration or damage of parts, or other
reasons. Therefore, review the pump use conditions or immediately overhaul the pump.
To let the temperature sensor adequately function, be sure to observe the purge gas flow rate indicated in
"STP pump specifications" in Section 1.1.1.
On a model equipped with a blade temperature sensor with its safety function enabled, a
warning/error (RTMP HIGHER or RTMP OVERHEAT) is issued when the temperature of the rotor
blade has risen to the setting temperature or higher.
For other WARNING and failure messages, refer to the Instruction Manual for STP Control Unit (C).
WARNING and failure
message
Pump operation
LED indication on STP
control unit
LCD display message on
STP control unit
Cancellation of WARNING
and failure
CAUTION
RTMP HIGHER
Operation can continue
No change to the LED indication
RTMP HIGHER
When the temperature of the rotor
blade has fallen to the cancellation
temperature or below, the warning
is automatically cancelled.
RTMP OVERHEAT
Stop
Failure lamp in LED indication
lights
RTMP OVERHEAT
If the temperature of the rotor
blade is cancellation
temperature or below after the
pump has stop, the error can be
cancelled by following the reset
signal.
MT-92E-101-C
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