Troubleshooting (2) Warning - EBARA EV-S20 Instruction Manual

Multi-stage dry vacuum pump ce / semi / nrtl model 200-220v(50/60hz)
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10.2 Troubleshooting (2) WARNING

Display
WARN: WATER
FLOW LOW
WARN: PUMP N2
FLOW LOW
WARN: CASING
TEMP HIGH
WARN: BP MOTOR
TEMP HIGH
WARN: MP MOTOR
TEMP HIGH
WARN: BP DRIVER
TEMP HIGH ####
WARN: MP DRIVER
TEMP HIGH ####
WARN:
## COMM.ERROR
WARN: PUMP BOX
TEMP HIGH
WARN:PUMP N2
VALVE ERROR
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
WARNING signal still remains, the WARNING display will appear again even after you have reset.
PM10U
Symptom
Water flow is reduced.
Pump N2 flow is
reduced.
Casing temperature
rises.
Booster pump (BP)
motor coil temp. rises.
Main pump (MP)
motor coil temp. rises.
Booster pump (BP)
driver temp. rises.
Main pump (MP)
driver temp. rises.
Communication is not
established.
Temp. rises in pump
cover.
N2 valve open.
Check Item
Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
N2 port is not connected.
Primary pressure is
insufficient.
Regulator setting value
LOW.
N2 pipe is clogged.
Leaks on N2 pipe.
Instrument failure
Pump back pressure rises.
Increase of the gas load.
Accumulation of by-product
Cooling water flow is
reduced.
Cooling water flow is
reduced.
Motor failure
Cooling water flow is
reduced.
Connection error of the
instrumented units
Instrument failure
Cooling water flow is
reduced.
The ambient temperature is
high.
Setting is N2 0 mode.
P.92
Corrective Action
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
Connect N2 pipe fitting.
Apply sufficient pressure.
Increase pressure setting.
Replace N2 piping.
Check the fittings.
Replace instrument.
Check exhaust pipe
Reduce the inflow gas
amount.
Replace or overhaul pump.
Increase cooling water flow.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
Increase cooling water flow.
Check the connection of the
instrumented unit.
Replace instrument.
Increase cooling water flow.
Confirm the ambient
temperature (less than 30℃).
Close N2 valve.
(at the side of pump)
EBARA
CORPORATION

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